GB1124894A - Improvements in methods of forming film materials - Google Patents

Improvements in methods of forming film materials

Info

Publication number
GB1124894A
GB1124894A GB35674/66A GB3567466A GB1124894A GB 1124894 A GB1124894 A GB 1124894A GB 35674/66 A GB35674/66 A GB 35674/66A GB 3567466 A GB3567466 A GB 3567466A GB 1124894 A GB1124894 A GB 1124894A
Authority
GB
United Kingdom
Prior art keywords
methods
pattern
forming film
film materials
halide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB35674/66A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fairchild Semiconductor Corp
Original Assignee
Fairchild Camera and Instrument Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fairchild Camera and Instrument Corp filed Critical Fairchild Camera and Instrument Corp
Publication of GB1124894A publication Critical patent/GB1124894A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
    • H10W74/43—Encapsulations, e.g. protective coatings characterised by their materials comprising oxides, nitrides or carbides, e.g. ceramics or glasses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Weting (AREA)
  • Surface Treatment Of Glass (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
GB35674/66A 1965-11-26 1966-08-09 Improvements in methods of forming film materials Expired GB1124894A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US50982565A 1965-11-26 1965-11-26

Publications (1)

Publication Number Publication Date
GB1124894A true GB1124894A (en) 1968-08-21

Family

ID=24028228

Family Applications (1)

Application Number Title Priority Date Filing Date
GB35674/66A Expired GB1124894A (en) 1965-11-26 1966-08-09 Improvements in methods of forming film materials

Country Status (10)

Country Link
US (1) USB509825I5 (enExample)
BE (1) BE687592A (enExample)
CH (1) CH480448A (enExample)
DE (1) DE1521255B2 (enExample)
DK (1) DK121522B (enExample)
ES (1) ES333330A1 (enExample)
FR (1) FR1504611A (enExample)
GB (1) GB1124894A (enExample)
NL (1) NL6612593A (enExample)
SE (1) SE319824B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0199114A3 (en) * 1985-04-16 1988-10-19 Schering Aktiengesellschaft Berlin Und Bergkamen Manufacture of metallic structures on inorganic non-condmanufacture of metallic structures on inorganic non-conductors uctors

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH507542A (de) * 1969-02-17 1970-12-31 Liss S A Verfahren zur Herstellung von Zifferblättern
JPS5846193B2 (ja) * 1980-07-15 1983-10-14 株式会社東芝 半導体装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0199114A3 (en) * 1985-04-16 1988-10-19 Schering Aktiengesellschaft Berlin Und Bergkamen Manufacture of metallic structures on inorganic non-condmanufacture of metallic structures on inorganic non-conductors uctors

Also Published As

Publication number Publication date
BE687592A (enExample) 1967-03-01
USB509825I5 (enExample)
ES333330A1 (es) 1967-08-16
NL6612593A (enExample) 1967-05-29
FR1504611A (fr) 1967-12-08
SE319824B (enExample) 1970-01-26
DE1521255A1 (de) 1970-02-12
DE1521255B2 (de) 1971-03-11
CH480448A (de) 1969-10-31
DK121522B (da) 1971-10-25

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