GB0819748D0 - Apparatus for generating an electron beam - Google Patents

Apparatus for generating an electron beam

Info

Publication number
GB0819748D0
GB0819748D0 GB0819748A GB0819748A GB0819748D0 GB 0819748 D0 GB0819748 D0 GB 0819748D0 GB 0819748 A GB0819748 A GB 0819748A GB 0819748 A GB0819748 A GB 0819748A GB 0819748 D0 GB0819748 D0 GB 0819748D0
Authority
GB
United Kingdom
Prior art keywords
generating
electron beam
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0819748A
Other versions
GB2464926A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EX BEAMS Ltd
Original Assignee
EX BEAMS Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EX BEAMS Ltd filed Critical EX BEAMS Ltd
Priority to GB0819748A priority Critical patent/GB2464926A/en
Publication of GB0819748D0 publication Critical patent/GB0819748D0/en
Priority to PCT/IB2009/054709 priority patent/WO2010049866A2/en
Publication of GB2464926A publication Critical patent/GB2464926A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/025—Electron guns using a discharge in a gas or a vapour as electron source
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K5/00—Irradiation devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
GB0819748A 2008-10-28 2008-10-28 Apparatus for generating an electron beam Withdrawn GB2464926A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB0819748A GB2464926A (en) 2008-10-28 2008-10-28 Apparatus for generating an electron beam
PCT/IB2009/054709 WO2010049866A2 (en) 2008-10-28 2009-10-25 Apparatus for generating an electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0819748A GB2464926A (en) 2008-10-28 2008-10-28 Apparatus for generating an electron beam

Publications (2)

Publication Number Publication Date
GB0819748D0 true GB0819748D0 (en) 2008-12-03
GB2464926A GB2464926A (en) 2010-05-05

Family

ID=40133947

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0819748A Withdrawn GB2464926A (en) 2008-10-28 2008-10-28 Apparatus for generating an electron beam

Country Status (2)

Country Link
GB (1) GB2464926A (en)
WO (1) WO2010049866A2 (en)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB875574A (en) * 1958-06-24 1961-08-23 Atomic Energy Commission High voltage pulse transformer and a device for producing a pulsed beam of energetic electrons
US3769600A (en) * 1972-03-24 1973-10-30 Energy Sciences Inc Method of and apparatus for producing energetic charged particle extended dimension beam curtains and pulse producing structures therefor
US3864640A (en) * 1972-11-13 1975-02-04 Willard H Bennett Concentration and guidance of intense relativistic electron beams
US4458180A (en) * 1982-02-18 1984-07-03 Elscint Ltd. Plasma electron source for cold-cathode discharge device or the like
IL69244A0 (en) * 1982-08-09 1983-11-30 Helionetics Inc Plasma cathode system and method for generating an electron beam
FR2623330A1 (en) * 1987-11-17 1989-05-19 Comp Generale Electricite GENERATOR OF ENERGY ELECTRONS IN A GAS
FR2792771B1 (en) * 1999-04-22 2001-07-27 Cit Alcatel PULSE ELECTRON GENERATOR
EP1426997A1 (en) * 2002-12-06 2004-06-09 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik Mbh Field emitter beam source and method for controlling a beam current
NL1023111C2 (en) * 2003-04-04 2004-10-05 Nl Ct Voor Laser Res B V System and method for generating an electron burst.
JP2006066075A (en) * 2004-08-24 2006-03-09 Keyence Corp Optical static eliminator
US7615931B2 (en) * 2005-05-02 2009-11-10 International Technology Center Pulsed dielectric barrier discharge
JP5082050B2 (en) * 2006-09-28 2012-11-28 株式会社日立製作所 Electron beam irradiation device

Also Published As

Publication number Publication date
WO2010049866A3 (en) 2010-06-24
GB2464926A (en) 2010-05-05
WO2010049866A2 (en) 2010-05-06

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)