GB1417085A - Plasma etching - Google Patents

Plasma etching

Info

Publication number
GB1417085A
GB1417085A GB2352773A GB2352773A GB1417085A GB 1417085 A GB1417085 A GB 1417085A GB 2352773 A GB2352773 A GB 2352773A GB 2352773 A GB2352773 A GB 2352773A GB 1417085 A GB1417085 A GB 1417085A
Authority
GB
United Kingdom
Prior art keywords
plasma etching
etching
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2352773A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STC PLC
Original Assignee
Standard Telephone and Cables PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Standard Telephone and Cables PLC filed Critical Standard Telephone and Cables PLC
Priority to GB2352773A priority Critical patent/GB1417085A/en
Priority to ZA00741303A priority patent/ZA741303B/xx
Priority to US05/466,570 priority patent/US3940506A/en
Priority to NLAANVRAGE7406222,A priority patent/NL183974C/xx
Priority to DE2422922A priority patent/DE2422922A1/de
Priority to AU69017/74A priority patent/AU6901774A/en
Priority to FR7417175A priority patent/FR2230148B1/fr
Priority to JP49054603A priority patent/JPS527315B2/ja
Publication of GB1417085A publication Critical patent/GB1417085A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/24—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
    • H10P50/242—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group IV materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/68—Organic materials, e.g. photoresists
    • H10P14/683—Organic materials, e.g. photoresists carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
    • H10P50/282—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials
    • H10P50/283—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials by chemical means
GB2352773A 1973-05-17 1973-05-17 Plasma etching Expired GB1417085A (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
GB2352773A GB1417085A (en) 1973-05-17 1973-05-17 Plasma etching
ZA00741303A ZA741303B (en) 1973-05-17 1974-02-27 Plasma etching and deposition
US05/466,570 US3940506A (en) 1973-05-17 1974-05-03 Selective plasma etching and deposition
NLAANVRAGE7406222,A NL183974C (nl) 1973-05-17 1974-05-09 Werkwijze voor etsen door middel van een plasma.
DE2422922A DE2422922A1 (de) 1973-05-17 1974-05-11 Verfahren zum steuern der aetzrate beim plasmaaetzen
AU69017/74A AU6901774A (en) 1973-05-17 1974-05-16 Plasma etching
FR7417175A FR2230148B1 (enExample) 1973-05-17 1974-05-17
JP49054603A JPS527315B2 (enExample) 1973-05-17 1974-05-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2352773A GB1417085A (en) 1973-05-17 1973-05-17 Plasma etching

Publications (1)

Publication Number Publication Date
GB1417085A true GB1417085A (en) 1975-12-10

Family

ID=10197087

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2352773A Expired GB1417085A (en) 1973-05-17 1973-05-17 Plasma etching

Country Status (8)

Country Link
US (1) US3940506A (enExample)
JP (1) JPS527315B2 (enExample)
AU (1) AU6901774A (enExample)
DE (1) DE2422922A1 (enExample)
FR (1) FR2230148B1 (enExample)
GB (1) GB1417085A (enExample)
NL (1) NL183974C (enExample)
ZA (1) ZA741303B (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0009558A1 (de) * 1978-08-21 1980-04-16 International Business Machines Corporation Verfahren und Vorrichtung zur Modifizierung einer Oberfläche mittels Plasma
US4226665A (en) * 1978-07-31 1980-10-07 Bell Telephone Laboratories, Incorporated Device fabrication by plasma etching
US4226896A (en) * 1977-12-23 1980-10-07 International Business Machines Corporation Plasma method for forming a metal containing polymer
EP0047395A3 (en) * 1980-09-10 1982-04-07 International Business Machines Corporation System for reactive ion etching

Families Citing this family (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3975252A (en) * 1975-03-14 1976-08-17 Bell Telephone Laboratories, Incorporated High-resolution sputter etching
GB1499857A (en) * 1975-09-18 1978-02-01 Standard Telephones Cables Ltd Glow discharge etching
JPS52114444A (en) * 1976-03-22 1977-09-26 Nippon Telegraph & Telephone Plasma etching method
JPS5370688A (en) * 1976-12-06 1978-06-23 Toshiba Corp Production of semoconductor device
FR2379889A1 (fr) * 1977-02-08 1978-09-01 Thomson Csf Dielectrique constitue par un polymere en couche mince, procede de fabrication de ladite couche, et condensateurs electriques comportant un tel dielectrique
US4252848A (en) * 1977-04-11 1981-02-24 Rca Corporation Perfluorinated polymer thin films
DE2862150D1 (en) * 1977-10-06 1983-02-17 Ibm Method for reactive ion etching of an element
US4188426A (en) * 1977-12-12 1980-02-12 Lord Corporation Cold plasma modification of organic and inorganic surfaces
US4176003A (en) * 1978-02-22 1979-11-27 Ncr Corporation Method for enhancing the adhesion of photoresist to polysilicon
US4162185A (en) * 1978-03-21 1979-07-24 International Business Machines Corporation Utilizing saturated and unsaturated halocarbon gases in plasma etching to increase etch of SiO2 relative to Si
US4181564A (en) * 1978-04-24 1980-01-01 Bell Telephone Laboratories, Incorporated Fabrication of patterned silicon nitride insulating layers having gently sloping sidewalls
US4222838A (en) * 1978-06-13 1980-09-16 General Motors Corporation Method for controlling plasma etching rates
US4208241A (en) * 1978-07-31 1980-06-17 Bell Telephone Laboratories, Incorporated Device fabrication by plasma etching
US4211601A (en) * 1978-07-31 1980-07-08 Bell Telephone Laboratories, Incorporated Device fabrication by plasma etching
US4283249A (en) * 1979-05-02 1981-08-11 International Business Machines Corporation Reactive ion etching
US4269896A (en) * 1979-08-31 1981-05-26 Hughes Aircraft Company Surface passivated alkali halide infrared windows
US4324611A (en) * 1980-06-26 1982-04-13 Branson International Plasma Corporation Process and gas mixture for etching silicon dioxide and silicon nitride
DE3164742D1 (en) * 1980-09-22 1984-08-16 Tokyo Shibaura Electric Co Method of smoothing an insulating layer formed on a semiconductor body
US4333793A (en) * 1980-10-20 1982-06-08 Bell Telephone Laboratories, Incorporated High-selectivity plasma-assisted etching of resist-masked layer
DE3173581D1 (en) * 1980-10-28 1986-03-06 Toshiba Kk Masking process for semiconductor devices using a polymer film
JPS5775429A (en) * 1980-10-28 1982-05-12 Toshiba Corp Manufacture of semiconductor device
US4361461A (en) * 1981-03-13 1982-11-30 Bell Telephone Laboratories, Incorporated Hydrogen etching of semiconductors and oxides
US4353777A (en) * 1981-04-20 1982-10-12 Lfe Corporation Selective plasma polysilicon etching
US4374011A (en) * 1981-05-08 1983-02-15 Fairchild Camera & Instrument Corp. Process for fabricating non-encroaching planar insulating regions in integrated circuit structures
US4414057A (en) * 1982-12-03 1983-11-08 Inmos Corporation Anisotropic silicide etching process
DE3420347A1 (de) * 1983-06-01 1984-12-06 Hitachi, Ltd., Tokio/Tokyo Gas und verfahren zum selektiven aetzen von siliciumnitrid
JPS6022340A (ja) * 1983-07-18 1985-02-04 Toshiba Corp 半導体装置の製造方法
US4588641A (en) * 1983-11-22 1986-05-13 Olin Corporation Three-step plasma treatment of copper foils to enhance their laminate adhesion
US4526806A (en) * 1983-11-22 1985-07-02 Olin Corporation One-step plasma treatment of copper foils to increase their laminate adhesion
US4524089A (en) * 1983-11-22 1985-06-18 Olin Corporation Three-step plasma treatment of copper foils to enhance their laminate adhesion
US4598022A (en) * 1983-11-22 1986-07-01 Olin Corporation One-step plasma treatment of copper foils to increase their laminate adhesion
US4511430A (en) * 1984-01-30 1985-04-16 International Business Machines Corporation Control of etch rate ratio of SiO2 /photoresist for quartz planarization etch back process
US4515652A (en) * 1984-03-20 1985-05-07 Harris Corporation Plasma sculpturing with a non-planar sacrificial layer
US4636435A (en) * 1984-09-28 1987-01-13 Japan Synthetic Rubber Company Limited Polymeric thin film, process for producing the same and products containing said thin film
US4615764A (en) * 1984-11-05 1986-10-07 Allied Corporation SF6/nitriding gas/oxidizer plasma etch system
JPS60143633A (ja) * 1984-11-29 1985-07-29 Hitachi Ltd 半導体装置の製造方法
NL8500771A (nl) * 1985-03-18 1986-10-16 Philips Nv Werkwijze voor het vervaardigen van een halfgeleiderinrichting waarbij een op een laag siliciumoxide aanwezige dubbellaag - bestaande uit poly-si en een silicide - in een plasma wordt geetst.
US4671849A (en) * 1985-05-06 1987-06-09 International Business Machines Corporation Method for control of etch profile
US4582581A (en) * 1985-05-09 1986-04-15 Allied Corporation Boron trifluoride system for plasma etching of silicon dioxide
EP0212585B1 (en) * 1985-08-27 1991-12-18 International Business Machines Corporation Selective and anisotropic dry etching
US4734157A (en) * 1985-08-27 1988-03-29 International Business Machines Corporation Selective and anisotropic dry etching
JPS6252933A (ja) * 1985-08-27 1987-03-07 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 気体プラズマ・エツチング方法
US5342693A (en) * 1988-06-08 1994-08-30 Cardiopulmonics, Inc. Multifunctional thrombo-resistant coating and methods of manufacture
US5262451A (en) * 1988-06-08 1993-11-16 Cardiopulmonics, Inc. Multifunctional thrombo-resistant coatings and methods of manufacture
US5338770A (en) * 1988-06-08 1994-08-16 Cardiopulmonics, Inc. Gas permeable thrombo-resistant coatings and methods of manufacture
US5182317A (en) * 1988-06-08 1993-01-26 Cardiopulmonics, Inc. Multifunctional thrombo-resistant coatings and methods of manufacture
JPH0383335A (ja) * 1989-08-28 1991-04-09 Hitachi Ltd エッチング方法
US5593794A (en) * 1995-01-23 1997-01-14 Duracell Inc. Moisture barrier composite film of silicon nitride and fluorocarbon polymer and its use with an on-cell tester for an electrochemical cell
US5983828A (en) * 1995-10-13 1999-11-16 Mattson Technology, Inc. Apparatus and method for pulsed plasma processing of a semiconductor substrate
US6253704B1 (en) 1995-10-13 2001-07-03 Mattson Technology, Inc. Apparatus and method for pulsed plasma processing of a semiconductor substrate
US6794301B2 (en) 1995-10-13 2004-09-21 Mattson Technology, Inc. Pulsed plasma processing of semiconductor substrates
US5865900A (en) * 1996-10-04 1999-02-02 Taiwan Semiconductor Manufacturing Company, Ltd. Etch method for removing metal-fluoropolymer residues
US5985375A (en) * 1998-09-03 1999-11-16 Micron Technology, Inc. Method for pulsed-plasma enhanced vapor deposition
US6228279B1 (en) * 1998-09-17 2001-05-08 International Business Machines Corporation High-density plasma, organic anti-reflective coating etch system compatible with sensitive photoresist materials
US6300042B1 (en) * 1998-11-24 2001-10-09 Motorola, Inc. Lithographic printing method using a low surface energy layer
US6417013B1 (en) 1999-01-29 2002-07-09 Plasma-Therm, Inc. Morphed processing of semiconductor devices
JP3287406B2 (ja) 1999-06-11 2002-06-04 日本電気株式会社 半導体装置の製造方法
SG112804A1 (en) * 2001-05-10 2005-07-28 Inst Of Microelectronics Sloped trench etching process
DE10224137A1 (de) * 2002-05-24 2003-12-04 Infineon Technologies Ag Ätzgas und Verfahren zum Trockenätzen
US20140273525A1 (en) * 2013-03-13 2014-09-18 Intermolecular, Inc. Atomic Layer Deposition of Reduced-Leakage Post-Transition Metal Oxide Films
CN119059523B (zh) * 2024-11-05 2025-02-14 中国科学院合肥物质科学研究院 一种锂离子电池硅碳负极材料及其制备方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3615956A (en) * 1969-03-27 1971-10-26 Signetics Corp Gas plasma vapor etching process
US3795557A (en) * 1972-05-12 1974-03-05 Lfe Corp Process and material for manufacturing semiconductor devices
DD105008A1 (enExample) * 1973-04-28 1974-04-05

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4226896A (en) * 1977-12-23 1980-10-07 International Business Machines Corporation Plasma method for forming a metal containing polymer
US4226665A (en) * 1978-07-31 1980-10-07 Bell Telephone Laboratories, Incorporated Device fabrication by plasma etching
EP0009558A1 (de) * 1978-08-21 1980-04-16 International Business Machines Corporation Verfahren und Vorrichtung zur Modifizierung einer Oberfläche mittels Plasma
EP0047395A3 (en) * 1980-09-10 1982-04-07 International Business Machines Corporation System for reactive ion etching

Also Published As

Publication number Publication date
DE2422922C2 (enExample) 1987-09-10
FR2230148B1 (enExample) 1978-11-17
JPS5036075A (enExample) 1975-04-04
NL7406222A (enExample) 1974-11-19
US3940506A (en) 1976-02-24
FR2230148A1 (enExample) 1974-12-13
DE2422922A1 (de) 1974-12-05
NL183974C (nl) 1989-03-01
AU6901774A (en) 1975-11-20
JPS527315B2 (enExample) 1977-03-01
NL183974B (nl) 1988-10-03
ZA741303B (en) 1975-03-26

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee