GB1259883A - Encapsulated beam lead construction for semiconductor device and assembly and method - Google Patents
Encapsulated beam lead construction for semiconductor device and assembly and methodInfo
- Publication number
- GB1259883A GB1259883A GB37426/69A GB3742669A GB1259883A GB 1259883 A GB1259883 A GB 1259883A GB 37426/69 A GB37426/69 A GB 37426/69A GB 3742669 A GB3742669 A GB 3742669A GB 1259883 A GB1259883 A GB 1259883A
- Authority
- GB
- United Kingdom
- Prior art keywords
- layer
- silicon
- semi
- circuit elements
- conductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title abstract 5
- 238000000034 method Methods 0.000 title abstract 3
- 238000010276 construction Methods 0.000 title abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 3
- 239000000463 material Substances 0.000 abstract 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 3
- 239000003989 dielectric material Substances 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 2
- 238000002955 isolation Methods 0.000 abstract 2
- 229910052697 platinum Inorganic materials 0.000 abstract 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- ZXEYZECDXFPJRJ-UHFFFAOYSA-N $l^{3}-silane;platinum Chemical compound [SiH3].[Pt] ZXEYZECDXFPJRJ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 1
- 230000000712 assembly Effects 0.000 abstract 1
- 238000000429 assembly Methods 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 239000011810 insulating material Substances 0.000 abstract 1
- 229910021339 platinum silicide Inorganic materials 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 239000010936 titanium Substances 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Element Separation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US74807068A | 1968-07-26 | 1968-07-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1259883A true GB1259883A (en) | 1972-01-12 |
Family
ID=25007867
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB37426/69A Expired GB1259883A (en) | 1968-07-26 | 1969-07-25 | Encapsulated beam lead construction for semiconductor device and assembly and method |
Country Status (4)
Country | Link |
---|---|
DE (1) | DE1937755A1 (enrdf_load_stackoverflow) |
FR (1) | FR2014743A1 (enrdf_load_stackoverflow) |
GB (1) | GB1259883A (enrdf_load_stackoverflow) |
NL (1) | NL6911479A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111599703A (zh) * | 2020-05-09 | 2020-08-28 | 中国电子科技集团公司第十三研究所 | SiC衬底上GaN器件或电路的梁式引线制备方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5120267B2 (enrdf_load_stackoverflow) * | 1972-05-13 | 1976-06-23 | ||
NL7215200A (enrdf_load_stackoverflow) * | 1972-11-10 | 1974-05-14 | ||
US4257061A (en) * | 1977-10-17 | 1981-03-17 | John Fluke Mfg. Co., Inc. | Thermally isolated monolithic semiconductor die |
-
1969
- 1969-07-25 NL NL6911479A patent/NL6911479A/xx unknown
- 1969-07-25 GB GB37426/69A patent/GB1259883A/en not_active Expired
- 1969-07-25 FR FR6925619A patent/FR2014743A1/fr not_active Withdrawn
- 1969-07-25 DE DE19691937755 patent/DE1937755A1/de active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111599703A (zh) * | 2020-05-09 | 2020-08-28 | 中国电子科技集团公司第十三研究所 | SiC衬底上GaN器件或电路的梁式引线制备方法 |
CN111599703B (zh) * | 2020-05-09 | 2021-09-03 | 中国电子科技集团公司第十三研究所 | SiC衬底上GaN器件或电路的梁式引线制备方法 |
Also Published As
Publication number | Publication date |
---|---|
DE1937755A1 (de) | 1970-02-12 |
FR2014743A1 (enrdf_load_stackoverflow) | 1970-04-17 |
NL6911479A (enrdf_load_stackoverflow) | 1970-01-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PLNP | Patent lapsed through nonpayment of renewal fees |