GB1037804A - A four-layer semiconductor component element - Google Patents
A four-layer semiconductor component elementInfo
- Publication number
- GB1037804A GB1037804A GB24156/63A GB2415663A GB1037804A GB 1037804 A GB1037804 A GB 1037804A GB 24156/63 A GB24156/63 A GB 24156/63A GB 2415663 A GB2415663 A GB 2415663A GB 1037804 A GB1037804 A GB 1037804A
- Authority
- GB
- United Kingdom
- Prior art keywords
- zone
- diffusion
- electrode
- aluminium
- provides
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 6
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract 2
- 239000004411 aluminium Substances 0.000 abstract 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 2
- 229910052782 aluminium Inorganic materials 0.000 abstract 2
- 229910052796 boron Inorganic materials 0.000 abstract 2
- 239000000969 carrier Substances 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 239000005030 aluminium foil Substances 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000011888 foil Substances 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
- 239000002344 surface layer Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/36—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the concentration or distribution of impurities in the bulk material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/228—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a liquid phase, e.g. alloy diffusion processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/74—Thyristor-type devices, e.g. having four-zone regenerative action
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Thyristors (AREA)
Abstract
1,037,804. Solid state devices. SIEMENSSCHUCKERTWERKE A.G. June 18, 1963 [June 19, 1962], No. 24156/63. Heading H1K. In a series PNPN structure the shortest distance, as measured on the surface of the semi-conductor body, between an end zone and the junction between the next two zones is at least 20 times as great as the diffusion length, at the surface of the body, of the minority carriers in the zone adacent the said end-zone. In one embodiment (Fig. 1) a disc of N-type silicon 2 is subjected to surface diffusion of aluminium to produce a P-type zone, and by etching or mechanical grinding a pit 5 is formed which subdivides this zone into two regions 3 and 4. The diffusion process and etch procedures are described in detail in the Specification. An aluminium foil 6 alloyed to the region 3 provides an electrode therefor and a goldantimony annular disc alloyed to the zone 4 provides a further N-type zone 7 and also electrode 8. A further foil 9 containing gold and boron is added to the assembly and provides a further electrode; the assembly is then heated to about 800‹ C. in a furnace. In a further embodiment (Fig. 2, not shown) after the aluminium diffusion step the whole disc is provided with a silicon oxide layer and a ring- shaped region thereof on the body surface is subsequently removed. A boron diffusion is then effected in this oxide free region to reduce the diffusion length of the minority carriers in the surface layer of the zone 4.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DES79974A DE1209660B (en) | 1962-06-19 | 1962-06-19 | Controllable semiconductor component with an essentially monocrystalline semiconductor body and four zones of alternating conductivity type |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1037804A true GB1037804A (en) | 1966-08-03 |
Family
ID=7508574
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB24156/63A Expired GB1037804A (en) | 1962-06-19 | 1963-06-18 | A four-layer semiconductor component element |
Country Status (7)
Country | Link |
---|---|
US (1) | US3392313A (en) |
CH (1) | CH396229A (en) |
DE (1) | DE1209660B (en) |
FR (1) | FR1415513A (en) |
GB (1) | GB1037804A (en) |
NL (1) | NL290680A (en) |
SE (1) | SE301192B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3832709A1 (en) * | 1988-09-27 | 1990-03-29 | Asea Brown Boveri | THYRISTOR |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2959681A (en) * | 1959-06-18 | 1960-11-08 | Fairchild Semiconductor | Semiconductor scanning device |
NL264084A (en) * | 1959-06-23 | |||
DE1103389B (en) * | 1959-10-14 | 1961-03-30 | Siemens Ag | Switching arrangement with a four-layer semiconductor arrangement |
US3175934A (en) * | 1960-01-19 | 1965-03-30 | Hitachi Ltd | Semiconductor switching element and process for producing the same |
DE1133038B (en) * | 1960-05-10 | 1962-07-12 | Siemens Ag | Semiconductor component with an essentially single-crystal semiconductor body and four zones of alternating conductivity type |
NL268728A (en) * | 1960-06-10 | |||
NL129185C (en) * | 1960-06-10 | |||
BE623187A (en) * | 1961-10-06 |
-
0
- NL NL290680D patent/NL290680A/xx unknown
-
1962
- 1962-06-19 DE DES79974A patent/DE1209660B/en active Granted
-
1963
- 1963-02-06 CH CH147963A patent/CH396229A/en unknown
- 1963-06-17 FR FR938371A patent/FR1415513A/en not_active Expired
- 1963-06-18 GB GB24156/63A patent/GB1037804A/en not_active Expired
- 1963-06-19 SE SE6842/63A patent/SE301192B/xx unknown
-
1966
- 1966-12-12 US US601219A patent/US3392313A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CH396229A (en) | 1965-07-31 |
DE1209660B (en) | 1966-01-27 |
FR1415513A (en) | 1965-10-29 |
US3392313A (en) | 1968-07-09 |
DE1209660C2 (en) | 1966-10-13 |
NL290680A (en) | |
SE301192B (en) | 1968-05-27 |
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