GB1005341A - Improvements in and relating to methods and devices for applying coatings by vaporisation - Google Patents

Improvements in and relating to methods and devices for applying coatings by vaporisation

Info

Publication number
GB1005341A
GB1005341A GB1326/63A GB132663A GB1005341A GB 1005341 A GB1005341 A GB 1005341A GB 1326/63 A GB1326/63 A GB 1326/63A GB 132663 A GB132663 A GB 132663A GB 1005341 A GB1005341 A GB 1005341A
Authority
GB
United Kingdom
Prior art keywords
vapour
rays
cylinder
collector
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1326/63A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HERWIG HORN
Original Assignee
HERWIG HORN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HERWIG HORN filed Critical HERWIG HORN
Publication of GB1005341A publication Critical patent/GB1005341A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/935—Gas flow control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB1326/63A 1962-01-16 1963-01-11 Improvements in and relating to methods and devices for applying coatings by vaporisation Expired GB1005341A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT30362A AT231530B (de) 1962-01-16 1962-01-16 Verfahren und Einrichtung zum Aufbringen dünner Schichten durch thermisches Verdampfen

Publications (1)

Publication Number Publication Date
GB1005341A true GB1005341A (en) 1965-09-22

Family

ID=3486966

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1326/63A Expired GB1005341A (en) 1962-01-16 1963-01-11 Improvements in and relating to methods and devices for applying coatings by vaporisation

Country Status (5)

Country Link
US (1) US3333982A (enrdf_load_stackoverflow)
AT (1) AT231530B (enrdf_load_stackoverflow)
CH (1) CH418770A (enrdf_load_stackoverflow)
GB (1) GB1005341A (enrdf_load_stackoverflow)
NL (1) NL287577A (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3569706A (en) * 1965-10-22 1971-03-09 Physics Technology Lab Inc Method and apparatus for generating a continuous beam of neutral atoms
FR2455634A1 (fr) * 1979-05-04 1980-11-28 Bois Daniel Procede et dispositif de depot par evaporation sous vide utilisant un faisceau d'electrons moule et un ecran
CA1197088A (en) * 1983-10-17 1985-11-26 Jerzy A. Dobrowolski Vapour deposition regulating apparatus
US5133286A (en) * 1989-04-14 1992-07-28 Samsung Electro-Mechanics Co., Ltd. Substrate-heating device and boat structure for a vacuum-depositing apparatus
DE4100643C1 (enrdf_load_stackoverflow) * 1991-01-11 1991-10-31 Leybold Ag, 6450 Hanau, De
DE10330401B3 (de) * 2003-07-04 2005-02-24 Applied Films Gmbh & Co. Kg Verfahren und Vorrichtung zum bereichsweisen Auftragen von Trennmitteln
DE102010021547A1 (de) * 2010-05-20 2011-11-24 Konstantinos Fostiropoulos Verfahren und Vorrichtung zur Beschichtung von Substraten im Vakuumdepositionsverfahren
US20120027953A1 (en) * 2010-07-28 2012-02-02 Synos Technology, Inc. Rotating Reactor Assembly for Depositing Film on Substrate
US20150024538A1 (en) * 2013-07-19 2015-01-22 Tsmc Solar Ltd. Vapor dispensing apparatus and method for solar panel
CN115852316B (zh) * 2022-12-06 2024-11-26 合肥综合性国家科学中心能源研究院(安徽省能源实验室) 一种高真空多源热蒸发镀膜设备

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2160981A (en) * 1935-10-19 1939-06-06 O'brien Brian Method and apparatus for producing thin wedges
US2614524A (en) * 1946-08-22 1952-10-21 Rca Corp Capacitor manufacturing evaporation apparatus
US3087838A (en) * 1955-10-05 1963-04-30 Hupp Corp Methods of photoelectric cell manufacture
US2948261A (en) * 1956-12-07 1960-08-09 Western Electric Co Apparatus for producing printed wiring by metal vaporization
US3108560A (en) * 1959-07-15 1963-10-29 Gen Motors Corp Means for assembling printed circuits with components

Also Published As

Publication number Publication date
AT231530B (de) 1964-02-10
US3333982A (en) 1967-08-01
CH418770A (de) 1966-08-15
NL287577A (enrdf_load_stackoverflow)

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