GB1300727A - Shallow junction semiconductor device and method for making same - Google Patents

Shallow junction semiconductor device and method for making same

Info

Publication number
GB1300727A
GB1300727A GB03904/70A GB1390470A GB1300727A GB 1300727 A GB1300727 A GB 1300727A GB 03904/70 A GB03904/70 A GB 03904/70A GB 1390470 A GB1390470 A GB 1390470A GB 1300727 A GB1300727 A GB 1300727A
Authority
GB
United Kingdom
Prior art keywords
layer
etched
oxide
deposited
diffused
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB03904/70A
Other languages
English (en)
Inventor
Charles Frank Myers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of GB1300727A publication Critical patent/GB1300727A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
    • H10W74/43—Encapsulations, e.g. protective coatings characterised by their materials comprising oxides, nitrides or carbides, e.g. ceramics or glasses
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes

Landscapes

  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Weting (AREA)
GB03904/70A 1969-04-03 1970-03-23 Shallow junction semiconductor device and method for making same Expired GB1300727A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US81310569A 1969-04-03 1969-04-03

Publications (1)

Publication Number Publication Date
GB1300727A true GB1300727A (en) 1972-12-20

Family

ID=25211462

Family Applications (1)

Application Number Title Priority Date Filing Date
GB03904/70A Expired GB1300727A (en) 1969-04-03 1970-03-23 Shallow junction semiconductor device and method for making same

Country Status (6)

Country Link
JP (1) JPS505915B1 (https=)
BE (1) BE748240A (https=)
DE (1) DE2014155A1 (https=)
FR (1) FR2038223B1 (https=)
GB (1) GB1300727A (https=)
NL (1) NL7004130A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4021270A (en) * 1976-06-28 1977-05-03 Motorola, Inc. Double master mask process for integrated circuit manufacture

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3200019A (en) * 1962-01-19 1965-08-10 Rca Corp Method for making a semiconductor device
FR1520515A (fr) * 1967-02-07 1968-04-12 Radiotechnique Coprim Rtc Circuits intégrés comportant des transistors de types opposés et leurs procédésde fabrication

Also Published As

Publication number Publication date
BE748240A (fr) 1970-09-30
JPS505915B1 (https=) 1975-03-08
FR2038223B1 (https=) 1977-03-18
DE2014155A1 (de) 1971-04-15
NL7004130A (https=) 1970-10-06
FR2038223A1 (https=) 1971-01-08

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees