GB1072544A - Improvements relating to the manufacture of semiconductor devices - Google Patents

Improvements relating to the manufacture of semiconductor devices

Info

Publication number
GB1072544A
GB1072544A GB2326465A GB2326465A GB1072544A GB 1072544 A GB1072544 A GB 1072544A GB 2326465 A GB2326465 A GB 2326465A GB 2326465 A GB2326465 A GB 2326465A GB 1072544 A GB1072544 A GB 1072544A
Authority
GB
United Kingdom
Prior art keywords
silicon
hydrogen
oxide
semi
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2326465A
Other languages
English (en)
Inventor
Roy Nuttall
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ferranti International PLC
Original Assignee
Ferranti PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ferranti PLC filed Critical Ferranti PLC
Priority to GB2326465A priority Critical patent/GB1072544A/en
Priority to NL6607606A priority patent/NL6607606A/xx
Publication of GB1072544A publication Critical patent/GB1072544A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76297—Dielectric isolation using EPIC techniques, i.e. epitaxial passivated integrated circuit

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Formation Of Insulating Films (AREA)
GB2326465A 1965-06-01 1965-06-01 Improvements relating to the manufacture of semiconductor devices Expired GB1072544A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB2326465A GB1072544A (en) 1965-06-01 1965-06-01 Improvements relating to the manufacture of semiconductor devices
NL6607606A NL6607606A (cs) 1965-06-01 1966-06-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2326465A GB1072544A (en) 1965-06-01 1965-06-01 Improvements relating to the manufacture of semiconductor devices

Publications (1)

Publication Number Publication Date
GB1072544A true GB1072544A (en) 1967-06-21

Family

ID=10192845

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2326465A Expired GB1072544A (en) 1965-06-01 1965-06-01 Improvements relating to the manufacture of semiconductor devices

Country Status (2)

Country Link
GB (1) GB1072544A (cs)
NL (1) NL6607606A (cs)

Also Published As

Publication number Publication date
NL6607606A (cs) 1966-12-02

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