GB1095703A - Method of displacing a member in a plane - Google Patents

Method of displacing a member in a plane

Info

Publication number
GB1095703A
GB1095703A GB48996/64A GB4899664A GB1095703A GB 1095703 A GB1095703 A GB 1095703A GB 48996/64 A GB48996/64 A GB 48996/64A GB 4899664 A GB4899664 A GB 4899664A GB 1095703 A GB1095703 A GB 1095703A
Authority
GB
United Kingdom
Prior art keywords
plate
dec
photo
deviation
grating lines
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB48996/64A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1095703A publication Critical patent/GB1095703A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback
    • G05D3/14—Control of position or direction using feedback using an analogue comparing device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Projection-Type Copiers In General (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

1,095,703. Photo-electric position finding. PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd. Dec. 2, 1964 [Dec. 5, 1963], No. 48996/64. Heading H4D. [Also in Division G2] A member (e.g. a photo-sensitive plate 4) may be reproducibly located in a plurality of predetermined positions by securing it to a movable plate 5 having a set of perpendicular grating lines 6, 7 in register with each position, photoelectric means 8 being provided which senses the deviation of a set of grating lines from the corresponding predetermined position and generates control voltages in accordance with the deviation which actuate motors 9, 10 which move the plate 5 to the predetermined position. After exposure the plates 4, 5 are moved to the vicinity of the next desired position and then accurately located as before. This enables plurality of identical images of an object 1 to be produced on plate 4, or for several different images to be located in identical positions on different plates 4.
GB48996/64A 1963-12-05 1964-12-02 Method of displacing a member in a plane Expired GB1095703A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL301413 1963-12-05

Publications (1)

Publication Number Publication Date
GB1095703A true GB1095703A (en) 1967-12-20

Family

ID=19755272

Family Applications (1)

Application Number Title Priority Date Filing Date
GB48996/64A Expired GB1095703A (en) 1963-12-05 1964-12-02 Method of displacing a member in a plane

Country Status (5)

Country Link
US (1) US3354806A (en)
DE (1) DE1235725B (en)
GB (1) GB1095703A (en)
NL (1) NL301413A (en)
SE (1) SE335055B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3541338A (en) * 1967-01-12 1970-11-17 Ibm Positioning system
US3639059A (en) * 1969-02-10 1972-02-01 Matrographics Inc Graphic-processing apparatus
US4445776A (en) * 1980-09-29 1984-05-01 High resistration photomask machine and computerized numerical control system
US3903536A (en) * 1973-11-19 1975-09-02 Gerhard Westerberg Device for generating masks for microcircuits
DE2905636C2 (en) * 1979-02-14 1985-06-20 Censor Patent- Und Versuchs-Anstalt, Vaduz Method for copying masks onto a workpiece
US4346987A (en) * 1980-07-18 1982-08-31 Xerox Corporation Printed circuit board projection imaging system
JP4579376B2 (en) * 2000-06-19 2010-11-10 キヤノン株式会社 Exposure apparatus and device manufacturing method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1208407A (en) * 1958-06-10 1960-02-23 Victor Bouzard Et Ses Fils Automatic control device for photomechanical copying machines, in particular for offset
GB1048048A (en) * 1962-11-20 1966-11-09 Rank Organisation Ltd Improvements in or relating to data processing apparatus

Also Published As

Publication number Publication date
DE1235725B (en) 1967-03-02
SE335055B (en) 1971-05-10
NL301413A (en)
US3354806A (en) 1967-11-28

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