FR2054411A5 - - Google Patents

Info

Publication number
FR2054411A5
FR2054411A5 FR7025534A FR7025534A FR2054411A5 FR 2054411 A5 FR2054411 A5 FR 2054411A5 FR 7025534 A FR7025534 A FR 7025534A FR 7025534 A FR7025534 A FR 7025534A FR 2054411 A5 FR2054411 A5 FR 2054411A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7025534A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of FR2054411A5 publication Critical patent/FR2054411A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/336—Changing physical properties of treated surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Furnace Details (AREA)
  • Apparatus For Disinfection Or Sterilisation (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Plasma Technology (AREA)
FR7025534A 1969-07-09 1970-07-09 Expired FR2054411A5 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6910497A NL6910497A (enrdf_load_stackoverflow) 1969-07-09 1969-07-09

Publications (1)

Publication Number Publication Date
FR2054411A5 true FR2054411A5 (enrdf_load_stackoverflow) 1971-04-16

Family

ID=19807423

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7025534A Expired FR2054411A5 (enrdf_load_stackoverflow) 1969-07-09 1970-07-09

Country Status (7)

Country Link
US (1) US3646308A (enrdf_load_stackoverflow)
AT (1) AT319400B (enrdf_load_stackoverflow)
BE (1) BE753116A (enrdf_load_stackoverflow)
FR (1) FR2054411A5 (enrdf_load_stackoverflow)
GB (1) GB1290082A (enrdf_load_stackoverflow)
NL (1) NL6910497A (enrdf_load_stackoverflow)
SE (1) SE360215B (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3862393A (en) * 1971-08-20 1975-01-21 Humphreys Corp Low frequency induction plasma system
NL8402225A (nl) * 1984-07-13 1986-02-03 Philips Nv Werkwijze voor de vervaardiging van massieve glazen voorvormen uit holle voorvormen.

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2306054A (en) * 1938-02-19 1942-12-22 Corning Glass Works Glass heating and working
US3321662A (en) * 1962-07-02 1967-05-23 Sylvania Electric Prod Electric lamp with tubular body and light transmitting closure having over-lapping flange seal
US3492074A (en) * 1967-11-24 1970-01-27 Hewlett Packard Co Atomic absorption spectroscopy system having sample dissociation energy control
US3484650A (en) * 1967-12-15 1969-12-16 John F Rendina Plasma atomic vapor generator

Also Published As

Publication number Publication date
NL6910497A (enrdf_load_stackoverflow) 1971-01-12
AT319400B (de) 1974-12-27
BE753116A (fr) 1971-01-07
SE360215B (enrdf_load_stackoverflow) 1973-09-17
GB1290082A (enrdf_load_stackoverflow) 1972-09-20
DE2031856B2 (de) 1976-10-07
US3646308A (en) 1972-02-29
DE2031856A1 (de) 1971-01-14

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Legal Events

Date Code Title Description
ST Notification of lapse