GB1294697A - Apparatus for the selective sputtering of solid substances by means of ion bombardment according to the plasma or to the ion-beam process - Google Patents

Apparatus for the selective sputtering of solid substances by means of ion bombardment according to the plasma or to the ion-beam process

Info

Publication number
GB1294697A
GB1294697A GB5503769A GB5503769A GB1294697A GB 1294697 A GB1294697 A GB 1294697A GB 5503769 A GB5503769 A GB 5503769A GB 5503769 A GB5503769 A GB 5503769A GB 1294697 A GB1294697 A GB 1294697A
Authority
GB
United Kingdom
Prior art keywords
electrode
ion
cathode
counter
extractor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5503769A
Other languages
English (en)
Inventor
Otto Fieldler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektromat VEB
Original Assignee
Elektromat VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to DE19691934326 priority Critical patent/DE1934326A1/de
Priority to DE19691934320 priority patent/DE1934320A1/de
Priority to DE19691934328 priority patent/DE1934328A1/de
Priority to FR6930371A priority patent/FR2017628A1/fr
Priority to FR6930469A priority patent/FR2063256A5/fr
Priority to CH1385569A priority patent/CH499364A/de
Priority to FR6931339A priority patent/FR2064480A5/fr
Priority to CH1512669A priority patent/CH522951A/de
Priority to CH1512569A priority patent/CH516226A/de
Application filed by Elektromat VEB filed Critical Elektromat VEB
Priority to GB5503769A priority patent/GB1294697A/en
Publication of GB1294697A publication Critical patent/GB1294697A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/46—Sputtering by ion beam produced by an external ion source
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B31/00—Chucks; Expansion mandrels; Adaptations thereof for remote control
    • B23B31/02—Chucks
    • B23B31/10—Chucks characterised by the retaining or gripping devices or their immediate operating means
    • B23B31/12—Chucks with simultaneously-acting jaws, whether or not also individually adjustable
    • B23B31/16—Chucks with simultaneously-acting jaws, whether or not also individually adjustable moving radially
    • B23B31/16158—Jaws movement actuated by coaxial conical surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B31/00—Chucks; Expansion mandrels; Adaptations thereof for remote control
    • B23B31/02—Chucks
    • B23B31/10—Chucks characterised by the retaining or gripping devices or their immediate operating means
    • B23B31/12—Chucks with simultaneously-acting jaws, whether or not also individually adjustable
    • B23B31/16—Chucks with simultaneously-acting jaws, whether or not also individually adjustable moving radially
    • B23B31/16233—Jaws movement actuated by oblique surfaces of a coaxial control rod
    • B23B31/16254—Jaws movement actuated by oblique surfaces of a coaxial control rod using fluid-pressure means to actuate the gripping means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B31/00—Chucks; Expansion mandrels; Adaptations thereof for remote control
    • B23B31/02—Chucks
    • B23B31/10—Chucks characterised by the retaining or gripping devices or their immediate operating means
    • B23B31/12—Chucks with simultaneously-acting jaws, whether or not also individually adjustable
    • B23B31/20—Longitudinally-split sleeves, e.g. collet chucks
    • B23B31/201—Characterized by features relating primarily to remote control of the gripping means
    • B23B31/204—Characterized by features relating primarily to remote control of the gripping means using fluid-pressure means to actuate the gripping means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B31/00—Chucks; Expansion mandrels; Adaptations thereof for remote control
    • B23B31/02—Chucks
    • B23B31/24—Chucks characterised by features relating primarily to remote control of the gripping means
    • B23B31/28—Chucks characterised by features relating primarily to remote control of the gripping means using electric or magnetic means in the chuck
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B2270/00—Details of turning, boring or drilling machines, processes or tools not otherwise provided for
    • B23B2270/38—Using magnetic fields

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Gripping On Spindles (AREA)
GB5503769A 1968-09-09 1969-11-11 Apparatus for the selective sputtering of solid substances by means of ion bombardment according to the plasma or to the ion-beam process Expired GB1294697A (en)

Priority Applications (10)

Application Number Priority Date Filing Date Title
DE19691934326 DE1934326A1 (de) 1968-10-17 1969-07-07 Mehrstrahl-Ionenzerstaeubungssystem zur Herstellung duenner einheitlicher oder legierter Schichten
DE19691934320 DE1934320A1 (de) 1968-10-17 1969-07-07 Kraftspannfutter zum Einspannen von Werkstuecken an Arbeitsmaschinen
DE19691934328 DE1934328A1 (de) 1968-10-17 1969-07-07 Vorrichtung zur wahlweisen Zerstaeubung fester Substanzen durch Ionenbeschuss nach der Plasma- oder Ionenstrahlmethode
FR6930371A FR2017628A1 (fr) 1968-09-09 1969-09-05
FR6930469A FR2063256A5 (fr) 1968-10-17 1969-09-08
CH1385569A CH499364A (de) 1968-09-09 1969-09-09 Kraftspannfutter zum Einspannen von Werkstücken an Arbeitsmaschinen
FR6931339A FR2064480A5 (fr) 1968-10-17 1969-09-15
CH1512669A CH522951A (de) 1968-10-17 1969-10-08 Mehrstrahl-Ionenzerstäubungsvorrichtung zur Herstellung dünner einheitlicher oder legierter Schichten
CH1512569A CH516226A (de) 1968-10-17 1969-10-08 Vorrichtung zur wahlweisen Zerstäubung fester Substanzen durch Ionenbeschuss nach der Plasma- oder Ionenstrahlmethode
GB5503769A GB1294697A (en) 1968-10-17 1969-11-11 Apparatus for the selective sputtering of solid substances by means of ion bombardment according to the plasma or to the ion-beam process

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
DD13543168 1968-10-17
DD13774469 1969-02-10
DE19691934320 DE1934320A1 (de) 1968-10-17 1969-07-07 Kraftspannfutter zum Einspannen von Werkstuecken an Arbeitsmaschinen
FR6930469A FR2063256A5 (fr) 1968-10-17 1969-09-08
FR6931339A FR2064480A5 (fr) 1968-10-17 1969-09-15
GB5503769A GB1294697A (en) 1968-10-17 1969-11-11 Apparatus for the selective sputtering of solid substances by means of ion bombardment according to the plasma or to the ion-beam process

Publications (1)

Publication Number Publication Date
GB1294697A true GB1294697A (en) 1972-11-01

Family

ID=27543993

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5503769A Expired GB1294697A (en) 1968-09-09 1969-11-11 Apparatus for the selective sputtering of solid substances by means of ion bombardment according to the plasma or to the ion-beam process

Country Status (4)

Country Link
CH (2) CH516226A (fr)
DE (3) DE1934326A1 (fr)
FR (2) FR2063256A5 (fr)
GB (1) GB1294697A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3998718A (en) * 1976-02-18 1976-12-21 Bell Telephone Laboratories, Incorporated Ion milling apparatus
CN115188648A (zh) * 2022-09-08 2022-10-14 合肥中科离子医学技术装备有限公司 内潘宁源结构、回旋加速器

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2410360A1 (fr) * 1977-11-28 1979-06-22 Anvar Source d'ions notamment pour implanteur ionique
DE2853251C2 (de) * 1978-12-09 1983-07-28 Willy 5222 Morsbach Klein Zerlegbare und transportable Materialhütte
US4250009A (en) * 1979-05-18 1981-02-10 International Business Machines Corporation Energetic particle beam deposition system
AU566986B2 (en) * 1984-09-04 1987-11-05 Standard Oil Company, The Deposition of passivated amorphous semi-conductor films by sputtering
US4785220A (en) * 1985-01-30 1988-11-15 Brown Ian G Multi-cathode metal vapor arc ion source
DE102010007542A1 (de) 2010-02-08 2011-08-11 KHS Corpoplast GmbH, 22145 Verfahren und Vorrichtung zur Blasformung von Behältern

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3998718A (en) * 1976-02-18 1976-12-21 Bell Telephone Laboratories, Incorporated Ion milling apparatus
CN115188648A (zh) * 2022-09-08 2022-10-14 合肥中科离子医学技术装备有限公司 内潘宁源结构、回旋加速器

Also Published As

Publication number Publication date
FR2063256A5 (fr) 1971-07-09
DE1934326A1 (de) 1970-08-06
DE1934320A1 (de) 1971-05-13
CH522951A (de) 1972-05-15
FR2064480A5 (fr) 1971-07-23
DE1934328A1 (de) 1970-04-30
CH516226A (de) 1971-11-30

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees