GB1406406A - Apparatus for adjusting the distance between two planes - Google Patents

Apparatus for adjusting the distance between two planes

Info

Publication number
GB1406406A
GB1406406A GB245373A GB245373A GB1406406A GB 1406406 A GB1406406 A GB 1406406A GB 245373 A GB245373 A GB 245373A GB 245373 A GB245373 A GB 245373A GB 1406406 A GB1406406 A GB 1406406A
Authority
GB
United Kingdom
Prior art keywords
lever
wafer
slide
plane
bringing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB245373A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektromat VEB
Original Assignee
Elektromat VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektromat VEB filed Critical Elektromat VEB
Priority to GB245373A priority Critical patent/GB1406406A/en
Publication of GB1406406A publication Critical patent/GB1406406A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/0015—Orientation; Alignment; Positioning

Abstract

1406406 Aligning original with copy material ELEKTROMAT VEB 17 Jan 1973 2453/73 Heading G2A [Also in Division F2] Apparatus for adjusting the distance between two planes, one plane being fixed and the other being movable in a direction substantially normal to the fixed plane, comprises an axially movable slide 2 which carries the movable plane e.g. a wafer 3, and a lever system comprising a coarse adjustment lever 12 and fine-adjustment lever 13 controlled by drive means 4, 5. In operation a vacuum is applied to drive means 5 which acts on the coarse-adjustment lever 12 via a stop 11, causing the lever to rotate anti-clockwise about a pivot pin 14, with which the lever is integral, and lower the slide 2. A wafer 3 is then placed on an object holder 1 mounted in spherical bearings on the slide 2. The means 5 is vented and lever 12 pivots clockwise under the influence of spring 6, raising the slide and bringing wafer 3 into contact with the fixed plane, e.g. a stencil (not shown). Holder 1 moves in its bearings bringing the wafer parallel to the fixed plane. Vacuum is now applied to disc brakes 7, 8 to arrest the lever system in its assumed position. Vacuum is applied to drive means 4 to pivot fine adjustment lever 13 anticlockwise about fulcrum 21 to lower slide 2 a distance determined by a stop 13a on lever 13 engaging an adjustable stop 10. Once the desired alignment between the wafer and stencil is complete means 4 is vented and lever 13 again pivots moving slide 2 upwards and bringing the wafer 3 and stencil again into contact.
GB245373A 1973-01-17 1973-01-17 Apparatus for adjusting the distance between two planes Expired GB1406406A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB245373A GB1406406A (en) 1973-01-17 1973-01-17 Apparatus for adjusting the distance between two planes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB245373A GB1406406A (en) 1973-01-17 1973-01-17 Apparatus for adjusting the distance between two planes

Publications (1)

Publication Number Publication Date
GB1406406A true GB1406406A (en) 1975-09-17

Family

ID=9739848

Family Applications (1)

Application Number Title Priority Date Filing Date
GB245373A Expired GB1406406A (en) 1973-01-17 1973-01-17 Apparatus for adjusting the distance between two planes

Country Status (1)

Country Link
GB (1) GB1406406A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1096320A2 (en) * 1999-10-26 2001-05-02 Ushiodenki Kabushiki Kaisha Contact exposure device provided with a mask and workpiece interval setting means
CN109115611A (en) * 2018-10-23 2019-01-01 西南交通大学 A kind of large-tonnage compression creep test device suitable for high-strength concrete

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1096320A2 (en) * 1999-10-26 2001-05-02 Ushiodenki Kabushiki Kaisha Contact exposure device provided with a mask and workpiece interval setting means
EP1096320A3 (en) * 1999-10-26 2002-06-12 Ushiodenki Kabushiki Kaisha Contact exposure device provided with a mask and workpiece interval setting means
US6459474B1 (en) 1999-10-26 2002-10-01 Ushiodenki Kabushiki Kaisha Contact exposure device provided with a mask and workpiece interval setting means
CN109115611A (en) * 2018-10-23 2019-01-01 西南交通大学 A kind of large-tonnage compression creep test device suitable for high-strength concrete

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee