GB1180894A - Atom Probe Field Ion Microscope. - Google Patents
Atom Probe Field Ion Microscope.Info
- Publication number
- GB1180894A GB1180894A GB28944/68A GB2894468A GB1180894A GB 1180894 A GB1180894 A GB 1180894A GB 28944/68 A GB28944/68 A GB 28944/68A GB 2894468 A GB2894468 A GB 2894468A GB 1180894 A GB1180894 A GB 1180894A
- Authority
- GB
- United Kingdom
- Prior art keywords
- specimen
- aperture
- mass spectrometer
- helium
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/28—Static spectrometers
- H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/285—Emission microscopes, e.g. field-emission microscopes
Abstract
1,180,894. Ion beam tubes. NATIONAL RESEARCH DEVELOPMENT CORP. 18 June, 1968 [20 June, 1967], No. 28944/68. Heading HID. In a field ion microscope an ion beam corresponding to a particular atom of the specimen 12 is selected by pairs of deflection plates 18 to pass through an aperture in the image screen 16 for subsequent analysis in a mass spectrometer 25. Additional deflection plates may be provided to ensure normal incidence of the selected ion beam on the aperture. The imaging gas is preferably helium at a pressure of a few microns with the electrical field applied to the specimen 12 then slowly increased, the flux of helium ions detected at 28 suddenly ceases when the selected atom is field desorbed or evaporated. The selected. atom then leaves the specimen site as an ion which passes through the aperture in the image screen for analysis in the mass spectrometer and detection at 30 or 32. The detectors 28, 30 and 32 are adjustable in position. The helium gas may alternatively, or in addition, be recorded by virtue of the beam of neutral atoms which passes through the aperture. In a modification (Fig. 3), the detector section of the mass spectrometer comprises a venetianblind type electron multiplier and output display screen. In a further modification (Fig. 4), the deflection plates are dispensed with and the microscope section 10 (50) includes a bellows device (52) which may be used to tilt the specimen and an associated ring electrode (56) in any desired direction, the tilting motion being restrained by a spherical joint (54). The microscope is associated in this modification with a time-of-flight mass spectrometer (64). The helium supply may be interrupted before the field desorption process is initiated, e.g. by applying a voltage pulse to the specimen or to the associated ring electrode. During adjustment of the image the gas pressure may be maintained by either, closing off the pumping system or operating in a dynamic gas mode with the ring electrode associated with the specimen having a small orifice such that the gas pressure is higher in the vicinity of the specimen than in the rest of the instrument. The size of the aperture in the image screen may be adjusted by utilizing an array or revolving plate of various size holes or an iris type variable aperture. The aperture may also be of oblong shape.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US64749367A | 1967-06-20 | 1967-06-20 | |
US82236269A | 1969-05-07 | 1969-05-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1180894A true GB1180894A (en) | 1970-02-11 |
Family
ID=27095169
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB28944/68A Expired GB1180894A (en) | 1967-06-20 | 1968-06-18 | Atom Probe Field Ion Microscope. |
Country Status (3)
Country | Link |
---|---|
US (1) | US3602710A (en) |
DE (1) | DE1764517B1 (en) |
GB (1) | GB1180894A (en) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3931519A (en) * | 1972-02-14 | 1976-01-06 | American Optical Corporation | Field emission electron gun |
US4020387A (en) * | 1972-02-14 | 1977-04-26 | American Optical Corporation | Field emission electron gun |
US5061850A (en) * | 1990-07-30 | 1991-10-29 | Wisconsin Alumni Research Foundation | High-repetition rate position sensitive atom probe |
GB9302886D0 (en) * | 1993-02-12 | 1993-03-31 | Fisons Plc | Multiple-detector system for detecting charged particles |
US5440124A (en) * | 1994-07-08 | 1995-08-08 | Wisconsin Alumni Research Foundation | High mass resolution local-electrode atom probe |
US5621211A (en) * | 1994-09-01 | 1997-04-15 | Spence; John C. H. | Scanning tunneling atom-probe microscope |
GB0320187D0 (en) * | 2003-08-28 | 2003-10-01 | Shimadzu Res Lab Europe Ltd | Particle optical apparatus |
US7557361B2 (en) * | 2003-10-16 | 2009-07-07 | Alis Corporation | Ion sources, systems and methods |
US8110814B2 (en) | 2003-10-16 | 2012-02-07 | Alis Corporation | Ion sources, systems and methods |
US9159527B2 (en) | 2003-10-16 | 2015-10-13 | Carl Zeiss Microscopy, Llc | Systems and methods for a gas field ionization source |
US7485873B2 (en) * | 2003-10-16 | 2009-02-03 | Alis Corporation | Ion sources, systems and methods |
US7521693B2 (en) * | 2003-10-16 | 2009-04-21 | Alis Corporation | Ion sources, systems and methods |
US7368727B2 (en) * | 2003-10-16 | 2008-05-06 | Alis Technology Corporation | Atomic level ion source and method of manufacture and operation |
US7414243B2 (en) * | 2005-06-07 | 2008-08-19 | Alis Corporation | Transmission ion microscope |
US7511280B2 (en) * | 2003-10-16 | 2009-03-31 | Alis Corporation | Ion sources, systems and methods |
US7786451B2 (en) * | 2003-10-16 | 2010-08-31 | Alis Corporation | Ion sources, systems and methods |
US7321118B2 (en) * | 2005-06-07 | 2008-01-22 | Alis Corporation | Scanning transmission ion microscope |
US7554096B2 (en) * | 2003-10-16 | 2009-06-30 | Alis Corporation | Ion sources, systems and methods |
US7557360B2 (en) * | 2003-10-16 | 2009-07-07 | Alis Corporation | Ion sources, systems and methods |
US7557359B2 (en) * | 2003-10-16 | 2009-07-07 | Alis Corporation | Ion sources, systems and methods |
US7504639B2 (en) * | 2003-10-16 | 2009-03-17 | Alis Corporation | Ion sources, systems and methods |
US7495232B2 (en) * | 2003-10-16 | 2009-02-24 | Alis Corporation | Ion sources, systems and methods |
US7511279B2 (en) * | 2003-10-16 | 2009-03-31 | Alis Corporation | Ion sources, systems and methods |
US7786452B2 (en) * | 2003-10-16 | 2010-08-31 | Alis Corporation | Ion sources, systems and methods |
US7557358B2 (en) | 2003-10-16 | 2009-07-07 | Alis Corporation | Ion sources, systems and methods |
US7518122B2 (en) | 2003-10-16 | 2009-04-14 | Alis Corporation | Ion sources, systems and methods |
US7488952B2 (en) * | 2003-10-16 | 2009-02-10 | Alis Corporation | Ion sources, systems and methods |
US7601953B2 (en) * | 2006-03-20 | 2009-10-13 | Alis Corporation | Systems and methods for a gas field ion microscope |
US7554097B2 (en) * | 2003-10-16 | 2009-06-30 | Alis Corporation | Ion sources, systems and methods |
US20070116373A1 (en) * | 2005-11-23 | 2007-05-24 | Sonosite, Inc. | Multi-resolution adaptive filtering |
WO2007067296A2 (en) * | 2005-12-02 | 2007-06-14 | Alis Corporation | Ion sources, systems and methods |
TW200737267A (en) * | 2006-03-20 | 2007-10-01 | Alis Corp | Systems and methods for a helium ion pump |
US7804068B2 (en) * | 2006-11-15 | 2010-09-28 | Alis Corporation | Determining dopant information |
CN109920713B (en) * | 2019-03-08 | 2020-08-25 | 中国科学院半导体研究所 | Maskless doping-on-demand ion implantation equipment and method |
-
1968
- 1968-06-18 GB GB28944/68A patent/GB1180894A/en not_active Expired
- 1968-06-19 DE DE19681764517 patent/DE1764517B1/en active Pending
-
1969
- 1969-05-07 US US822362A patent/US3602710A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE1764517B1 (en) | 1971-09-23 |
US3602710A (en) | 1971-08-31 |
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