GB1203597A - Apparatus for positioning a member in an x-y co-ordinate positioning system - Google Patents

Apparatus for positioning a member in an x-y co-ordinate positioning system

Info

Publication number
GB1203597A
GB1203597A GB5603367A GB5603367A GB1203597A GB 1203597 A GB1203597 A GB 1203597A GB 5603367 A GB5603367 A GB 5603367A GB 5603367 A GB5603367 A GB 5603367A GB 1203597 A GB1203597 A GB 1203597A
Authority
GB
United Kingdom
Prior art keywords
positioning
counters
movement
diaphragms
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5603367A
Inventor
Kurt Wrescher
Renhard Springer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Arbeitsstelle fuer Molekularelektronik
Original Assignee
Arbeitsstelle fuer Molekularelektronik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to DE1967A0057266 priority Critical patent/DE1588018B2/en
Application filed by Arbeitsstelle fuer Molekularelektronik filed Critical Arbeitsstelle fuer Molekularelektronik
Priority to GB5603367A priority patent/GB1203597A/en
Priority to FR1554873D priority patent/FR1554873A/fr
Publication of GB1203597A publication Critical patent/GB1203597A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G05B19/21—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G05B19/21—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device
    • G05B19/23—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for point-to-point control
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/34—Director, elements to supervisory
    • G05B2219/34239—Multiplex for whole system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/34—Director, elements to supervisory
    • G05B2219/34242—For measurement only
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37098—X y scale plate instead of two ruler scale, two dimensional scale
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/37—Measurements
    • G05B2219/37102—Single detector for whole range, both x and y axis

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Human Computer Interaction (AREA)
  • Automation & Control Theory (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

1,203,597. Controlling movable members. ARBEITSSTELLE FUR MOLEKULARELEKTRONIK. 8 Dec., 1967, No. 56033/67. Heading G4H. To position a member movable in the X and Y directions, graduated scales carried by the member are sensed photo-electrically so that pulses are applied to a counter 11 (Fig. 4) (when the positioning in each direction is effected sequentially) or to counters 15, 16 (Fig. 5) (when the positioning is effected simultaneously) until the count is equal to the preset count in counters 12 13 (Fig. 4) or 17, 18 (Fig. 5) representing the required position. Diaphragms 7 (Fig. 4) 8, 8a (Fig. 5), positioned in front of the photodetectors, may have more than one slit. To control the movement of the member in either the positive or negative direction two slit diaphragms staggered in relation to each other are positioned in front of photo-cells so that direction of movement may be determined. The apparatus may be used in the production of photomasks in the semi-conductor industry.
GB5603367A 1967-11-03 1967-12-08 Apparatus for positioning a member in an x-y co-ordinate positioning system Expired GB1203597A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE1967A0057266 DE1588018B2 (en) 1967-11-03 1967-11-03 DEVICE FOR X, Y POSITIONING OF CROSS TABLES
GB5603367A GB1203597A (en) 1967-11-03 1967-12-08 Apparatus for positioning a member in an x-y co-ordinate positioning system
FR1554873D FR1554873A (en) 1967-11-03 1967-12-12

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE1967A0057266 DE1588018B2 (en) 1967-11-03 1967-11-03 DEVICE FOR X, Y POSITIONING OF CROSS TABLES
GB5603367A GB1203597A (en) 1967-11-03 1967-12-08 Apparatus for positioning a member in an x-y co-ordinate positioning system
FR131892 1967-12-12

Publications (1)

Publication Number Publication Date
GB1203597A true GB1203597A (en) 1970-08-26

Family

ID=27209002

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5603367A Expired GB1203597A (en) 1967-11-03 1967-12-08 Apparatus for positioning a member in an x-y co-ordinate positioning system

Country Status (3)

Country Link
DE (1) DE1588018B2 (en)
FR (1) FR1554873A (en)
GB (1) GB1203597A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0109068A2 (en) * 1982-11-11 1984-05-23 Hitachi, Ltd. Method and apparatus for controlling industrial robot
GB2153995A (en) * 1984-02-02 1985-08-29 Mitutoyo Mfg Co Ltd Coordinate measuring instrument
US4684257A (en) * 1984-02-02 1987-08-04 Mitutoyo Mfg. Measuring instrument
EP0340343A1 (en) * 1988-04-30 1989-11-08 Deutsche ITT Industries GmbH Wireless remote control system of electronic sets
WO1997030381A1 (en) * 1996-02-19 1997-08-21 Unova U.K. Limited Improved monitoring system for workpiece and tool carriage movement

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4132942C2 (en) * 1991-10-04 1994-05-26 Heidenhain Gmbh Dr Johannes Measuring device for two measuring directions
DE102017100991B3 (en) * 2017-01-19 2017-11-30 Carl Mahr Holding Gmbh Measuring device and method for detecting at least one length measured variable

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0109068A2 (en) * 1982-11-11 1984-05-23 Hitachi, Ltd. Method and apparatus for controlling industrial robot
EP0109068A3 (en) * 1982-11-11 1985-12-11 Hitachi, Ltd. Method and apparatus for controlling industrial robot
GB2153995A (en) * 1984-02-02 1985-08-29 Mitutoyo Mfg Co Ltd Coordinate measuring instrument
US4684257A (en) * 1984-02-02 1987-08-04 Mitutoyo Mfg. Measuring instrument
US4935619A (en) * 1988-04-29 1990-06-19 Deutsche Itt Industries Gmbh Wireless remote-control system for electronic apparatus
EP0340343A1 (en) * 1988-04-30 1989-11-08 Deutsche ITT Industries GmbH Wireless remote control system of electronic sets
WO1997030381A1 (en) * 1996-02-19 1997-08-21 Unova U.K. Limited Improved monitoring system for workpiece and tool carriage movement
EP0940737A2 (en) * 1996-02-19 1999-09-08 Unova U.K. Limited Improved monitoring system for workpiece and tool carriage movement
EP0940737A3 (en) * 1996-02-19 2000-05-31 Unova U.K. Limited Improved monitoring system for workpiece and tool carriage movement

Also Published As

Publication number Publication date
DE1588018A1 (en) 1970-12-17
FR1554873A (en) 1969-01-24
DE1588018B2 (en) 1976-06-10

Similar Documents

Publication Publication Date Title
GB1031975A (en) Coordinate measuring system
FR63348E (en) Method and devices for controlling a flow and their various applications
GB1203597A (en) Apparatus for positioning a member in an x-y co-ordinate positioning system
GB922545A (en) A device for measuring the area of plane objects having an irregular shape
GB1117144A (en) Apparatus for analyzing physical processes
GB1154736A (en) Optical Measuring Device particularly for Machine Tools
JPS543589A (en) Coating defect detecting apparatus of sheet form objects
JPS5238244A (en) Non-contact tye length-measuring device
GB1154160A (en) A device for the Movement of a Scale, particularly in Machine Tools
GB1206573A (en) Displacement measuring device
FR65303E (en) Method and devices for controlling a flow and their various applications
GB1010518A (en) Variable width slit operating mechanism
JPS52131363A (en) Control device for industrial robot
GB1245141A (en) Improvements in or relating to measuring apparatus, more particularly for measuring cylindrical workpieces in grinding machines
JPS5331075A (en) Status supervisory methods
SE337702B (en)
GB891533A (en) Improvements relating to remote control systems
CH445223A (en) Device with at least two seals designed as a rolling membrane
GB1405362A (en) Device for positioning slides
GB1003053A (en) Accelerometer
GB1040070A (en) Improvements in devices for measuring the displacements of a graduated scale
CA501725A (en) Control units for pin hole detectors
CA487663A (en) Intermittent and proportionate pattern control mechanism for machine tool
GB1206628A (en) Improvements in and relating to electrical control apparatus for machine tools
GB1246752A (en) Automation control device

Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee