SE360215B - - Google Patents
Info
- Publication number
- SE360215B SE360215B SE09368/70A SE936870A SE360215B SE 360215 B SE360215 B SE 360215B SE 09368/70 A SE09368/70 A SE 09368/70A SE 936870 A SE936870 A SE 936870A SE 360215 B SE360215 B SE 360215B
- Authority
- SE
- Sweden
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/336—Changing physical properties of treated surfaces
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Joining Of Glass To Other Materials (AREA)
- Apparatus For Disinfection Or Sterilisation (AREA)
- Furnace Details (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL6910497A NL6910497A (xx) | 1969-07-09 | 1969-07-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE360215B true SE360215B (xx) | 1973-09-17 |
Family
ID=19807423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE09368/70A SE360215B (xx) | 1969-07-09 | 1970-07-06 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3646308A (xx) |
| AT (1) | AT319400B (xx) |
| BE (1) | BE753116A (xx) |
| FR (1) | FR2054411A5 (xx) |
| GB (1) | GB1290082A (xx) |
| NL (1) | NL6910497A (xx) |
| SE (1) | SE360215B (xx) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3862393A (en) * | 1971-08-20 | 1975-01-21 | Humphreys Corp | Low frequency induction plasma system |
| NL8402225A (nl) * | 1984-07-13 | 1986-02-03 | Philips Nv | Werkwijze voor de vervaardiging van massieve glazen voorvormen uit holle voorvormen. |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2306054A (en) * | 1938-02-19 | 1942-12-22 | Corning Glass Works | Glass heating and working |
| US3321662A (en) * | 1962-07-02 | 1967-05-23 | Sylvania Electric Prod | Electric lamp with tubular body and light transmitting closure having over-lapping flange seal |
| US3492074A (en) * | 1967-11-24 | 1970-01-27 | Hewlett Packard Co | Atomic absorption spectroscopy system having sample dissociation energy control |
| US3484650A (en) * | 1967-12-15 | 1969-12-16 | John F Rendina | Plasma atomic vapor generator |
-
1969
- 1969-07-09 NL NL6910497A patent/NL6910497A/xx unknown
-
1970
- 1970-07-02 US US51949A patent/US3646308A/en not_active Expired - Lifetime
- 1970-07-06 GB GB1290082D patent/GB1290082A/en not_active Expired
- 1970-07-06 AT AT607570A patent/AT319400B/de not_active IP Right Cessation
- 1970-07-06 SE SE09368/70A patent/SE360215B/xx unknown
- 1970-07-07 BE BE753116D patent/BE753116A/xx unknown
- 1970-07-09 FR FR7025534A patent/FR2054411A5/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2031856B2 (de) | 1976-10-07 |
| BE753116A (fr) | 1971-01-07 |
| DE2031856A1 (de) | 1971-01-14 |
| US3646308A (en) | 1972-02-29 |
| AT319400B (de) | 1974-12-27 |
| GB1290082A (xx) | 1972-09-20 |
| NL6910497A (xx) | 1971-01-12 |
| FR2054411A5 (xx) | 1971-04-16 |