GB1405453A - Alignment and holding device and method - Google Patents

Alignment and holding device and method

Info

Publication number
GB1405453A
GB1405453A GB315272A GB315272A GB1405453A GB 1405453 A GB1405453 A GB 1405453A GB 315272 A GB315272 A GB 315272A GB 315272 A GB315272 A GB 315272A GB 1405453 A GB1405453 A GB 1405453A
Authority
GB
United Kingdom
Prior art keywords
wafer
suction
machine
conduit
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB315272A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lucas Electrical Co Ltd
Original Assignee
Lucas Electrical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lucas Electrical Co Ltd filed Critical Lucas Electrical Co Ltd
Priority to GB315272A priority Critical patent/GB1405453A/en
Priority to JP875473A priority patent/JPS5012966A/ja
Priority to NL7300915A priority patent/NL7300915A/xx
Priority to DE2302897A priority patent/DE2302897A1/de
Publication of GB1405453A publication Critical patent/GB1405453A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/78—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using vacuum or suction, e.g. Bernoulli chucks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Dicing (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
GB315272A 1972-01-22 1972-01-22 Alignment and holding device and method Expired GB1405453A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB315272A GB1405453A (en) 1972-01-22 1972-01-22 Alignment and holding device and method
JP875473A JPS5012966A (https=) 1972-01-22 1973-01-22
NL7300915A NL7300915A (https=) 1972-01-22 1973-01-22
DE2302897A DE2302897A1 (de) 1972-01-22 1973-01-22 Vorrichtung und verfahren zum orientieren eines halbleiterplaettchens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB315272A GB1405453A (en) 1972-01-22 1972-01-22 Alignment and holding device and method

Publications (1)

Publication Number Publication Date
GB1405453A true GB1405453A (en) 1975-09-10

Family

ID=9752924

Family Applications (1)

Application Number Title Priority Date Filing Date
GB315272A Expired GB1405453A (en) 1972-01-22 1972-01-22 Alignment and holding device and method

Country Status (4)

Country Link
JP (1) JPS5012966A (https=)
DE (1) DE2302897A1 (https=)
GB (1) GB1405453A (https=)
NL (1) NL7300915A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102744697A (zh) * 2012-07-17 2012-10-24 天脊煤化工集团股份有限公司 一种鲁奇炉灰锁上阀导向筒找正装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6110761Y2 (https=) * 1980-10-31 1986-04-05
JPS61263136A (ja) * 1985-05-15 1986-11-21 Nitto Electric Ind Co Ltd 薄板物品の支持テ−ブル
JPH07110455B2 (ja) * 1992-10-27 1995-11-29 住友電気工業株式会社 ウェハ固定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102744697A (zh) * 2012-07-17 2012-10-24 天脊煤化工集团股份有限公司 一种鲁奇炉灰锁上阀导向筒找正装置

Also Published As

Publication number Publication date
JPS5012966A (https=) 1975-02-10
DE2302897A1 (de) 1973-07-19
NL7300915A (https=) 1973-07-24

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee