GB1145953A - Improvements in or relating to an electron gun assembly - Google Patents

Improvements in or relating to an electron gun assembly

Info

Publication number
GB1145953A
GB1145953A GB527267A GB527267A GB1145953A GB 1145953 A GB1145953 A GB 1145953A GB 527267 A GB527267 A GB 527267A GB 527267 A GB527267 A GB 527267A GB 1145953 A GB1145953 A GB 1145953A
Authority
GB
United Kingdom
Prior art keywords
chamber
gun
maintained
electron
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB527267A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of GB1145953A publication Critical patent/GB1145953A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Beam Exposure (AREA)

Abstract

1,145,953. Electron guns. GENERAL ELECTRIC CO. 3 Feb., 1967 [15 March, 18661, No. 6272/67. Heading HID. An electron gun assembly-e.g. for electron beam welding, or for recording information on thermoplastic or photographic film 26-includes a gun mounted in a closed chamber 10 having a small aperture 23 in one wall of the chamber located at the cross-over point of the beam, whereby the gun chamber 10 may be maintained at a higher vacuum than the work chamber 35. The cathode disc 12 and supporting tube 13 are centred, supported, and thermally isolated, by the beam-forming electrode 15 and insulating members 14, 37 and 33. The beam is centred by magnetic winding 21, and accelerated and rendered convergent by hemispherical electrode 18, the entrance aperture of which is of reduced diameter to intercept the low density fringes of the beam. The beam converges upon the exit aperture 23, which is 1 to 2 mils in diameter, and is formed in a partition of comparable thickness. The emerging beam is recentred by plate pairs 27, 28 focused by means 29, and deflected over the moving film 26 by means 30, to which deflecting potentials corresponding to the information to be recorded are applied. The work chamber 35 is maintained at a pressure of about 10<SP>-4</SP> torr, while gun chamber 10 is maintained at 10<SP>-7</SP> torr by an ion pump 31, a valve 25 permitting sealing of the chamber 10 when the film or workpiece in chamber 35 is being replaced.
GB527267A 1966-03-15 1967-02-03 Improvements in or relating to an electron gun assembly Expired GB1145953A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US53434766A 1966-03-15 1966-03-15

Publications (1)

Publication Number Publication Date
GB1145953A true GB1145953A (en) 1969-03-19

Family

ID=24129657

Family Applications (1)

Application Number Title Priority Date Filing Date
GB527267A Expired GB1145953A (en) 1966-03-15 1967-02-03 Improvements in or relating to an electron gun assembly

Country Status (2)

Country Link
DE (1) DE1589814A1 (en)
GB (1) GB1145953A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4500809A (en) * 1979-04-09 1985-02-19 Tektronix, Inc. Electron gun having a low capacitance cathode and grid assembly

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4000573A1 (en) * 1990-01-10 1991-07-11 Balzers Hochvakuum ELECTRONIC RADIATOR AND EMISSION CATHODE

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4500809A (en) * 1979-04-09 1985-02-19 Tektronix, Inc. Electron gun having a low capacitance cathode and grid assembly

Also Published As

Publication number Publication date
DE1589814A1 (en) 1970-05-14

Similar Documents

Publication Publication Date Title
GB1233404A (en)
US3436584A (en) Electron emission source with sharply defined emitting area
GB1491585A (en) Rectangular beam laminar flow electron guns
GB982669A (en) Improvements in or relating to electron beam generators
ES8102413A1 (en) Colour display tube.
ES433987A1 (en) Plural beam cathode ray tube including an astigmatic electron lens and self-converging
GB1145953A (en) Improvements in or relating to an electron gun assembly
US2931937A (en) Storage tubes
GB940480A (en) Electron discharge device
GB1318098A (en) Apparatus for producing a fucused electron beam
GB1263043A (en) Ion source generating an ion beam having a substantially uniform radial density
US1943109A (en) Cathode ray sound recording
US3555345A (en) Radiation pickup device incorporating electron multiplication
GB1084015A (en) Flash x-ray tubes
US3731089A (en) Mass spectrometer ion source having means for rapidly expelling ions from the source and method of operation
US3436583A (en) Electron gun
GB1449570A (en) Photoconductive camera tubes
US2907916A (en) Electron gun structure
GB1162732A (en) Electron Beam Column
US3811059A (en) Electron gun device of field emission type
GB979622A (en) Improvements in or relating to electron beam generating systems
US3492525A (en) Sectional hollow cathode discharge apparatus
JP3076176B2 (en) Combined ion source device
GB934153A (en) Improvements in mass spectrometers
GB1325520A (en) Glow discharge electron guns