GB1290082A - - Google Patents

Info

Publication number
GB1290082A
GB1290082A GB1290082DA GB1290082A GB 1290082 A GB1290082 A GB 1290082A GB 1290082D A GB1290082D A GB 1290082DA GB 1290082 A GB1290082 A GB 1290082A
Authority
GB
United Kingdom
Prior art keywords
switch
gas
holder
end portion
pinch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1290082A publication Critical patent/GB1290082A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/336—Changing physical properties of treated surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Plasma Technology (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Furnace Details (AREA)
GB1290082D 1969-07-09 1970-07-06 Expired GB1290082A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6910497A NL6910497A (enrdf_load_stackoverflow) 1969-07-09 1969-07-09

Publications (1)

Publication Number Publication Date
GB1290082A true GB1290082A (enrdf_load_stackoverflow) 1972-09-20

Family

ID=19807423

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1290082D Expired GB1290082A (enrdf_load_stackoverflow) 1969-07-09 1970-07-06

Country Status (7)

Country Link
US (1) US3646308A (enrdf_load_stackoverflow)
AT (1) AT319400B (enrdf_load_stackoverflow)
BE (1) BE753116A (enrdf_load_stackoverflow)
FR (1) FR2054411A5 (enrdf_load_stackoverflow)
GB (1) GB1290082A (enrdf_load_stackoverflow)
NL (1) NL6910497A (enrdf_load_stackoverflow)
SE (1) SE360215B (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3862393A (en) * 1971-08-20 1975-01-21 Humphreys Corp Low frequency induction plasma system
NL8402225A (nl) * 1984-07-13 1986-02-03 Philips Nv Werkwijze voor de vervaardiging van massieve glazen voorvormen uit holle voorvormen.

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2306054A (en) * 1938-02-19 1942-12-22 Corning Glass Works Glass heating and working
US3321662A (en) * 1962-07-02 1967-05-23 Sylvania Electric Prod Electric lamp with tubular body and light transmitting closure having over-lapping flange seal
US3492074A (en) * 1967-11-24 1970-01-27 Hewlett Packard Co Atomic absorption spectroscopy system having sample dissociation energy control
US3484650A (en) * 1967-12-15 1969-12-16 John F Rendina Plasma atomic vapor generator

Also Published As

Publication number Publication date
DE2031856B2 (de) 1976-10-07
FR2054411A5 (enrdf_load_stackoverflow) 1971-04-16
SE360215B (enrdf_load_stackoverflow) 1973-09-17
NL6910497A (enrdf_load_stackoverflow) 1971-01-12
BE753116A (fr) 1971-01-07
AT319400B (de) 1974-12-27
US3646308A (en) 1972-02-29
DE2031856A1 (de) 1971-01-14

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee