GB1098897A - Improvements relating to stress-responsive birefringent elements - Google Patents

Improvements relating to stress-responsive birefringent elements

Info

Publication number
GB1098897A
GB1098897A GB3091666A GB3091666A GB1098897A GB 1098897 A GB1098897 A GB 1098897A GB 3091666 A GB3091666 A GB 3091666A GB 3091666 A GB3091666 A GB 3091666A GB 1098897 A GB1098897 A GB 1098897A
Authority
GB
United Kingdom
Prior art keywords
plate
stress
members
july
wedge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3091666A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1098897A publication Critical patent/GB1098897A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/18—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge using photoelastic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3083—Birefringent or phase retarding elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Polarising Elements (AREA)

Abstract

1,098,897. Phase retarders. INTERNATIONAL BUSINESS MACHINES CORPORATION. July 8, 1966 [July 8, 1965], No. 30916/66. Heading G2J. A phase retardation device comprises a phase retardation plate 1 having stress-inducible birefringence, pressure apparatus for applying stress to the plate 1 and stress distribution means disposed between said apparatus and the plate 1 to distribute the stress uniformly along an edge of the plate 1. The plate 1 is supported in an aluminium block 11. At two opposite edges of the plate 1 there are contiguously disposed hydraulic members 4 which consist of strips of a cold flow material or closed tubes containing mercury, and which serve as the stress distribution means. Two wedges 16, 20 are also housed within the block 11 with their hypotenuses adjacent. As shown in Fig. 2 upward movement of the wedge 20, on rotation of a screw-threaded shaft 24 by means of a control knob 30, results in movement of the wedge 16 towards the plate 1 so as to compress the members 4 and consequently apply stress to the plate 1. In a simple embodiment Fig. 1 (not shown) pressure is applied directly to the members 4 by means of a thumb screw (9).
GB3091666A 1965-07-08 1966-07-08 Improvements relating to stress-responsive birefringent elements Expired GB1098897A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US47053965A 1965-07-08 1965-07-08

Publications (1)

Publication Number Publication Date
GB1098897A true GB1098897A (en) 1968-01-10

Family

ID=23868012

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3091666A Expired GB1098897A (en) 1965-07-08 1966-07-08 Improvements relating to stress-responsive birefringent elements

Country Status (2)

Country Link
FR (1) FR1485083A (en)
GB (1) GB1098897A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0834753A1 (en) * 1996-09-14 1998-04-08 Carl Zeiss Device comprising a birefringent planar plate and DUV-quarter-wave plate
EP0942300A2 (en) * 1998-03-10 1999-09-15 Carl Zeiss Birefringent plate with stress-induced birefringence
WO2001050161A1 (en) * 1999-12-23 2001-07-12 Asml Us, Inc. CALCIUM FLUORIDE (CaF2) STRESS PLATE AND METHOD OF MAKING THE SAME
US6937394B2 (en) * 2001-04-10 2005-08-30 Carl Zeiss Semiconductor Manufacturing Technologies Ag Device and method for changing the stress-induced birefringence and/or the thickness of an optical component
US6996141B1 (en) * 1999-07-08 2006-02-07 Carl Zeiss Smt Ag Device for reducing the peak power of a pulsed laser light source
US7408616B2 (en) 2003-09-26 2008-08-05 Carl Zeiss Smt Ag Microlithographic exposure method as well as a projection exposure system for carrying out the method
DE102007014587A1 (en) 2007-03-23 2008-09-25 Carl Zeiss Smt Ag Birefringent delay plate arrangement for production of e.g. LCD, has force application bar exhibiting number of twists, where two twists neighboring in longitudinal direction of bar are oriented opposite to each other

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0834753A1 (en) * 1996-09-14 1998-04-08 Carl Zeiss Device comprising a birefringent planar plate and DUV-quarter-wave plate
US6084708A (en) * 1996-09-14 2000-07-04 Carl-Zeiss-Stiftung Double-refracting planar plate arrangement and deep ultraviolet λ/4-plate
EP0942300A2 (en) * 1998-03-10 1999-09-15 Carl Zeiss Birefringent plate with stress-induced birefringence
EP0942300A3 (en) * 1998-03-10 2000-02-23 Carl Zeiss Birefringent plate with stress-induced birefringence
US6141148A (en) * 1998-03-10 2000-10-31 Carl-Zeiss-Stiftung Birefringent plate arrangement with stress birefringence
US6996141B1 (en) * 1999-07-08 2006-02-07 Carl Zeiss Smt Ag Device for reducing the peak power of a pulsed laser light source
US6324003B1 (en) 1999-12-23 2001-11-27 Silicon Valley Group, Inc. Calcium fluoride (CaF2) stress plate and method of making the same
WO2001050161A1 (en) * 1999-12-23 2001-07-12 Asml Us, Inc. CALCIUM FLUORIDE (CaF2) STRESS PLATE AND METHOD OF MAKING THE SAME
US6937394B2 (en) * 2001-04-10 2005-08-30 Carl Zeiss Semiconductor Manufacturing Technologies Ag Device and method for changing the stress-induced birefringence and/or the thickness of an optical component
US7408616B2 (en) 2003-09-26 2008-08-05 Carl Zeiss Smt Ag Microlithographic exposure method as well as a projection exposure system for carrying out the method
US7847921B2 (en) 2003-09-26 2010-12-07 Carl Zeiss Smt Ag Microlithographic exposure method as well as a projection exposure system for carrying out the method
US8767181B2 (en) 2003-09-26 2014-07-01 Carl Zeiss Smt Gmbh Microlithographic exposure method as well as a projection exposure system for carrying out the method
DE102007014587A1 (en) 2007-03-23 2008-09-25 Carl Zeiss Smt Ag Birefringent delay plate arrangement for production of e.g. LCD, has force application bar exhibiting number of twists, where two twists neighboring in longitudinal direction of bar are oriented opposite to each other

Also Published As

Publication number Publication date
FR1485083A (en) 1967-06-16

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