GB1359707A - Transistor for operation at very high frequencies and a method for the manufacture thereof - Google Patents

Transistor for operation at very high frequencies and a method for the manufacture thereof

Info

Publication number
GB1359707A
GB1359707A GB3200071A GB3200071A GB1359707A GB 1359707 A GB1359707 A GB 1359707A GB 3200071 A GB3200071 A GB 3200071A GB 3200071 A GB3200071 A GB 3200071A GB 1359707 A GB1359707 A GB 1359707A
Authority
GB
United Kingdom
Prior art keywords
region
transistor
ion
wafer
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3200071A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thales SA
Original Assignee
Thomson CSF SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson CSF SA filed Critical Thomson CSF SA
Publication of GB1359707A publication Critical patent/GB1359707A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching

Landscapes

  • Bipolar Transistors (AREA)
GB3200071A 1970-07-09 1971-07-07 Transistor for operation at very high frequencies and a method for the manufacture thereof Expired GB1359707A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR707025558A FR2096876B1 (enExample) 1970-07-09 1970-07-09

Publications (1)

Publication Number Publication Date
GB1359707A true GB1359707A (en) 1974-07-10

Family

ID=9058531

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3200071A Expired GB1359707A (en) 1970-07-09 1971-07-07 Transistor for operation at very high frequencies and a method for the manufacture thereof

Country Status (2)

Country Link
FR (1) FR2096876B1 (enExample)
GB (1) GB1359707A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0012838A1 (de) * 1978-12-22 1980-07-09 International Business Machines Corporation Ionenquelle, insbesondere für Ionenimplantationsanlagen
EP0021140A1 (de) * 1979-06-29 1981-01-07 International Business Machines Corporation Ionenquelle in einer Vakuumkammer und Verfahren zum Betrieb derselben

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2027986B (en) * 1978-07-31 1983-01-19 Philips Electronic Associated Infra-red detectors

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1228754A (enExample) * 1967-05-26 1971-04-21

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0012838A1 (de) * 1978-12-22 1980-07-09 International Business Machines Corporation Ionenquelle, insbesondere für Ionenimplantationsanlagen
EP0021140A1 (de) * 1979-06-29 1981-01-07 International Business Machines Corporation Ionenquelle in einer Vakuumkammer und Verfahren zum Betrieb derselben

Also Published As

Publication number Publication date
FR2096876A1 (enExample) 1972-03-03
FR2096876B1 (enExample) 1973-08-10

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees