GB1334128A - Method and apparatus for positioner calibration system - Google Patents

Method and apparatus for positioner calibration system

Info

Publication number
GB1334128A
GB1334128A GB3857571A GB3857571A GB1334128A GB 1334128 A GB1334128 A GB 1334128A GB 3857571 A GB3857571 A GB 3857571A GB 3857571 A GB3857571 A GB 3857571A GB 1334128 A GB1334128 A GB 1334128A
Authority
GB
United Kingdom
Prior art keywords
wafer
output
sequencer
photo
calibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3857571A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Computervision Corp
Original Assignee
Computervision Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Computervision Corp filed Critical Computervision Corp
Publication of GB1334128A publication Critical patent/GB1334128A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • G05D3/14—Control of position or direction using feedback using an analogue comparing device
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • G05D3/20—Control of position or direction using feedback using a digital comparing device
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H10P72/53—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment using optical controlling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Transform (AREA)
  • Processing Or Creating Images (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
  • Machine Tool Positioning Apparatuses (AREA)
GB3857571A 1970-08-24 1971-08-17 Method and apparatus for positioner calibration system Expired GB1334128A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6621170A 1970-08-24 1970-08-24

Publications (1)

Publication Number Publication Date
GB1334128A true GB1334128A (en) 1973-10-17

Family

ID=22067996

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3857571A Expired GB1334128A (en) 1970-08-24 1971-08-17 Method and apparatus for positioner calibration system

Country Status (5)

Country Link
US (1) US3671748A (https=)
JP (1) JPS5128465B1 (https=)
FR (1) FR2107046A5 (https=)
GB (1) GB1334128A (https=)
NL (1) NL7110157A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2131162A (en) * 1982-11-27 1984-06-13 Ferranti Plc Aligning objects
GB2143637A (en) * 1983-07-04 1985-02-13 Canon Kk An alignment apparatus

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3723745A (en) * 1971-12-28 1973-03-27 Nasa Radiant source tracker independent of non-constant irradiance
US3814845A (en) * 1973-03-01 1974-06-04 Bell Telephone Labor Inc Object positioning
US4021711A (en) * 1975-06-27 1977-05-03 International Business Machines Corporation Article positioner with zero position sensing means
JPS52121144A (en) * 1976-04-03 1977-10-12 Nippon Gakki Seizo Kk High potential switch
US4199816A (en) * 1978-06-28 1980-04-22 Humphrey Instruments, Inc. Optical calibration apparatus and procedure
DD158824A1 (de) * 1980-11-03 1983-02-02 Adelbrecht Schorcht Anordnung zur automatischen justierung mindestens eines gegenstandes
FR2540666B1 (fr) * 1983-02-04 1986-10-10 Telemecanique Electrique Interrupteur limiteur
DE3927890A1 (de) * 1989-08-24 1991-02-28 Thomson Brandt Gmbh Verfahren zum justieren einer positioniervorrichtung
JPH0724278B2 (ja) * 1991-01-10 1995-03-15 信越半導体株式会社 パターンシフト測定方法
JP4171953B2 (ja) 2000-01-18 2008-10-29 ソニー株式会社 ディスク搬送装置及びディスク搬送方法
US6677602B1 (en) * 2000-08-18 2004-01-13 Sensys Instruments Corporation Notch and flat sensor for wafer alignment
JP3982270B2 (ja) * 2002-01-29 2007-09-26 信越半導体株式会社 半導体ウエーハの製造方法および半導体ウエーハ製造の受注方法ならびに半導体ウエーハ製造の受注システム
CN100380623C (zh) * 2003-03-26 2008-04-09 阿森姆布里昂股份有限公司 用于校准装置的方法
US7492449B2 (en) * 2004-04-12 2009-02-17 Georgia Tech Research Corporation Inspection systems and methods
US8860456B2 (en) 2011-08-02 2014-10-14 Medtronic, Inc. Non-destructive tilt data measurement to detect defective bumps
CN109029315B (zh) * 2018-06-04 2024-04-09 深圳先进技术研究院 感应器的刻度系统及其刻度方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2969707A (en) * 1955-05-07 1961-01-31 Zeiss Carl Method and means for automatically adjusting a measuring or observation instrument

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2131162A (en) * 1982-11-27 1984-06-13 Ferranti Plc Aligning objects
US4538177A (en) * 1982-11-27 1985-08-27 plc Ferranti Automatic equipment
GB2143637A (en) * 1983-07-04 1985-02-13 Canon Kk An alignment apparatus

Also Published As

Publication number Publication date
DE2136439A1 (de) 1972-03-02
FR2107046A5 (https=) 1972-05-05
DE2136439B2 (de) 1976-03-11
JPS5128465B1 (https=) 1976-08-19
US3671748A (en) 1972-06-20
NL7110157A (https=) 1972-02-28

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee