FR1485083A - Variable phase delay blades - Google Patents

Variable phase delay blades

Info

Publication number
FR1485083A
FR1485083A FR06007918A FR06007918A FR1485083A FR 1485083 A FR1485083 A FR 1485083A FR 06007918 A FR06007918 A FR 06007918A FR 06007918 A FR06007918 A FR 06007918A FR 1485083 A FR1485083 A FR 1485083A
Authority
FR
France
Prior art keywords
phase delay
variable phase
delay blades
blades
variable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR06007918A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of FR1485083A publication Critical patent/FR1485083A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/18—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge using photoelastic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3083—Birefringent or phase retarding elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Polarising Elements (AREA)
FR06007918A 1965-07-08 1966-06-22 Variable phase delay blades Expired FR1485083A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US47053965A 1965-07-08 1965-07-08

Publications (1)

Publication Number Publication Date
FR1485083A true FR1485083A (en) 1967-06-16

Family

ID=23868012

Family Applications (1)

Application Number Title Priority Date Filing Date
FR06007918A Expired FR1485083A (en) 1965-07-08 1966-06-22 Variable phase delay blades

Country Status (2)

Country Link
FR (1) FR1485083A (en)
GB (1) GB1098897A (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19637563A1 (en) * 1996-09-14 1998-03-19 Zeiss Carl Fa Birefringent faceplate arrangement and DUV quarter-wave plate
DE19810089A1 (en) * 1998-03-10 1999-09-16 Zeiss Carl Fa Birefringent plate arrangement with stress birefringence
DE19931751A1 (en) * 1999-07-08 2001-01-11 Zeiss Carl Fa Device for reducing the peak power of a pulse laser light source
US6324003B1 (en) 1999-12-23 2001-11-27 Silicon Valley Group, Inc. Calcium fluoride (CaF2) stress plate and method of making the same
US6937394B2 (en) * 2001-04-10 2005-08-30 Carl Zeiss Semiconductor Manufacturing Technologies Ag Device and method for changing the stress-induced birefringence and/or the thickness of an optical component
US7408616B2 (en) 2003-09-26 2008-08-05 Carl Zeiss Smt Ag Microlithographic exposure method as well as a projection exposure system for carrying out the method
DE102007014587A1 (en) 2007-03-23 2008-09-25 Carl Zeiss Smt Ag Birefringent delay plate arrangement for production of e.g. LCD, has force application bar exhibiting number of twists, where two twists neighboring in longitudinal direction of bar are oriented opposite to each other

Also Published As

Publication number Publication date
GB1098897A (en) 1968-01-10

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