GB1237070A - Apparatus for treating articles - Google Patents

Apparatus for treating articles

Info

Publication number
GB1237070A
GB1237070A GB55772/69A GB5577269A GB1237070A GB 1237070 A GB1237070 A GB 1237070A GB 55772/69 A GB55772/69 A GB 55772/69A GB 5577269 A GB5577269 A GB 5577269A GB 1237070 A GB1237070 A GB 1237070A
Authority
GB
United Kingdom
Prior art keywords
fluid
articles
holder
treating
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB55772/69A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1237070A publication Critical patent/GB1237070A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • C23G5/04—Apparatus
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G3/00—Apparatus for cleaning or pickling metallic material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Weting (AREA)
GB55772/69A 1968-12-23 1969-11-14 Apparatus for treating articles Expired GB1237070A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US78606768A 1968-12-23 1968-12-23

Publications (1)

Publication Number Publication Date
GB1237070A true GB1237070A (en) 1971-06-30

Family

ID=25137495

Family Applications (1)

Application Number Title Priority Date Filing Date
GB55772/69A Expired GB1237070A (en) 1968-12-23 1969-11-14 Apparatus for treating articles

Country Status (5)

Country Link
US (1) US3577278A (enExample)
JP (1) JPS4831505B1 (enExample)
DE (1) DE1964216A1 (enExample)
FR (1) FR2040961A5 (enExample)
GB (1) GB1237070A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2231489A (en) * 1989-05-15 1990-11-21 Seiichiro Aigo Washing apparatus for semiconductor wafers

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5322002U (enExample) * 1976-08-05 1978-02-24
US4178188A (en) * 1977-09-14 1979-12-11 Branson Ultrasonics Corporation Method for cleaning workpieces by ultrasonic energy
JP7175461B2 (ja) * 2018-05-08 2022-11-21 青島海爾洗衣机有限公司 超音波洗浄装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2231489A (en) * 1989-05-15 1990-11-21 Seiichiro Aigo Washing apparatus for semiconductor wafers
GB2231489B (en) * 1989-05-15 1993-02-10 Seiichiro Aigo Washing apparatus for a semiconductor wafer

Also Published As

Publication number Publication date
DE1964216A1 (de) 1970-07-09
US3577278A (en) 1971-05-04
FR2040961A5 (enExample) 1971-01-22
JPS4831505B1 (enExample) 1973-09-29

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