GB1378084A - Electron gun systems of the field emission type - Google Patents

Electron gun systems of the field emission type

Info

Publication number
GB1378084A
GB1378084A GB2269172A GB2269172A GB1378084A GB 1378084 A GB1378084 A GB 1378084A GB 2269172 A GB2269172 A GB 2269172A GB 2269172 A GB2269172 A GB 2269172A GB 1378084 A GB1378084 A GB 1378084A
Authority
GB
United Kingdom
Prior art keywords
electron gun
voltage
control
field emission
emission type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2269172A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP3257771A external-priority patent/JPS539058B1/ja
Priority claimed from JP46081684A external-priority patent/JPS4847263A/ja
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of GB1378084A publication Critical patent/GB1378084A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243—Beam current control or regulation circuits

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

1378084 Automatic current control HITACHI Ltd 15 May 1972 [15 May 1971 18 Oct 1971] 22691/72 Heading G3R [Also in Division H1] In a scanning electron microscope with an electron gun system including a field emmission cathode 1 and a control electrode 7 (see Division H1) the beam current e scanning an object 12 is maintained constant by an automatic control system. Current from the object develops a potential across a resistance 14 which is compared with a reference source 15 by a differential amplifier 16 whose output representing the voltage difference is applied to a control circuit 17. This produces a signal applied to the source 10 of the control electrode voltage to vary this voltage to reduce the difference to zero.
GB2269172A 1971-05-15 1972-05-15 Electron gun systems of the field emission type Expired GB1378084A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP3257771A JPS539058B1 (en) 1971-05-15 1971-05-15
JP46081684A JPS4847263A (en) 1971-10-18 1971-10-18

Publications (1)

Publication Number Publication Date
GB1378084A true GB1378084A (en) 1974-12-18

Family

ID=26371162

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2269172A Expired GB1378084A (en) 1971-05-15 1972-05-15 Electron gun systems of the field emission type

Country Status (3)

Country Link
DE (1) DE2223615B2 (en)
FR (1) FR2137883B1 (en)
GB (1) GB1378084A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2140196A (en) * 1983-05-05 1984-11-21 Cambridge Instr Ltd Particle beam lenses

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2140196A (en) * 1983-05-05 1984-11-21 Cambridge Instr Ltd Particle beam lenses

Also Published As

Publication number Publication date
FR2137883B1 (en) 1981-11-20
DE2223615A1 (en) 1972-12-21
FR2137883A1 (en) 1972-12-29
DE2223615B2 (en) 1973-09-13

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Legal Events

Date Code Title Description
PS Patent sealed
PE20 Patent expired after termination of 20 years