GB1297404A - - Google Patents
Info
- Publication number
- GB1297404A GB1297404A GB1297404DA GB1297404A GB 1297404 A GB1297404 A GB 1297404A GB 1297404D A GB1297404D A GB 1297404DA GB 1297404 A GB1297404 A GB 1297404A
- Authority
- GB
- United Kingdom
- Prior art keywords
- layer
- type
- zones
- groove
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P90/00—Preparation of wafers not covered by a single main group of this subclass, e.g. wafer reinforcement
- H10P90/19—Preparing inhomogeneous wafers
- H10P90/1904—Preparing vertically inhomogeneous wafers
- H10P90/1906—Preparing SOI wafers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/01—Manufacture or treatment
- H10W10/061—Manufacture or treatment using SOI processes together with lateral isolation, e.g. combinations of SOI and shallow trench isolations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/10—Isolation regions comprising dielectric materials
- H10W10/181—Semiconductor-on-insulator [SOI] isolation regions, e.g. buried oxide regions of SOI wafers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/01—Manufacture or treatment
- H10W10/021—Manufacture or treatment of air gaps
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/20—Air gaps
Landscapes
- Element Separation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19691923325 DE1923325A1 (de) | 1969-05-07 | 1969-05-07 | Verfahren zum Herstellen einer Verbundhalbleiteranordnung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1297404A true GB1297404A (https=) | 1972-11-22 |
Family
ID=5733514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1297404D Expired GB1297404A (https=) | 1969-05-07 | 1970-05-06 |
Country Status (7)
| Country | Link |
|---|---|
| AT (1) | AT323805B (https=) |
| CH (1) | CH506189A (https=) |
| DE (1) | DE1923325A1 (https=) |
| FR (1) | FR2042448B1 (https=) |
| GB (1) | GB1297404A (https=) |
| NL (1) | NL7006123A (https=) |
| SE (1) | SE356399B (https=) |
-
1969
- 1969-05-07 DE DE19691923325 patent/DE1923325A1/de active Pending
-
1970
- 1970-04-27 NL NL7006123A patent/NL7006123A/xx unknown
- 1970-05-04 CH CH664370A patent/CH506189A/de not_active IP Right Cessation
- 1970-05-05 FR FR7016335A patent/FR2042448B1/fr not_active Expired
- 1970-05-05 AT AT406070A patent/AT323805B/de not_active IP Right Cessation
- 1970-05-06 GB GB1297404D patent/GB1297404A/en not_active Expired
- 1970-05-08 SE SE06377/70A patent/SE356399B/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| SE356399B (https=) | 1973-05-21 |
| NL7006123A (https=) | 1970-11-10 |
| FR2042448B1 (https=) | 1975-01-10 |
| DE1923325A1 (de) | 1970-11-19 |
| FR2042448A1 (https=) | 1971-02-12 |
| CH506189A (de) | 1971-04-15 |
| AT323805B (de) | 1975-07-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PLNP | Patent lapsed through nonpayment of renewal fees |