GB1277615A - A method of manufacturing electromechanical resonators - Google Patents
A method of manufacturing electromechanical resonatorsInfo
- Publication number
- GB1277615A GB1277615A GB5147969A GB5147969A GB1277615A GB 1277615 A GB1277615 A GB 1277615A GB 5147969 A GB5147969 A GB 5147969A GB 5147969 A GB5147969 A GB 5147969A GB 1277615 A GB1277615 A GB 1277615A
- Authority
- GB
- United Kingdom
- Prior art keywords
- substrate
- layer
- copper
- resonator
- etched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 8
- 229910052802 copper Inorganic materials 0.000 abstract 8
- 239000010949 copper Substances 0.000 abstract 8
- 239000004020 conductor Substances 0.000 abstract 7
- 229910003271 Ni-Fe Inorganic materials 0.000 abstract 4
- 238000000034 method Methods 0.000 abstract 4
- NLKNQRATVPKPDG-UHFFFAOYSA-M potassium iodide Chemical compound [K+].[I-] NLKNQRATVPKPDG-UHFFFAOYSA-M 0.000 abstract 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 abstract 2
- 239000004593 Epoxy Substances 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 2
- 239000011521 glass Substances 0.000 abstract 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 2
- 229910052737 gold Inorganic materials 0.000 abstract 2
- 239000010931 gold Substances 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 abstract 1
- 239000004160 Ammonium persulphate Substances 0.000 abstract 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 abstract 1
- 239000000956 alloy Substances 0.000 abstract 1
- 229910045601 alloy Inorganic materials 0.000 abstract 1
- 229910021529 ammonia Inorganic materials 0.000 abstract 1
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 abstract 1
- 235000019395 ammonium persulphate Nutrition 0.000 abstract 1
- 229910052740 iodine Inorganic materials 0.000 abstract 1
- 239000011630 iodine Substances 0.000 abstract 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 abstract 1
- 239000011347 resin Substances 0.000 abstract 1
- 229920005989 resin Polymers 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/48—Coupling means therefor
- H03H9/50—Mechanical coupling means
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
1277615 Printed circuits STANDARD TELEPHONES & CABLES Ltd 16 Oct 1970 [21 Oct 1969] 51479/69 Heading H1R In order that a resonator element 16 of an electromechanical resonator, Fig. 8, shall be spaced apart parallel to the substrate 15 carrying the conductor pattern 14a, 13, 12a &c. the method of manufacture includes the step of providing a layer of chemically different material to that of the elements and substrate between the resonator element and the substrate, the layer having a "window" etched in it to allow the area 11a of conductor to extend from the substrate, and support the resonator element such that when the latter step of etching away the layer is performed, the element is left supported parallel to the substrate. The resonator element may be of Ni-Fe alloy, e.g. Ni Span C Elinovar and Thermolast; the chemically different layer of copper; the conductors of gold; and the insulating substrate of glass or epoxy glass board. In a preferred method, a layer of copper is electroplated on to a sheet of Ni-Fe material from which the resonator element is to be made and a "window" etched in the copper corresponding to the "root" of the element, further holes being etched through both layers to form reference points, for the photo-lithographic process used to mask the surfaces. Conductor areas 11a, 12a &c. are formed on the copper surface and infill the window area 11 (Fig. 5A) and the substrate bonded to the conductors using an epoxy base resin. The Ni-Fe layer is then etched to the shape of the resonating element and the copper layer is then removed by further etching. Ammonium persulphate in ammonia may be used as the copper etch, potassium iodide and iodine to etch the gold when forming the conductors and ferric chloride to etch the Ni-Fe layer, which also attacks the copper layer. Fig. 10 and Figs. 16, 25 (not shown) show further forms of resonator wherein conductors and substrates are formed on both sides of the resonator element, addition layers of copper being provided as required above the element, windows, extending through these layers to the substrate, being provided to define supports for the upper conductive and substrate areas. The method of producing the arrangement of Fig. 8 may be reversed if required, i.e. starting with the substrate and building up layers therefor.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB5147969A GB1277615A (en) | 1969-10-21 | 1969-10-21 | A method of manufacturing electromechanical resonators |
| AU20594/70A AU2059470A (en) | 1969-10-21 | 1970-10-01 | A method of manufacturing electromechanical resonators |
| ES384719A ES384719A1 (en) | 1969-10-21 | 1970-10-20 | A method of manufacturing electromechanical resonators |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB5147969A GB1277615A (en) | 1969-10-21 | 1969-10-21 | A method of manufacturing electromechanical resonators |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1277615A true GB1277615A (en) | 1972-06-14 |
Family
ID=10460186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB5147969A Expired GB1277615A (en) | 1969-10-21 | 1969-10-21 | A method of manufacturing electromechanical resonators |
Country Status (3)
| Country | Link |
|---|---|
| AU (1) | AU2059470A (en) |
| ES (1) | ES384719A1 (en) |
| GB (1) | GB1277615A (en) |
-
1969
- 1969-10-21 GB GB5147969A patent/GB1277615A/en not_active Expired
-
1970
- 1970-10-01 AU AU20594/70A patent/AU2059470A/en not_active Expired
- 1970-10-20 ES ES384719A patent/ES384719A1/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| ES384719A1 (en) | 1973-03-16 |
| AU2059470A (en) | 1972-04-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PLNP | Patent lapsed through nonpayment of renewal fees |