CH601787A5 - - Google Patents

Info

Publication number
CH601787A5
CH601787A5 CH389674A CH389674A CH601787A5 CH 601787 A5 CH601787 A5 CH 601787A5 CH 389674 A CH389674 A CH 389674A CH 389674 A CH389674 A CH 389674A CH 601787 A5 CH601787 A5 CH 601787A5
Authority
CH
Switzerland
Application number
CH389674A
Inventor
Klaus Spieler
Original Assignee
Kernforschung Gmbh Ges Fuer
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19732313801 external-priority patent/DE2313801C3/en
Application filed by Kernforschung Gmbh Ges Fuer filed Critical Kernforschung Gmbh Ges Fuer
Publication of CH601787A5 publication Critical patent/CH601787A5/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
CH389674A 1973-03-20 1974-03-19 CH601787A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732313801 DE2313801C3 (en) 1973-03-20 Chamber for gas etching, ion etching or vapor deposition

Publications (1)

Publication Number Publication Date
CH601787A5 true CH601787A5 (en) 1978-07-14

Family

ID=5875326

Family Applications (1)

Application Number Title Priority Date Filing Date
CH389674A CH601787A5 (en) 1973-03-20 1974-03-19

Country Status (2)

Country Link
CH (1) CH601787A5 (en)
GB (1) GB1413277A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4334891A1 (en) * 1993-10-13 1995-04-20 Dresden Ev Inst Festkoerper Method and device for the preparation of materials samples for examinations of materials

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4334891A1 (en) * 1993-10-13 1995-04-20 Dresden Ev Inst Festkoerper Method and device for the preparation of materials samples for examinations of materials

Also Published As

Publication number Publication date
DE2313801B2 (en) 1976-05-06
DE2313801A1 (en) 1974-10-03
GB1413277A (en) 1975-11-12

Similar Documents

Publication Publication Date Title
AU465372B2 (en)
AU474511B2 (en)
AU465453B2 (en)
AU471343B2 (en)
AU465434B2 (en)
AU472848B2 (en)
AU466283B2 (en)
AR199451A1 (en)
AR193950A1 (en)
AR197627A1 (en)
AU471461B2 (en)
AR196382A1 (en)
AR195948A1 (en)
AR195311A1 (en)
AR200885A1 (en)
AR200256A1 (en)
AR196212Q (en)
AR196123Q (en)
BG19551A1 (en)
AU479539A (en)
BG20101A3 (en)
BG21396A3 (en)
BG19912A1 (en)
BG19568A1 (en)
AU479419A (en)

Legal Events

Date Code Title Description
PFA Name/firm changed

Owner name: KERNFORSCHUNGSZENTRUM KARLSRUHE GESELLSCHAFT MIT B

PUE Assignment

Owner name: KLAUS SPIELER

PL Patent ceased