GB1177053A - Apparatus for the production of a Gaseous Plasma - Google Patents
Apparatus for the production of a Gaseous PlasmaInfo
- Publication number
- GB1177053A GB1177053A GB2435/68A GB243568A GB1177053A GB 1177053 A GB1177053 A GB 1177053A GB 2435/68 A GB2435/68 A GB 2435/68A GB 243568 A GB243568 A GB 243568A GB 1177053 A GB1177053 A GB 1177053A
- Authority
- GB
- United Kingdom
- Prior art keywords
- tube
- sheath
- springs
- plasma
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 abstract 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000012809 cooling fluid Substances 0.000 abstract 2
- 229910052802 copper Inorganic materials 0.000 abstract 2
- 239000010949 copper Substances 0.000 abstract 2
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 abstract 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 abstract 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 abstract 1
- 239000004677 Nylon Substances 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 1
- 238000007792 addition Methods 0.000 abstract 1
- 229910052786 argon Inorganic materials 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 239000000460 chlorine Substances 0.000 abstract 1
- 229910052801 chlorine Inorganic materials 0.000 abstract 1
- 230000008602 contraction Effects 0.000 abstract 1
- 239000001307 helium Substances 0.000 abstract 1
- 229910052734 helium Inorganic materials 0.000 abstract 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 abstract 1
- 230000006698 induction Effects 0.000 abstract 1
- YDZQQRWRVYGNER-UHFFFAOYSA-N iron;titanium;trihydrate Chemical compound O.O.O.[Ti].[Fe] YDZQQRWRVYGNER-UHFFFAOYSA-N 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229910001507 metal halide Inorganic materials 0.000 abstract 1
- 150000005309 metal halides Chemical class 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 229920001778 nylon Polymers 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000011236 particulate material Substances 0.000 abstract 1
- -1 polytetrafluoroethylene Polymers 0.000 abstract 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 abstract 1
- 239000004810 polytetrafluoroethylene Substances 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 239000005049 silicon tetrachloride Substances 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Plasma Technology (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
1,177,053. Induction plasma generators. BRITISH TITAN PRODUCTS CO. Ltd. 10 Oct., 1968 [16 Jan., 1968], No. 2435/68. Heading H5H. In plasma-producing apparatus including a gas-confining tube 1, means for effecting an electric discharge within the tube and a surrounding sheath 2 defining a chamber 3 for cooling fluid, resilient springs 21 are provided between the tube 1 and a member 19 retaining the tube within the sheath 2 to permit relative longitudinal expansion and contraction of tube and sheath whilst maintaining a fluid-tight seal therebetween. The retaining member 19 is moved axially along screw rods 22 by wing nuts 24 to exert pressure on a member 20 and thence via the springs 21 on a locating member 8 with three studs 9 locating the tube 1. An annular member 11b at the top of sheath 2 has a cylindrical insert 11aand an 0-ring 11 forms a seal between the insert and the member 8. A gas distribution head 12 formed of two co-operating ports 13, 14, is screwably mounted within member 8 and has a central bore 15 and a supply pipe 16 leading to eight inlet ports 17 via a channel 18. The gas in which the plasma is maintained is supplied via inlet ports 17, giving a vortex type flow. Additional gases or solid particulate material are fed in through bore 15. Current is supplied to a copper coil 25 around tube 1 to maintain the discharge. The plasma gas is argon, helium, nitrogen, oxygen, chlorine, titanium tetrachloride or silicon tetrachloride. Gaseous additions are volatile metal halides such as titanium tetrachloride or a silicon tetrahalide, or material such as a finely-divided titaniferous ore of ilmenite is fed in. Springs 21 may be replaced by pairs of springs 44, 45, separated by an annular pressure member 46, Fig. 2 (not shown). Tube 1 is silica and sheath 2 is nylon, but may have a polytetrafluoroethylene insert 53, Fig. 3 (not shown), adjacent the copper coil. Tube 1 may be conducting with insulating strips therein. The cooling fluid is water.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2435/68A GB1177053A (en) | 1968-01-16 | 1968-01-16 | Apparatus for the production of a Gaseous Plasma |
| US768081A US3596124A (en) | 1968-01-16 | 1968-10-16 | Gas heater for the production of gaseous plasma |
| DE19681811501 DE1811501A1 (en) | 1968-01-16 | 1968-11-28 | Device for the production of a gaseous plasma |
| FR1594388D FR1594388A (en) | 1968-01-16 | 1968-12-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB2435/68A GB1177053A (en) | 1968-01-16 | 1968-01-16 | Apparatus for the production of a Gaseous Plasma |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1177053A true GB1177053A (en) | 1970-01-07 |
Family
ID=9739532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB2435/68A Expired GB1177053A (en) | 1968-01-16 | 1968-01-16 | Apparatus for the production of a Gaseous Plasma |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3596124A (en) |
| DE (1) | DE1811501A1 (en) |
| FR (1) | FR1594388A (en) |
| GB (1) | GB1177053A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6621199B1 (en) * | 2000-01-21 | 2003-09-16 | Vortek Industries Ltd. | High intensity electromagnetic radiation apparatus and method |
| US7781947B2 (en) * | 2004-02-12 | 2010-08-24 | Mattson Technology Canada, Inc. | Apparatus and methods for producing electromagnetic radiation |
-
1968
- 1968-01-16 GB GB2435/68A patent/GB1177053A/en not_active Expired
- 1968-10-16 US US768081A patent/US3596124A/en not_active Expired - Lifetime
- 1968-11-28 DE DE19681811501 patent/DE1811501A1/en active Pending
- 1968-12-11 FR FR1594388D patent/FR1594388A/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1811501B2 (en) | 1970-09-17 |
| FR1594388A (en) | 1970-06-01 |
| DE1811501A1 (en) | 1969-07-31 |
| US3596124A (en) | 1971-07-27 |
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