GB1413277A - Chamber - Google Patents

Chamber

Info

Publication number
GB1413277A
GB1413277A GB1044274A GB1044274A GB1413277A GB 1413277 A GB1413277 A GB 1413277A GB 1044274 A GB1044274 A GB 1044274A GB 1044274 A GB1044274 A GB 1044274A GB 1413277 A GB1413277 A GB 1413277A
Authority
GB
United Kingdom
Prior art keywords
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1044274A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gesellschaft fuer Kernforschung mbH
Original Assignee
Gesellschaft fuer Kernforschung mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19732313801 external-priority patent/DE2313801C3/en
Application filed by Gesellschaft fuer Kernforschung mbH filed Critical Gesellschaft fuer Kernforschung mbH
Publication of GB1413277A publication Critical patent/GB1413277A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
GB1044274A 1973-03-20 1974-03-08 Chamber Expired GB1413277A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732313801 DE2313801C3 (en) 1973-03-20 Chamber for gas etching, ion etching or vapor deposition

Publications (1)

Publication Number Publication Date
GB1413277A true GB1413277A (en) 1975-11-12

Family

ID=5875326

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1044274A Expired GB1413277A (en) 1973-03-20 1974-03-08 Chamber

Country Status (2)

Country Link
CH (1) CH601787A5 (en)
GB (1) GB1413277A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4334891A1 (en) * 1993-10-13 1995-04-20 Dresden Ev Inst Festkoerper Method and device for the preparation of materials samples for examinations of materials

Also Published As

Publication number Publication date
DE2313801A1 (en) 1974-10-03
CH601787A5 (en) 1978-07-14
DE2313801B2 (en) 1976-05-06

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Legal Events

Date Code Title Description
PS Patent sealed
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee