GB1398088A - Polymers and photoresist compositions containing them - Google Patents

Polymers and photoresist compositions containing them

Info

Publication number
GB1398088A
GB1398088A GB3936171A GB3936171A GB1398088A GB 1398088 A GB1398088 A GB 1398088A GB 3936171 A GB3936171 A GB 3936171A GB 3936171 A GB3936171 A GB 3936171A GB 1398088 A GB1398088 A GB 1398088A
Authority
GB
United Kingdom
Prior art keywords
sensitizers
polyester
photo
diazoketo
glycols
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3936171A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kodak Ltd
Original Assignee
Kodak Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kodak Ltd filed Critical Kodak Ltd
Priority to GB3936171A priority Critical patent/GB1398088A/en
Publication of GB1398088A publication Critical patent/GB1398088A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G63/00—Macromolecular compounds obtained by reactions forming a carboxylic ester link in the main chain of the macromolecule
    • C08G63/02—Polyesters derived from hydroxycarboxylic acids or from polycarboxylic acids and polyhydroxy compounds
    • C08G63/12—Polyesters derived from hydroxycarboxylic acids or from polycarboxylic acids and polyhydroxy compounds derived from polycarboxylic acids and polyhydroxy compounds
    • C08G63/52—Polycarboxylic acids or polyhydroxy compounds in which at least one of the two components contains aliphatic unsaturation
    • C08G63/54—Polycarboxylic acids or polyhydroxy compounds in which at least one of the two components contains aliphatic unsaturation the acids or hydroxy compounds containing carbocyclic rings
    • C08G63/553—Acids or hydroxy compounds containing cycloaliphatic rings, e.g. Diels-Alder adducts
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0384—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the main chain of the photopolymer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)

Abstract

1398088 Photo-resist materials KODAK Ltd 17 Aug 1972 [23 Aug 1971] 39361/71 Heading G2C [Also in Division C3] Positive and negative working photo-resist compositions are made by combining a polyester derived from at least two glycols and one or more unsaturated alicyclic-dicarboxylic acids, the glycol mixture containing from 6.25 to 25 mole per cent, based on the glycol content of one or more glycols having free carboxylic acid groups, the polyester having an acid number of from 40-90; with a diazoketo sensitizer and an aryl azide sensitizer respectively in aqueous alkaline solution. Diazoketo sensitizers are described in Specifications 1230771; 1230773 and 1331441; 1, 2-dihydro- 2-diazo-1-oxo-5(-4' azidophenoxy-sulphonyl) -naphthalene being exemplified. Aryl azide sensitizers include 2: 6-di (4-azidobenzylidene)-4- methyl cyclohexanone and 4:4'-diazidostilbene -2: 2'-disulphonic acid. Particularly useful sensitizers are described in Specifications 767985; 886100; 892811 and U.S.A. Specification 2940853. The polyester may be dissolved in cyclohexanone or 2-methoxyethylacetate and adding the appropriate sensitizers. Examples 9 to 23 describe the preparation and testing of typical photo-resist materials.
GB3936171A 1971-08-23 1971-08-23 Polymers and photoresist compositions containing them Expired GB1398088A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB3936171A GB1398088A (en) 1971-08-23 1971-08-23 Polymers and photoresist compositions containing them

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3936171A GB1398088A (en) 1971-08-23 1971-08-23 Polymers and photoresist compositions containing them

Publications (1)

Publication Number Publication Date
GB1398088A true GB1398088A (en) 1975-06-18

Family

ID=10409140

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3936171A Expired GB1398088A (en) 1971-08-23 1971-08-23 Polymers and photoresist compositions containing them

Country Status (1)

Country Link
GB (1) GB1398088A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0140319A2 (en) * 1983-10-24 1985-05-08 The B.F. GOODRICH Company Polynorbornene Negative Photoresist

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0140319A2 (en) * 1983-10-24 1985-05-08 The B.F. GOODRICH Company Polynorbornene Negative Photoresist
EP0140319A3 (en) * 1983-10-24 1987-06-16 The B.F. Goodrich Company Polynorbornene negative photoresist

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees