GB1347324A - Method of growing silicon dioxide on silicon material - Google Patents
Method of growing silicon dioxide on silicon materialInfo
- Publication number
- GB1347324A GB1347324A GB5196471A GB5196471A GB1347324A GB 1347324 A GB1347324 A GB 1347324A GB 5196471 A GB5196471 A GB 5196471A GB 5196471 A GB5196471 A GB 5196471A GB 1347324 A GB1347324 A GB 1347324A
- Authority
- GB
- United Kingdom
- Prior art keywords
- silicon
- silicon dioxide
- silicon material
- growing
- nov
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title abstract 6
- 239000000377 silicon dioxide Substances 0.000 title abstract 3
- 235000012239 silicon dioxide Nutrition 0.000 title abstract 3
- 239000002210 silicon-based material Substances 0.000 title abstract 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 239000000460 chlorine Substances 0.000 abstract 1
- 229910052801 chlorine Inorganic materials 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 238000010301 surface-oxidation reaction Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
- H01L21/02233—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer
- H01L21/02236—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor
- H01L21/02238—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer group IV semiconductor silicon in uncombined form, i.e. pure silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/02255—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Formation Of Insulating Films (AREA)
Abstract
1347324 Surface oxidation of silicon semiconductor materials NORTHERN ELECTRIC CO Ltd 9 Nov 1971 [10 Nov 1970] 51964/71 Heading C1A [Also in Division H1] A silicon dioxide layer is thermally grown on the surface of a silicon material by subjecting the silicon material to a temperature of 600‹ to 1200‹C. in an atmosphere composed of substantially dry oxygen and chlorine, to neutralize the electrical effects of mobile ions in the silicon dioxide layer.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA097885A CA936791A (en) | 1970-11-10 | 1970-11-10 | Method of reducing the mobile ion contamination in thermally grown silicon dioxide |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1347324A true GB1347324A (en) | 1974-02-27 |
Family
ID=4087983
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB5196471A Expired GB1347324A (en) | 1970-11-10 | 1971-11-09 | Method of growing silicon dioxide on silicon material |
Country Status (2)
Country | Link |
---|---|
CA (1) | CA936791A (en) |
GB (1) | GB1347324A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2488443A1 (en) * | 1980-08-11 | 1982-02-12 | Western Electric Co | METHOD AND DEVICE FOR OXIDIZING SILICON WAFERS |
-
1970
- 1970-11-10 CA CA097885A patent/CA936791A/en not_active Expired
-
1971
- 1971-11-09 GB GB5196471A patent/GB1347324A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2488443A1 (en) * | 1980-08-11 | 1982-02-12 | Western Electric Co | METHOD AND DEVICE FOR OXIDIZING SILICON WAFERS |
Also Published As
Publication number | Publication date |
---|---|
CA936791A (en) | 1973-11-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PLNP | Patent lapsed through nonpayment of renewal fees |