GB1297128A - - Google Patents

Info

Publication number
GB1297128A
GB1297128A GB1297128DA GB1297128A GB 1297128 A GB1297128 A GB 1297128A GB 1297128D A GB1297128D A GB 1297128DA GB 1297128 A GB1297128 A GB 1297128A
Authority
GB
United Kingdom
Prior art keywords
box
gas
coil
binding metal
annular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1297128A publication Critical patent/GB1297128A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/18Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Vapour Deposition (AREA)
GB1297128D 1968-12-17 1969-12-12 Expired GB1297128A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6818076A NL6818076A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1968-12-17 1968-12-17

Publications (1)

Publication Number Publication Date
GB1297128A true GB1297128A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-11-22

Family

ID=19805419

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1297128D Expired GB1297128A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1968-12-17 1969-12-12

Country Status (4)

Country Link
DE (1) DE1959963A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2026366A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1297128A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NL (1) NL6818076A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
DE1959963B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-03-15
NL6818076A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1970-06-19
FR2026366A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1970-09-18
DE1959963A1 (de) 1970-07-09

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee