GB1129488A - A method of melting a rod of crystalline material zone-by-zone - Google Patents

A method of melting a rod of crystalline material zone-by-zone

Info

Publication number
GB1129488A
GB1129488A GB43613/67A GB4361367A GB1129488A GB 1129488 A GB1129488 A GB 1129488A GB 43613/67 A GB43613/67 A GB 43613/67A GB 4361367 A GB4361367 A GB 4361367A GB 1129488 A GB1129488 A GB 1129488A
Authority
GB
United Kingdom
Prior art keywords
carriage
zone
melting
rod
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB43613/67A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of GB1129488A publication Critical patent/GB1129488A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/32—Mechanisms for moving either the charge or the heater
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/106—Seed pulling including sealing means details
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone

Abstract

1,129,488. Floating zone-melting. SIEMENS A.G. 25 Sept., 1967 [24 Sept., 1966], No. 43613/67. Addition to 1044592. Heading BIS. In the zone-melting of a rod of silicon with lateral shifting of the holder for the recrystallized material, the holder shaft passes through an opening in the zone-melting chamber and is shifted by a moving carriage in hermetic contact with the outside of the chamber around the opening, abutment members being provided to limit movement of the carriage. The shaft passes through the carriage in known hermetic manner to enable rotary and axial movement of the shaft to be effected. The other holder may be similarly shifted. The chamber and carriage may have flat engaging surfaces, one of which has an annular groove containing oil or a resilient sealing ring. Alternatively, the chamber and carriage may be separated by concentric annular resilient walls forming an annular space to which oil is fed through the carriage. The shifting may be by linear or eccentric circular movement. The diameter of the recrystallized rod may be smaller, the same, or greater than that of the rod to be recrystallized.
GB43613/67A 1966-09-24 1967-09-25 A method of melting a rod of crystalline material zone-by-zone Expired GB1129488A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES106085A DE1272886B (en) 1966-09-24 1966-09-24 Device for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod

Publications (1)

Publication Number Publication Date
GB1129488A true GB1129488A (en) 1968-10-09

Family

ID=7527116

Family Applications (1)

Application Number Title Priority Date Filing Date
GB43613/67A Expired GB1129488A (en) 1966-09-24 1967-09-25 A method of melting a rod of crystalline material zone-by-zone

Country Status (4)

Country Link
US (1) US3615245A (en)
DE (1) DE1272886B (en)
GB (1) GB1129488A (en)
NL (1) NL145469B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4002523A (en) * 1973-09-12 1977-01-11 Texas Instruments Incorporated Dislocation-free growth of silicon semiconductor crystals with <110> orientation

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DK1595006T3 (en) * 2003-02-11 2006-11-06 Topsil Semiconductor Materials Apparatus and method for making a single crystal rod
US20070216238A1 (en) * 2006-03-16 2007-09-20 Itt Industries Self contained pump electrical equipment power supply integrated into sealing device
CN109727693B (en) * 2019-01-08 2022-09-23 中国工程物理研究院核物理与化学研究所 Connector for I-131 absorption bottle

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE664435C (en) * 1936-09-15 1938-08-26 Otto Keinath Brassiere
DE1061527B (en) * 1953-02-14 1959-07-16 Siemens Ag Process for zone-wise remelting of rods and other elongated workpieces
US3228753A (en) * 1962-07-27 1966-01-11 Texas Instruments Inc Orbital-spin crystal pulling
DE1218404B (en) * 1964-02-01 1966-06-08 Siemens Ag Method for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod
US3359077A (en) * 1964-05-25 1967-12-19 Globe Union Inc Method of growing a crystal
DE1262226B (en) * 1965-04-28 1968-03-07 Siemens Ag Device for crucible-free zone melting with a vacuum chamber
US3370927A (en) * 1966-02-28 1968-02-27 Westinghouse Electric Corp Method of angularly pulling continuous dendritic crystals

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4002523A (en) * 1973-09-12 1977-01-11 Texas Instruments Incorporated Dislocation-free growth of silicon semiconductor crystals with <110> orientation

Also Published As

Publication number Publication date
NL145469B (en) 1975-04-15
US3615245A (en) 1971-10-26
NL6711662A (en) 1968-03-25
DE1272886B (en) 1968-07-18

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