GB1290863A - - Google Patents

Info

Publication number
GB1290863A
GB1290863A GB1290863DA GB1290863A GB 1290863 A GB1290863 A GB 1290863A GB 1290863D A GB1290863D A GB 1290863DA GB 1290863 A GB1290863 A GB 1290863A
Authority
GB
United Kingdom
Prior art keywords
lens
mask
ion
grid
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1290863A publication Critical patent/GB1290863A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
GB1290863D 1969-08-05 1969-08-05 Expired GB1290863A (US06262066-20010717-C00315.png)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3926069 1969-08-05

Publications (1)

Publication Number Publication Date
GB1290863A true GB1290863A (US06262066-20010717-C00315.png) 1972-09-27

Family

ID=10408572

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1290863D Expired GB1290863A (US06262066-20010717-C00315.png) 1969-08-05 1969-08-05

Country Status (4)

Country Link
DE (2) DE2037864A1 (US06262066-20010717-C00315.png)
FR (1) FR2056551A5 (US06262066-20010717-C00315.png)
GB (1) GB1290863A (US06262066-20010717-C00315.png)
SE (1) SE354435B (US06262066-20010717-C00315.png)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50151162A (US06262066-20010717-C00315.png) * 1974-05-27 1975-12-04
GB2188924A (en) * 1986-04-08 1987-10-14 Glaverbel Matted glass, process of producing matted glass, photo-voltaic cell incorporating a glass sheet, and process of manufacturing such a cell
GB2188925A (en) * 1986-04-08 1987-10-14 Glaverbel Matted glass and process of manufacturing same
US7863587B2 (en) 2007-01-31 2011-01-04 Hitachi Global Storage Technologies, Netherlands, B.V. Symmetrical shaper for an ion beam deposition and etching apparatus

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5531154A (en) * 1978-08-28 1980-03-05 Hitachi Ltd Plasma etching apparatus
CH658545A5 (de) * 1982-09-10 1986-11-14 Balzers Hochvakuum Verfahren zum gleichmaessigen erwaermen von heizgut in einem vakuumrezipienten.
DE3427587A1 (de) * 1984-07-26 1986-02-06 Leybold-Heraeus GmbH, 5000 Köln Zerstaeubungseinrichtung fuer katodenzerstaeubungsanlagen

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50151162A (US06262066-20010717-C00315.png) * 1974-05-27 1975-12-04
GB2188924A (en) * 1986-04-08 1987-10-14 Glaverbel Matted glass, process of producing matted glass, photo-voltaic cell incorporating a glass sheet, and process of manufacturing such a cell
GB2188925A (en) * 1986-04-08 1987-10-14 Glaverbel Matted glass and process of manufacturing same
US4880677A (en) * 1986-04-08 1989-11-14 Glaverbel Matted glass
US4882214A (en) * 1986-04-08 1989-11-21 Glaverbel Matted glass
GB2188924B (en) * 1986-04-08 1990-05-09 Glaverbel Matted glass, process of producing matted glass, photo-voltaic cell incorporating a glass sheet, and process of manufacturing such a cell
GB2188925B (en) * 1986-04-08 1990-05-09 Glaverbel Matted glass and process of manufacturing same
US7863587B2 (en) 2007-01-31 2011-01-04 Hitachi Global Storage Technologies, Netherlands, B.V. Symmetrical shaper for an ion beam deposition and etching apparatus

Also Published As

Publication number Publication date
FR2056551A5 (US06262066-20010717-C00315.png) 1971-05-14
DE2037864A1 (de) 1971-02-18
SE354435B (US06262066-20010717-C00315.png) 1973-03-12
DE7028721U (de) 1970-11-26

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee