GB1173978A - Vacuum Deposition Apparatus - Google Patents

Vacuum Deposition Apparatus

Info

Publication number
GB1173978A
GB1173978A GB51692/67A GB5169267A GB1173978A GB 1173978 A GB1173978 A GB 1173978A GB 51692/67 A GB51692/67 A GB 51692/67A GB 5169267 A GB5169267 A GB 5169267A GB 1173978 A GB1173978 A GB 1173978A
Authority
GB
United Kingdom
Prior art keywords
chamber
deposition apparatus
vacuum deposition
vapour deposition
heading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB51692/67A
Other languages
English (en)
Inventor
Dennis Walter Barker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards High Vacuum International Ltd
Original Assignee
Edwards High Vacuum International Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards High Vacuum International Ltd filed Critical Edwards High Vacuum International Ltd
Priority to GB51692/67A priority Critical patent/GB1173978A/en
Priority to US775054A priority patent/US3505974A/en
Priority to NL6816163A priority patent/NL6816163A/xx
Priority to FR1591813D priority patent/FR1591813A/fr
Priority to DE19681808898 priority patent/DE1808898A1/de
Publication of GB1173978A publication Critical patent/GB1173978A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Treatment Of Fiber Materials (AREA)
GB51692/67A 1967-11-14 1967-11-14 Vacuum Deposition Apparatus Expired GB1173978A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB51692/67A GB1173978A (en) 1967-11-14 1967-11-14 Vacuum Deposition Apparatus
US775054A US3505974A (en) 1967-11-14 1968-11-12 Vacuum deposition apparatus
NL6816163A NL6816163A (de) 1967-11-14 1968-11-13
FR1591813D FR1591813A (de) 1967-11-14 1968-11-14
DE19681808898 DE1808898A1 (de) 1967-11-14 1968-11-14 Vorrichtung zur Durchfuehrung von Verfahren im Vakuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB51692/67A GB1173978A (en) 1967-11-14 1967-11-14 Vacuum Deposition Apparatus

Publications (1)

Publication Number Publication Date
GB1173978A true GB1173978A (en) 1969-12-10

Family

ID=10461014

Family Applications (1)

Application Number Title Priority Date Filing Date
GB51692/67A Expired GB1173978A (en) 1967-11-14 1967-11-14 Vacuum Deposition Apparatus

Country Status (5)

Country Link
US (1) US3505974A (de)
DE (1) DE1808898A1 (de)
FR (1) FR1591813A (de)
GB (1) GB1173978A (de)
NL (1) NL6816163A (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2207928A (en) * 1987-08-06 1989-02-15 Leybold Ag Apparatus for coating continuous webs
GB2219008A (en) * 1988-05-24 1989-11-29 Leybold Ag Device for vaporising metals

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5002010A (en) * 1989-10-18 1991-03-26 Varian Associates, Inc. Vacuum vessel
US9103033B2 (en) * 2006-10-13 2015-08-11 Solopower Systems, Inc. Reel-to-reel reaction of precursor film to form solar cell absorber
CN102395700A (zh) * 2009-04-14 2012-03-28 有限公司美国迅力光能公司 应用于真空镀膜的密封磁辊

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1551850A (en) * 1924-08-29 1925-09-01 Georg E Schmidmer Device for metallizing textile fabrics and the like by means of disintegration of cathodes
US1819109A (en) * 1927-10-04 1931-08-18 Warren S D Co Apparatus for treating flexible materials
US2384500A (en) * 1942-07-08 1945-09-11 Crown Cork & Seal Co Apparatus and method of coating
US2622041A (en) * 1948-08-03 1952-12-16 Nat Res Corp Deposition of metal on a nonmetallic support
US2657457A (en) * 1949-09-10 1953-11-03 Ohio Commw Eng Co Continuous metal production and continuous gas plating
FR1051247A (fr) * 1950-09-06 1954-01-14 Pollopas Patents Ltd Perfectionnements apportés aux procédés et dispositifs pour revêtir un support en une matière non-magnétique d'une couche métallique magnétisable
NL111901C (de) * 1950-09-12 1900-01-01
US2971862A (en) * 1957-04-26 1961-02-14 Nat Res Corp Vapor deposition method and apparatus
US3043728A (en) * 1958-03-17 1962-07-10 Nat Res Corp Apparatus and process for metallic vapor coating
US3158507A (en) * 1960-01-11 1964-11-24 Continental Can Co Floating roller seal
US3030912A (en) * 1960-04-15 1962-04-24 Western Electric Co Drive system for advancing a web of plastic material in a metallizing apparatus
US3220378A (en) * 1962-06-15 1965-11-30 Norman A Lefevre Means to monitor operation of a coating and drying apparatus
US3397672A (en) * 1965-11-10 1968-08-20 United States Steel Corp Control system for vapor-deposition coating apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2207928A (en) * 1987-08-06 1989-02-15 Leybold Ag Apparatus for coating continuous webs
GB2207928B (en) * 1987-08-06 1991-07-10 Leybold Ag Apparatus for coating continuous webs
GB2219008A (en) * 1988-05-24 1989-11-29 Leybold Ag Device for vaporising metals
GB2219008B (en) * 1988-05-24 1992-07-29 Leybold Ag Device for vapourising metals

Also Published As

Publication number Publication date
US3505974A (en) 1970-04-14
FR1591813A (de) 1970-05-04
NL6816163A (de) 1969-05-19
DE1808898A1 (de) 1969-07-17

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees