NL183974C - Werkwijze voor etsen door middel van een plasma. - Google Patents
Werkwijze voor etsen door middel van een plasma.Info
- Publication number
- NL183974C NL183974C NLAANVRAGE7406222,A NL7406222A NL183974C NL 183974 C NL183974 C NL 183974C NL 7406222 A NL7406222 A NL 7406222A NL 183974 C NL183974 C NL 183974C
- Authority
- NL
- Netherlands
- Prior art keywords
- etching
- plasma
- Prior art date
Links
- 238000005530 etching Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/312—Organic layers, e.g. photoresist
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Plasma & Fusion (AREA)
- Drying Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB2352773A GB1417085A (en) | 1973-05-17 | 1973-05-17 | Plasma etching |
Publications (3)
Publication Number | Publication Date |
---|---|
NL7406222A NL7406222A (xx) | 1974-11-19 |
NL183974B NL183974B (nl) | 1988-10-03 |
NL183974C true NL183974C (nl) | 1989-03-01 |
Family
ID=10197087
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NLAANVRAGE7406222,A NL183974C (nl) | 1973-05-17 | 1974-05-09 | Werkwijze voor etsen door middel van een plasma. |
Country Status (8)
Country | Link |
---|---|
US (1) | US3940506A (xx) |
JP (1) | JPS527315B2 (xx) |
AU (1) | AU6901774A (xx) |
DE (1) | DE2422922A1 (xx) |
FR (1) | FR2230148B1 (xx) |
GB (1) | GB1417085A (xx) |
NL (1) | NL183974C (xx) |
ZA (1) | ZA741303B (xx) |
Families Citing this family (64)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3975252A (en) * | 1975-03-14 | 1976-08-17 | Bell Telephone Laboratories, Incorporated | High-resolution sputter etching |
GB1499857A (en) * | 1975-09-18 | 1978-02-01 | Standard Telephones Cables Ltd | Glow discharge etching |
JPS52114444A (en) * | 1976-03-22 | 1977-09-26 | Nippon Telegraph & Telephone | Plasma etching method |
JPS5370688A (en) * | 1976-12-06 | 1978-06-23 | Toshiba Corp | Production of semoconductor device |
FR2379889A1 (fr) * | 1977-02-08 | 1978-09-01 | Thomson Csf | Dielectrique constitue par un polymere en couche mince, procede de fabrication de ladite couche, et condensateurs electriques comportant un tel dielectrique |
US4252848A (en) * | 1977-04-11 | 1981-02-24 | Rca Corporation | Perfluorinated polymer thin films |
EP0001538B1 (fr) * | 1977-10-06 | 1983-01-12 | International Business Machines Corporation | Procédé de décapage sélectif par ions réactifs d'un élément |
US4188426A (en) * | 1977-12-12 | 1980-02-12 | Lord Corporation | Cold plasma modification of organic and inorganic surfaces |
US4226896A (en) * | 1977-12-23 | 1980-10-07 | International Business Machines Corporation | Plasma method for forming a metal containing polymer |
US4176003A (en) * | 1978-02-22 | 1979-11-27 | Ncr Corporation | Method for enhancing the adhesion of photoresist to polysilicon |
US4162185A (en) * | 1978-03-21 | 1979-07-24 | International Business Machines Corporation | Utilizing saturated and unsaturated halocarbon gases in plasma etching to increase etch of SiO2 relative to Si |
US4181564A (en) * | 1978-04-24 | 1980-01-01 | Bell Telephone Laboratories, Incorporated | Fabrication of patterned silicon nitride insulating layers having gently sloping sidewalls |
US4222838A (en) * | 1978-06-13 | 1980-09-16 | General Motors Corporation | Method for controlling plasma etching rates |
US4211601A (en) * | 1978-07-31 | 1980-07-08 | Bell Telephone Laboratories, Incorporated | Device fabrication by plasma etching |
US4208241A (en) * | 1978-07-31 | 1980-06-17 | Bell Telephone Laboratories, Incorporated | Device fabrication by plasma etching |
US4226665A (en) * | 1978-07-31 | 1980-10-07 | Bell Telephone Laboratories, Incorporated | Device fabrication by plasma etching |
US4183780A (en) * | 1978-08-21 | 1980-01-15 | International Business Machines Corporation | Photon enhanced reactive ion etching |
US4283249A (en) * | 1979-05-02 | 1981-08-11 | International Business Machines Corporation | Reactive ion etching |
US4269896A (en) * | 1979-08-31 | 1981-05-26 | Hughes Aircraft Company | Surface passivated alkali halide infrared windows |
US4324611A (en) * | 1980-06-26 | 1982-04-13 | Branson International Plasma Corporation | Process and gas mixture for etching silicon dioxide and silicon nitride |
US4340461A (en) * | 1980-09-10 | 1982-07-20 | International Business Machines Corp. | Modified RIE chamber for uniform silicon etching |
DE3164742D1 (en) * | 1980-09-22 | 1984-08-16 | Tokyo Shibaura Electric Co | Method of smoothing an insulating layer formed on a semiconductor body |
US4333793A (en) * | 1980-10-20 | 1982-06-08 | Bell Telephone Laboratories, Incorporated | High-selectivity plasma-assisted etching of resist-masked layer |
DE3173581D1 (en) * | 1980-10-28 | 1986-03-06 | Toshiba Kk | Masking process for semiconductor devices using a polymer film |
JPS5775429A (en) * | 1980-10-28 | 1982-05-12 | Toshiba Corp | Manufacture of semiconductor device |
US4361461A (en) * | 1981-03-13 | 1982-11-30 | Bell Telephone Laboratories, Incorporated | Hydrogen etching of semiconductors and oxides |
US4353777A (en) * | 1981-04-20 | 1982-10-12 | Lfe Corporation | Selective plasma polysilicon etching |
US4374011A (en) * | 1981-05-08 | 1983-02-15 | Fairchild Camera & Instrument Corp. | Process for fabricating non-encroaching planar insulating regions in integrated circuit structures |
US4414057A (en) * | 1982-12-03 | 1983-11-08 | Inmos Corporation | Anisotropic silicide etching process |
DE3420347A1 (de) * | 1983-06-01 | 1984-12-06 | Hitachi, Ltd., Tokio/Tokyo | Gas und verfahren zum selektiven aetzen von siliciumnitrid |
JPS6022340A (ja) * | 1983-07-18 | 1985-02-04 | Toshiba Corp | 半導体装置の製造方法 |
US4524089A (en) * | 1983-11-22 | 1985-06-18 | Olin Corporation | Three-step plasma treatment of copper foils to enhance their laminate adhesion |
US4598022A (en) * | 1983-11-22 | 1986-07-01 | Olin Corporation | One-step plasma treatment of copper foils to increase their laminate adhesion |
US4588641A (en) * | 1983-11-22 | 1986-05-13 | Olin Corporation | Three-step plasma treatment of copper foils to enhance their laminate adhesion |
US4526806A (en) * | 1983-11-22 | 1985-07-02 | Olin Corporation | One-step plasma treatment of copper foils to increase their laminate adhesion |
US4511430A (en) * | 1984-01-30 | 1985-04-16 | International Business Machines Corporation | Control of etch rate ratio of SiO2 /photoresist for quartz planarization etch back process |
US4515652A (en) * | 1984-03-20 | 1985-05-07 | Harris Corporation | Plasma sculpturing with a non-planar sacrificial layer |
EP0176636B1 (en) * | 1984-09-28 | 1990-05-09 | Japan Synthetic Rubber Co., Ltd. | Polymeric thin film and products containing the same |
US4615764A (en) * | 1984-11-05 | 1986-10-07 | Allied Corporation | SF6/nitriding gas/oxidizer plasma etch system |
JPS60143633A (ja) * | 1984-11-29 | 1985-07-29 | Hitachi Ltd | 半導体装置の製造方法 |
NL8500771A (nl) * | 1985-03-18 | 1986-10-16 | Philips Nv | Werkwijze voor het vervaardigen van een halfgeleiderinrichting waarbij een op een laag siliciumoxide aanwezige dubbellaag - bestaande uit poly-si en een silicide - in een plasma wordt geetst. |
US4671849A (en) * | 1985-05-06 | 1987-06-09 | International Business Machines Corporation | Method for control of etch profile |
US4582581A (en) * | 1985-05-09 | 1986-04-15 | Allied Corporation | Boron trifluoride system for plasma etching of silicon dioxide |
DE3682976D1 (de) * | 1985-08-27 | 1992-01-30 | Ibm | Selektives und anisotropisches trockenes aetzverfahren. |
JPS6252933A (ja) * | 1985-08-27 | 1987-03-07 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 気体プラズマ・エツチング方法 |
US4734157A (en) * | 1985-08-27 | 1988-03-29 | International Business Machines Corporation | Selective and anisotropic dry etching |
US5342693A (en) * | 1988-06-08 | 1994-08-30 | Cardiopulmonics, Inc. | Multifunctional thrombo-resistant coating and methods of manufacture |
US5182317A (en) * | 1988-06-08 | 1993-01-26 | Cardiopulmonics, Inc. | Multifunctional thrombo-resistant coatings and methods of manufacture |
US5338770A (en) * | 1988-06-08 | 1994-08-16 | Cardiopulmonics, Inc. | Gas permeable thrombo-resistant coatings and methods of manufacture |
US5262451A (en) * | 1988-06-08 | 1993-11-16 | Cardiopulmonics, Inc. | Multifunctional thrombo-resistant coatings and methods of manufacture |
JPH0383335A (ja) * | 1989-08-28 | 1991-04-09 | Hitachi Ltd | エッチング方法 |
US5593794A (en) * | 1995-01-23 | 1997-01-14 | Duracell Inc. | Moisture barrier composite film of silicon nitride and fluorocarbon polymer and its use with an on-cell tester for an electrochemical cell |
US6794301B2 (en) | 1995-10-13 | 2004-09-21 | Mattson Technology, Inc. | Pulsed plasma processing of semiconductor substrates |
US5983828A (en) * | 1995-10-13 | 1999-11-16 | Mattson Technology, Inc. | Apparatus and method for pulsed plasma processing of a semiconductor substrate |
US6253704B1 (en) | 1995-10-13 | 2001-07-03 | Mattson Technology, Inc. | Apparatus and method for pulsed plasma processing of a semiconductor substrate |
US5865900A (en) * | 1996-10-04 | 1999-02-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Etch method for removing metal-fluoropolymer residues |
US5985375A (en) * | 1998-09-03 | 1999-11-16 | Micron Technology, Inc. | Method for pulsed-plasma enhanced vapor deposition |
US6228279B1 (en) * | 1998-09-17 | 2001-05-08 | International Business Machines Corporation | High-density plasma, organic anti-reflective coating etch system compatible with sensitive photoresist materials |
US6300042B1 (en) * | 1998-11-24 | 2001-10-09 | Motorola, Inc. | Lithographic printing method using a low surface energy layer |
US6417013B1 (en) | 1999-01-29 | 2002-07-09 | Plasma-Therm, Inc. | Morphed processing of semiconductor devices |
JP3287406B2 (ja) | 1999-06-11 | 2002-06-04 | 日本電気株式会社 | 半導体装置の製造方法 |
SG112804A1 (en) * | 2001-05-10 | 2005-07-28 | Inst Of Microelectronics | Sloped trench etching process |
DE10224137A1 (de) * | 2002-05-24 | 2003-12-04 | Infineon Technologies Ag | Ätzgas und Verfahren zum Trockenätzen |
US20140273525A1 (en) * | 2013-03-13 | 2014-09-18 | Intermolecular, Inc. | Atomic Layer Deposition of Reduced-Leakage Post-Transition Metal Oxide Films |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3615956A (en) * | 1969-03-27 | 1971-10-26 | Signetics Corp | Gas plasma vapor etching process |
US3795557A (en) * | 1972-05-12 | 1974-03-05 | Lfe Corp | Process and material for manufacturing semiconductor devices |
DD105008A1 (xx) * | 1973-04-28 | 1974-04-05 |
-
1973
- 1973-05-17 GB GB2352773A patent/GB1417085A/en not_active Expired
-
1974
- 1974-02-27 ZA ZA00741303A patent/ZA741303B/xx unknown
- 1974-05-03 US US05/466,570 patent/US3940506A/en not_active Expired - Lifetime
- 1974-05-09 NL NLAANVRAGE7406222,A patent/NL183974C/xx not_active IP Right Cessation
- 1974-05-11 DE DE2422922A patent/DE2422922A1/de active Granted
- 1974-05-16 AU AU69017/74A patent/AU6901774A/en not_active Expired
- 1974-05-17 FR FR7417175A patent/FR2230148B1/fr not_active Expired
- 1974-05-17 JP JP49054603A patent/JPS527315B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL7406222A (xx) | 1974-11-19 |
JPS527315B2 (xx) | 1977-03-01 |
FR2230148A1 (xx) | 1974-12-13 |
AU6901774A (en) | 1975-11-20 |
GB1417085A (en) | 1975-12-10 |
FR2230148B1 (xx) | 1978-11-17 |
DE2422922C2 (xx) | 1987-09-10 |
US3940506A (en) | 1976-02-24 |
DE2422922A1 (de) | 1974-12-05 |
NL183974B (nl) | 1988-10-03 |
JPS5036075A (xx) | 1975-04-04 |
ZA741303B (en) | 1975-03-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
BA | A request for search or an international-type search has been filed | ||
BB | A search report has been drawn up | ||
BC | A request for examination has been filed | ||
A85 | Still pending on 85-01-01 | ||
V1 | Lapsed because of non-payment of the annual fee |