GB1246207A - Selective depolymerization of thin polymer films - Google Patents

Selective depolymerization of thin polymer films

Info

Publication number
GB1246207A
GB1246207A GB2417369A GB2417369A GB1246207A GB 1246207 A GB1246207 A GB 1246207A GB 2417369 A GB2417369 A GB 2417369A GB 2417369 A GB2417369 A GB 2417369A GB 1246207 A GB1246207 A GB 1246207A
Authority
GB
United Kingdom
Prior art keywords
etched
water
acid
hydrogen peroxide
chloride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2417369A
Inventor
Archibald Nelson Wright
Richard Cardey Merrill
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of GB1246207A publication Critical patent/GB1246207A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/42—Stripping or agents therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation

Abstract

1,246,207. Etching. GENERAL ELECTRIC CO. 12 May, 1969 [22 May, 1968], No. 24173/69. Heading B6J. [Also in Divisions B1, C3 and G2] Metal layers which have photographically produced polymeric masks thereon (see Division G2) are etched with the following etchants: Silver etched with chromium trioxide and sulphuric acid in water; Copper etched with (a) 2À25-3À75M ferric chloride or (b) ammonium persulphate and mercuric chloride in water; Aluminium etched with (a) 5N potassium hydroxide and potassium bromate (b) hydrochloric acid and copper carbonate (c) stannous chlorate in water followed by concentrated hydrochloric acid and nickelous chloride or (d) 20% caustic soda; Tin etched with hydrochloric and nitric acid in water; Lead etched with (a) citric acid and hydrogen peroxide in water or (b) acetic acid and hydrogen peroxide in water; Gold etched with (a) iodine and potassium iodide in water or (b) photoetched with methyl iodide during exposure to ultra-violet light.
GB2417369A 1968-05-22 1969-05-12 Selective depolymerization of thin polymer films Expired GB1246207A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US73109068A 1968-05-22 1968-05-22

Publications (1)

Publication Number Publication Date
GB1246207A true GB1246207A (en) 1971-09-15

Family

ID=24938021

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2417369A Expired GB1246207A (en) 1968-05-22 1969-05-12 Selective depolymerization of thin polymer films

Country Status (3)

Country Link
DE (1) DE1925496A1 (en)
FR (1) FR2009157A1 (en)
GB (1) GB1246207A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4414059A (en) * 1982-12-09 1983-11-08 International Business Machines Corporation Far UV patterning of resist materials
JPS59216142A (en) * 1983-05-16 1984-12-06 インタ−ナシヨナル　ビジネス　マシ−ンズ　コ−ポレ−シヨン Manufacture of mask for lithography

Also Published As

Publication number Publication date
FR2009157A1 (en) 1970-01-30
DE1925496A1 (en) 1969-11-27

Similar Documents

Publication Publication Date Title
GB1445018A (en) Electrical device comprising thin-film resistive elements and its fabrication process
GB1342069A (en) Electrically conductive components
GB1396422A (en) Photographic products and processes
GB1246207A (en) Selective depolymerization of thin polymer films
ES417099A1 (en) Oxidising agent method and apparatus for cutting metal
FR2066093A5 (en) Suppressing calcium ions in developer
FR2407974A1 (en) SULFURIC COMPOSITION CONTAINING HYDROGEN PEROXIDE AND A HYDROXY-CYCLOPARAFFIN AND ITS APPLICATION TO THE DISSOLUTION OF METALS
GB1516687A (en) Imaging method
US1624172A (en) of los angeles
FR2196604A5 (en)
JPS51112488A (en) Method of producing a zinc oxide film
GB1308923A (en) Acetylene compounds
NL299392A (en)
ES8106241A1 (en) Process for the treatment of lead chloride solutions.
GB1256209A (en) Ammoniacal etching solution
JPS5214371A (en) Flattening method of concave-convex surface
GB955000A (en) Improvements in or relating to copper etching solutions
GB1154062A (en) The Etching of Aluminium.
GB1120675A (en) Improvements in aqueous chemical toxic material neutralizing and surface protecting solutions
SE404748B (en) PROCEDURE FOR WHEN APPLYING A PROTECTIVE FILM OF A METAL ALLOY ON BAND-SHAPED MONSTER LEADERS ON A CIRCUIT CARD, ERROR-FREE CONTACTS WITH THESE MONSTER LEADERS
GB1326366A (en) Photographic process
JPS5210091A (en) Mounting method of radiation detector element
van Beek et al. Properties of diazosulfonates. Part II: The rate of the reaction between 2‐methoxybenzenediazonium and sulfite ions
JPS5360659A (en) Electrochromic diplaying device
GB1291038A (en) A process for etching chromium