GB1251826A - - Google Patents

Info

Publication number
GB1251826A
GB1251826A GB1251826DA GB1251826A GB 1251826 A GB1251826 A GB 1251826A GB 1251826D A GB1251826D A GB 1251826DA GB 1251826 A GB1251826 A GB 1251826A
Authority
GB
United Kingdom
Prior art keywords
sputtering apparatus
pivoted
substrate
telephoniques
slideways
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1251826A publication Critical patent/GB1251826A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
GB1251826D 1967-12-22 1968-11-29 Expired GB1251826A (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR133491 1967-12-22

Publications (1)

Publication Number Publication Date
GB1251826A true GB1251826A (https=) 1971-11-03

Family

ID=8643630

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1251826D Expired GB1251826A (https=) 1967-12-22 1968-11-29

Country Status (5)

Country Link
US (1) US3661760A (https=)
BE (1) BE724898A (https=)
DE (2) DE6812746U (https=)
FR (1) FR1594542A (https=)
GB (1) GB1251826A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2208390A (en) * 1987-08-06 1989-03-30 Plessey Co Plc Deposition of thin film of multicomponent materials by sputtering

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3943047A (en) * 1974-05-10 1976-03-09 Bell Telephone Laboratories, Incorporated Selective removal of material by sputter etching
GB2114809B (en) * 1982-02-04 1986-02-05 Standard Telephones Cables Ltd Metallic silicide production
DE3925536A1 (de) * 1989-08-02 1991-02-07 Leybold Ag Anordnung zur dickenmessung von duennschichten

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2208390A (en) * 1987-08-06 1989-03-30 Plessey Co Plc Deposition of thin film of multicomponent materials by sputtering
GB2208390B (en) * 1987-08-06 1991-03-27 Plessey Co Plc Thin film deposition process

Also Published As

Publication number Publication date
FR1594542A (https=) 1970-06-08
DE1816431A1 (de) 1971-01-21
US3661760A (en) 1972-05-09
DE6812746U (de) 1971-02-18
BE724898A (https=) 1969-05-16

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees