BE724898A - - Google Patents
Info
- Publication number
- BE724898A BE724898A BE724898DA BE724898A BE 724898 A BE724898 A BE 724898A BE 724898D A BE724898D A BE 724898DA BE 724898 A BE724898 A BE 724898A
- Authority
- BE
- Belgium
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Management, Administration, Business Operations System, And Electronic Commerce (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR133491 | 1967-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE724898A true BE724898A (https=) | 1969-05-16 |
Family
ID=8643630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE724898D BE724898A (https=) | 1967-12-22 | 1968-12-04 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3661760A (https=) |
| BE (1) | BE724898A (https=) |
| DE (2) | DE6812746U (https=) |
| FR (1) | FR1594542A (https=) |
| GB (1) | GB1251826A (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3943047A (en) * | 1974-05-10 | 1976-03-09 | Bell Telephone Laboratories, Incorporated | Selective removal of material by sputter etching |
| GB2114809B (en) * | 1982-02-04 | 1986-02-05 | Standard Telephones Cables Ltd | Metallic silicide production |
| GB2208390B (en) * | 1987-08-06 | 1991-03-27 | Plessey Co Plc | Thin film deposition process |
| DE3925536A1 (de) * | 1989-08-02 | 1991-02-07 | Leybold Ag | Anordnung zur dickenmessung von duennschichten |
-
1967
- 1967-12-22 FR FR133491A patent/FR1594542A/fr not_active Expired
-
1968
- 1968-11-29 GB GB1251826D patent/GB1251826A/en not_active Expired
- 1968-12-04 BE BE724898D patent/BE724898A/xx unknown
- 1968-12-06 US US781772A patent/US3661760A/en not_active Expired - Lifetime
- 1968-12-21 DE DE6812746U patent/DE6812746U/de not_active Expired
- 1968-12-21 DE DE19681816431 patent/DE1816431A1/de active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| FR1594542A (https=) | 1970-06-08 |
| GB1251826A (https=) | 1971-11-03 |
| DE1816431A1 (de) | 1971-01-21 |
| US3661760A (en) | 1972-05-09 |
| DE6812746U (de) | 1971-02-18 |