JP2006066075A - Optical static eliminator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical static eliminator excellent in general applicability at a low cost, whereby energy and the amount of generated soft X-rays can be individually controlled. <P>SOLUTION: This optical static eliminator is equipped with a soft X-ray generator 10 forming a vacuum tube to generate the soft X-rays, a high voltage power supply circuit, and a control part, the soft X-ray generator 10 has an electron source 12 forming a cathode, a target 13 forming an anode, and a grid 14 disposed between the electron source 12 and the target 13, and an window 15 to radiate the soft X-rays generated if electrons emitted from the electron source 12 collides the target 13 to the outside, the high voltage power supply circuit generates an electron generating voltage Vg impressed between the electron source 12 and the grid 14 and an accelerating voltage Va impressed between the grid 14 and the target 13, and the control part individually controls the electron generating voltage Vg generated by the high voltage power supply circuit and the accelerating voltage Va. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a light static eliminator that ionizes a gas by irradiating light into the gas and neutralizes a charged object with the ionized gas.

  There is a method of using a gas such as ionized air as a method of neutralizing a charged object such as a charged glass plate or a plastic plate (neutralizing the charge). Moreover, corona discharge type static eliminators are widely used as static eliminators using such a method. This type of static eliminator ionizes a charged substance by ionizing a gas such as air by corona discharge generated between electrodes to which a high voltage is applied and sending the ionized gas to a charged substance.

  Such a corona discharge type static eliminator has an advantage of a relatively simple structure, but has disadvantages such as electrode wear and dust adsorption due to corona discharge. Gases containing even a small amount of metal oxide fine particles and dust generated by electrode wear cannot be used for static elimination of precision parts such as semiconductors and liquid crystal glass substrates.

  In recent years, as a charge removal apparatus different from the corona discharge type, a light charge removal apparatus that ionizes a gas such as air by light irradiation and is used for charge removal of a charged object has been put into practical use (see, for example, Patent Document 1). This light static eliminator ionizes gas molecules in the atmosphere by irradiating light (soft X-rays or vacuum ultraviolet rays) to the atmosphere near the charged object. In order to ionize gas molecules in the air, light (electromagnetic waves) having energy of several tens eV or more (for example, wavelengths of several angstroms or less) is required. Such light is called soft X-ray or vacuum ultraviolet ray. Yes.

  6A to 6C show the structure of a conventional soft X-ray or vacuum ultraviolet ray generator. In the apparatus shown in FIG. 6A, a DC high voltage (acceleration voltage) 103 is applied between an electron source 101 which is a cathode of a vacuum tube and a target 102 which is an anode. Electrons emitted from the electron source 101 collide with the target 102, and soft X-rays are emitted at this time (braking radiation). The energy (wavelength) of the generated soft X-ray is determined by the material of the target 102 (characteristic X-ray) and the velocity of the colliding electrons, and the electron velocity can be adjusted by changing the acceleration voltage 103. Therefore, the energy (wavelength) of soft X-rays can be adjusted to some extent by changing the acceleration voltage 103.

  The generated soft X-rays (vacuum ultraviolet rays) are radiated to the outside from a window 104 provided on the wall surface of the vacuum tube. Since soft X-rays (vacuum ultraviolet rays) have a very weak force to transmit a substance (solid), beryllium (Be), which is a material having a small atomic weight, is used for the window 104.

In the apparatus shown in FIGS. 6B and 6C, a DC or AC high voltage is applied between the electrodes 111 and 112 of the discharge tube in which a gas such as deuterium, xenon, or argon is sealed. A current flows through the gas by the discharge, and the excited gas molecules emit light, whereby vacuum ultraviolet rays (soft X-rays) are obtained. The generated vacuum ultraviolet rays (soft X-rays) are radiated to the outside from the window 114 provided on the side surface or end surface of the discharge tube. As the material of the window 114, synthetic quartz glass, magnesium fluoride, calcium fluoride, or the like that transmits light with a wavelength of 200 nm or less is used.
Japanese Patent No. 2951477

  The above-described optical static elimination device has an advantage that the above-described problems caused by electrode wear, dust adsorption, and the like do not occur because the electrode is not exposed unlike the corona discharge type static elimination device. However, it has been difficult to control the energy and the amount of generated soft X-rays individually in the conventional light neutralizing device, and improvement has been demanded from the viewpoint of versatility. In addition, cost reduction has been demanded.

  In view of the above-described problems, the present invention has an object to provide a low-cost optical neutralization device that can individually control the energy and amount of generated soft X-rays. To do.

  A first configuration of an optical static elimination device according to the present invention is an optical static elimination device that ionizes a gas by irradiating a gas such as air with soft X-rays, and uses the ionized gas to neutralize a charged object. A soft X-ray generator that is a vacuum tube for generating a line, a high-voltage power supply circuit, and a control unit are provided. The soft X-ray generator includes an electron source that is a cathode, a target that is an anode, and an interval between the electron source and the target. And a window for radiating soft X-rays generated when electrons emitted from the electron source collide with the target, and the high-voltage power supply circuit is provided between the electron source and the grid. Generating an electron generation voltage applied to the grid and an acceleration voltage applied between the grid and the target, and the control unit individually and variably controls the electron generation voltage and the acceleration voltage generated by the high-voltage power supply circuit. It is characterized by.

  According to such a configuration, it is possible to individually control the soft X-ray energy mainly determined by the acceleration voltage and the soft X-ray generation amount mainly determined by the electron generation voltage. As a result, it is possible to efficiently neutralize charged materials having different sizes (areas), for example, a substrate (glass plate) of a liquid crystal display with a single light neutralizing device. That is, by changing the soft X-ray energy to change the distance between the soft X-ray generator and the substrate to be neutralized, it is possible to cope with a single optical neutralization device from a small substrate to a large substrate. Alternatively, by changing the generation amount of soft X-rays, it is possible to cope with the change in the moving speed of the substrate conveyed by the conveyor, that is, the amount of charge removal processing per unit time.

  The second configuration of the optical static elimination apparatus according to the present invention is characterized in that, in the first configuration, the window of the soft X-ray generator also serves as a target. According to such a configuration, it is possible to simplify the structure of the soft X-ray generator and thus the light static eliminator, and to reduce the cost.

  A third configuration of the optical static elimination apparatus according to the present invention is characterized in that, in the first or second configuration, amorphous carbon is used as a material for the window of the soft X-ray generator. Conventionally, as described above, expensive beryllium was used for the window material as a material having a small atomic weight through which soft X-rays can easily pass. can do. Examples of suitable materials other than amorphous carbon include carbon composite, carbon fiber reinforced resin (CFRP), and boron carbide. These materials are also suitable as window materials that also serve as targets.

  According to a fourth configuration of the light static eliminator according to the present invention, in any of the above-described configurations, a carbon nanotube is used as a material for an electron source of the soft X-ray generator. By using carbon nanotubes, the tip of the electron source, which is a cathode, can be formed into a very fine shape, so that electrons can be efficiently emitted.

  According to a fifth configuration of the light static eliminator according to the present invention, in any one of the configurations described above, one or a plurality of visible light sources for irradiating visible light for visualizing a soft X-ray irradiation region is a soft X-ray generator. It is arranged in the vicinity, and the on / off of the visible light source or the emission color thereof is controlled in conjunction with the on / off of the soft X-ray generator. As the visible light source, an LED (light emitting diode) or a laser can be used. For example, when the soft X-ray generator is turned on, the visible light source is controlled to be turned on. Alternatively, the visible light source is controlled to emit red light when the soft X-ray generator is on, and the visible light source is controlled to emit blue light when the soft X-ray generator is off. According to such a configuration, visible light is irradiated in conjunction with invisible soft X-ray irradiation, which can contribute to ensuring safety. Moreover, since the soft X-ray irradiation area can be visually recognized by visible light, the alignment when installing the light static eliminator becomes easy.

  A sixth configuration of the optical static elimination apparatus according to the present invention is characterized in that the soft X-ray generator, the high-voltage power supply circuit, and the control unit are housed in one case and configured integrally. According to such a configuration, the structure is simplified without exposing the high-voltage cable connecting the soft X-ray generator and the high-voltage power supply circuit and the wiring cable connecting the high-voltage power supply circuit and the control unit to the outside. In addition, the cost of the entire apparatus can be reduced.

  The seventh configuration of the optical static elimination device according to the present invention is an optical static elimination device that ionizes a gas by irradiating a gas such as air with soft X-rays, and uses the ionized gas to neutralize a charged object. A soft X-ray generator that is a vacuum tube for generating a line, a high-voltage power supply circuit, one or a plurality of visible light sources, and a control unit, and the soft X-ray generator is an electron source that is a cathode and an anode A target and a window for radiating soft X-rays generated when electrons emitted from the electron source collide with the target, and the high-voltage power supply circuit is applied between the electron source and the target One or a plurality of visible light sources are arranged in the vicinity of the soft X-ray generator and emit visible light for visualizing the soft X-ray irradiation region. Variable control of generated voltage and on / off of soft X-ray generator Conjunction with and controlling the on-off or emission color thereof visible light source.

  As the visible light source, an LED or a laser can be used. For example, when the soft X-ray generator is turned on, the visible light source is controlled to be turned on. Alternatively, the visible light source is controlled to emit red light when the soft X-ray generator is on, and the visible light source is controlled to emit blue light when the soft X-ray generator is off. According to such a configuration, visible light is irradiated in conjunction with invisible soft X-ray irradiation, which can contribute to ensuring safety. Moreover, since the soft X-ray irradiation area can be visually recognized by visible light, the alignment when installing the light static eliminator becomes easy.

  Embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 is a diagram showing a schematic structure of a soft X-ray generator in an optical static elimination device according to an embodiment of the present invention. 1A shows the structure of the first embodiment, and FIG. 1B shows the structure of the second embodiment. As shown in FIG. 1A, an electron source 12 serving as a cathode and a target 13 serving as an anode are opposed to each other in a glass or metal vacuum vessel 11 constituting the soft X-ray generator 10. Is arranged. That is, the electron source 12 is arranged on one end face side of the cylindrical vacuum vessel 11, and the target 13 is arranged on the other end face side. A grid 14, which is a grid electrode, is disposed at a position near the electron source 12 between the electron source 12 and the target 13 so as to face the electron source 12.

  In addition, a window 15 for radiating soft X-rays generated when electrons emitted from the electron source 12 collide with the target 13 are provided near the target 13 on the side surface of the vacuum vessel 11. As the material of the window 15, a substance having a small atomic weight that is easy to transmit soft X-rays having a low penetrating power is used. In this embodiment, amorphous carbon is used. Also, carbon nanotubes are used as the material of the electron source (cathode) 12 so that electrons can be efficiently emitted.

  As shown in FIG. 1A, an electron generation voltage Vg is applied between the electron source 12 and the grid 14, and an acceleration voltage Va is applied between the grid 14 and the target 13. Among the electrons emitted from the electron source 12 by the electron generation voltage Vg, the electrons that have passed through the grid 14 are accelerated by the acceleration voltage Va and travel toward the target 13 as indicated by an arrow line FL. Then, when the electrons collide with the target 13, soft X-rays having energy (wavelength) corresponding to the kinetic energy are generated, and the generated soft X-rays pass through the window 15 as indicated by the arrow line LX to the outside. Radiated.

  The structure of the second embodiment shown in FIG. 1B is different from the structure of the first embodiment shown in FIG. 1A in that the target 13 also serves as a window for emitting soft X-rays to the outside. It is. That is, the target 13 is provided so as to constitute a part (or all) of the end face of the cylindrical vacuum vessel 11, and no window (15 in FIG. 1) is provided on the side surface of the vacuum vessel 11. Soft X-rays generated by electrons colliding with the inner surface 13a of the target 13 pass through the target 13 and are radiated to the outside from the outer surface 13b, as indicated by an arrow line LX. As the material of the target 13 that also serves as a window, amorphous carbon is used as in the window of the first embodiment.

  As described above, in the soft X-ray generator 10 of the optical static elimination device according to the embodiment of the present invention, the grid 14 is provided between the electron source 12 as the cathode and the target 13 as the anode, An electron generation voltage Vg is applied between the grid 14 and an acceleration voltage Va is applied between the grid 14 and the target 13. The electron generation voltage Vg and the acceleration voltage Va are individually variably controlled. This makes it possible to individually control the soft X-ray energy mainly determined by the acceleration voltage Va and the soft X-ray generation amount mainly determined by the electron generation voltage Vg, and has excellent versatility as described below. A light neutralizing device is realized.

  FIG. 2 is a block diagram showing a basic configuration of the optical static elimination apparatus according to the embodiment of the present invention. The high-voltage power supply circuit 21 that supplies the electron generation voltage Vg and the acceleration voltage Va to the soft X-ray generator 10 as described above, and control for individually variably controlling the electron generation voltage Vg and the acceleration voltage Va, which are the generated voltages. A portion 22 is provided. In addition, a light intensity sensor 23 is disposed in the irradiation region of the soft X-ray LX emitted from the soft X-ray generator 10, and the detection signal is input (feedback) to the control unit 22. The control unit 22 is configured using a microcomputer or the like, and incorporates a data storage memory (RAM) 22a in addition to a program storage memory (ROM).

  The control unit 22 compares the detection value corresponding to the intensity of the soft X-ray LX input from the light intensity sensor 23 with a predetermined reference value, and performs feedback control of the electron generated voltage Vg according to the comparison result. By this feedback control, the fluctuation in the intensity of the soft X-ray LX caused by the temperature characteristics of the soft X-ray generator 10 and the change (deterioration) with time is compensated, and the soft X-ray LX having a constant intensity is always obtained.

  FIG. 3 is a diagram illustrating an application example of the individual control of the acceleration voltage and the electron generation voltage in the optical static elimination apparatus according to the embodiment of the present invention. As can be seen by comparing FIG. 3A and FIG. 3B, when the spread angle of the soft X-ray LX emitted from the soft X-ray generator 10 is constant, the soft X-ray generator 10 moves away from the soft X-ray generator 10. It is possible to irradiate soft X-rays LX over such a large area. However, as the distance from the soft X-ray generator 10 increases, the degree to which the energy of the soft X-ray LX is absorbed and attenuated by gas molecules in the air increases. Therefore, when the workpiece WK, which is the object to be neutralized (charged object), is far from the soft X-ray generator 10, the wavelength of the soft X-ray LX generated by increasing the acceleration voltage Va is shorter than when the work WK is near (the transmission power is increased). ) So that the soft X-ray LX can reach far.

  That is, when the surface area of the workpiece WK to be neutralized is small, the acceleration voltage Va is lowered by bringing the workpiece WK closer to the soft X-ray generator 10, and when the surface area of the workpiece WK to be neutralized is large, the workpiece WK is soft X-ray generator. The control unit 22 may be controlled to increase the acceleration voltage Va away from 10. According to such control, for example, in the case of a liquid crystal substrate to be a workpiece WK, liquid crystal substrates of various sizes ranging from those having a small surface area such as liquid crystal for mobile phones to those having a large surface area such as a large flat display are used. It becomes possible to respond.

  When the surface area of the work WK is so large that it does not enter the irradiation area of the soft X-ray LX emitted from the soft X-ray generator 10, the soft X-ray generator 10 (the irradiation area of the soft X-ray LX) and the work WK. Must be moved relative to each other. The example shown in FIG. 3C shows a case where the soft X-ray generator 10 is fixed above the work WK that moves on the roller conveyor RC at a constant speed. Conversely, the work WK may be fixed, and the soft X-ray generator 10 disposed above the work WK may be moved at a constant speed.

  As described above, when relatively moving the soft X-ray generator 10 and the workpiece WK, the higher the relative speed, the greater the amount of charge removal processing per unit time, and thus a larger amount of soft X-ray LX is required. . Therefore, it is only necessary to cause the control unit 22 to execute control for changing the electron generation voltage Vg according to the relative speed. That is, as the relative speed between the soft X-ray generator 10 and the workpiece WK increases, the electron generation voltage Vg is increased to increase the amount of generated electrons, and thus increase the radiation amount of the soft X-ray LX. At this time, since it is not necessary to change the energy (transmitting power) of the soft X-ray LX, the acceleration voltage Va may be controlled to be constant.

  The appropriate adjustment values (target values) of the electron generation voltage Vg and the acceleration voltage Va in the control as described above are the conditions (relative speed between the soft X-ray generator 10 and the workpiece WK, the size of the workpiece WK, etc.). At the same time, it is stored in the memory 22a of the control unit 22 and can be read and used as necessary. For example, target values of a plurality of electron generation voltages Vg corresponding to a plurality of relative speeds or target values of a plurality of acceleration voltages Va corresponding to a plurality of workpiece sizes may be stored as a lookup table.

  In FIG. 3 (c), by moving the soft X-ray generator 10 in the direction (width direction) crossing the moving direction of the work WK (conveying direction of the roller conveyor RC), it is possible to deal with a wide work WK. It becomes possible. Instead of moving the soft X-ray generator 10 in the width direction, a plurality of soft X-ray generators 10 are arranged at regular intervals in the width direction so that static elimination can be performed at once across the width direction of the wide workpiece WK. May be. For example, a plurality of soft X-ray generators 10 are set at regular intervals on a support member such as a curtain rail installed in the width direction above the work WK, and soft X-rays are emitted downward from each soft X-ray generator 10. What is necessary is just to comprise so that it may irradiate.

  FIG. 4 is a schematic view showing an optical static eliminating device according to another embodiment of the present invention. In the light static eliminator of this embodiment, a plurality of visible light sources 31 are provided in the vicinity (periphery) of the soft X-ray generator 10, and the soft X-ray LA emitted from the soft X-ray generator 10 is irradiated in the irradiation region XA. The visible light LV emitted from the visible light source 31 is irradiated to a substantially equal region (contour portion) VA. That is, the irradiation region XA is visualized by superimposing the irradiation region VA of the visible light LV on the irradiation region XA of invisible soft X-rays. By doing so, safety is ensured and alignment when installing the light static elimination device (soft X-ray generator 10) is facilitated.

  In FIG. 4, the irradiation region VA of the visible light LV is larger than the irradiation region XA of the soft X-ray LA, but it is sufficient that the two overlap each other. Further, it is not always necessary to irradiate the entire inside of the irradiation region VA of the visible light LV with the visible light LV, and only the contour portion may be irradiated. Further, the spots of visible light LV emitted from a plurality of visible light sources 31 may be arranged in an annular shape at regular intervals along the contour portion. As the visible light source 31, a red or other light emitting diode (LED) or a semiconductor laser can be used. Of course, one visible light source 31 may be provided on the same optical axis as the soft X-ray generator 10 so that the entire inside of the irradiation area VA is irradiated with visible light LV.

  On / off of the visible light source 31 is controlled by the control unit 22 so as to be interlocked with on / off of the soft X-ray generator 10. Or you may control to change the color of the visible light LV irradiated from the visible light source 31 in conjunction with ON / OFF of the soft X-ray generator 10. For example, when the soft X-ray generator 10 is off and the soft X-ray LX is not irradiated, green visible light LV is emitted from the visible light source 31, and the soft X-ray generator 10 is on and the soft X-ray LX is emitted. It is preferable for ensuring safety if the visible light source 31 emits red visible light LV when it is irradiated.

  FIG. 5 is a block diagram showing a configuration of an optical static elimination apparatus according to another embodiment of the present invention. In this light static eliminator, the above-described visible light source 31, current detection circuit 42, power supply circuit 43, input / output circuit 44, and display 45 added to the basic configuration shown in FIG. ing. The current detection circuit 42 detects the current of the acceleration voltage Va supplied from the high-voltage power supply circuit 21 to the soft X-ray generator 10, and gives a detection signal (detection current) to the control unit 22. The control unit 22 controls the high-voltage power supply circuit 21 so that the input detection current is constant. In addition, when an overcurrent is detected, the control unit 22 executes control to determine that an abnormality has occurred and stop the operation of the high-voltage power supply circuit 21. In FIG. 5, the current detection circuit 42 is configured to detect only the current of the acceleration voltage Va. However, the current of the electron generation voltage Vg is also detected, and the control unit 22 performs the above operation based on the detected current. You may comprise so that the same control may be performed.

  The power supply circuit 43 is a circuit for generating a DC low voltage from a commercial power supply (AC 100 V) and supplying it to the control unit 22 and the high voltage power supply circuit 21. The input / output circuit 44 is a circuit for transferring information by connecting to an external device such as a PLC (programmable logic controller) or a personal computer. As an input signal from an external device, for example, there is an emergency stop signal. Further, as an output signal to an external device, for example, a signal indicating that the soft X-ray generator 10 is turned on and the soft X-ray LX is irradiated, or the soft X-ray generator 10 or the high-voltage power supply circuit 21 is abnormal. And a signal indicating that the replacement time of the soft X-ray generator 10 has been reached. In addition, the replacement time of the soft X-ray generator 10 can be determined from the accumulated operating time or the increase rate of the operating current accompanying the deterioration.

  The display unit 45 is composed of, for example, a 7-segment multi-digit LED display or a fluorescent display tube, and is used to display the ON / OFF state of the soft X-ray generator 10, usage time, power consumption, and the like. Further, it is used to display the output voltage (acceleration voltage Va and electron generation voltage Vg) of the high voltage power supply circuit 21 and to notify the replacement timing of the soft X-ray generator 10. These display data are generated by the control unit 22 and given to the display unit 45.

  In the optical static eliminator of this embodiment, the soft X-ray generator 10, the high-voltage power supply circuit 21 and the control unit 22 are housed in one case 41 and configured integrally. The high-voltage cable that connects the circuit 21 and the wiring cable that connects the high-voltage power supply circuit 21 and the control unit 22 are not exposed to the outside, so that the structure is simplified and the cost of the entire apparatus can be reduced.

  In the configuration of FIG. 5, in addition to the light intensity sensor 23 shown in FIG. 2, an electrostatic sensor 48 and a distance sensor 49 are provided as external sensors, and these detection signals are input to the control unit 22. The electrostatic sensor 48 is disposed in the vicinity of the workpiece WK in order to detect a charged state (neutralized state) of the workpiece WK that is a charged object. When the control unit 22 determines that the workpiece WK is not sufficiently neutralized (static elimination) based on the detection signal of the electrostatic sensor 48, the control unit 22 controls to emit more soft X-rays than the reference value. When it is determined that the state is almost neutralized, control is performed so that soft X-rays less than the reference value are emitted or the soft X-rays of the reference value are maintained.

  The distance sensor 49 is provided in a predetermined portion of the light static eliminator, preferably in the vicinity of the window 15 or 13, and is used for measuring the distance to the workpiece WK. When the control unit 22 determines that the distance to the work WK is larger than the reference distance based on the detection signal of the distance sensor 49, the control unit 22 controls to emit more soft X-rays than the reference value, and the distance to the work WK. Is determined to be smaller than the reference distance, soft X-rays less than the reference value are emitted, or control is performed so as to maintain the reference soft X-rays. The optical static eliminator of the present embodiment can exhibit the optimal static elimination performance corresponding to the situation by the electrostatic sensor 48 and the distance sensor 49.

  The present invention is not limited to the configuration shown in the above embodiment, and various changes or modifications can be made. For example, information exchange with an external device via the input / output circuit 44 may be performed by wired or wireless data communication. Further, as described in the modification of FIG. 3C, in the form in which a plurality of light static eliminators are used side by side, each optical static eliminator is connected to a personal computer which is an external device via the network, and the personal computer May be configured to centrally control a plurality of photostatic devices (such as the acceleration voltage Va and the electron generation voltage Vg of the soft X-ray generator 10).

It is a figure which shows schematic structure of the soft X-ray generator in the optical static elimination apparatus which concerns on the Example of this invention. It is a block diagram which shows the basic composition of the optical static elimination apparatus which concerns on the Example of this invention. It is a figure which shows the application example of the individual control of the acceleration voltage and the electron generation voltage in the optical static elimination apparatus which concerns on the Example of this invention. It is a schematic diagram which shows the optical static elimination apparatus which concerns on another Example of this invention. It is a block diagram which shows the structure of the optical static elimination apparatus which concerns on another Example of this invention. It is a figure which shows the structure of the generator of the conventional soft X ray or a vacuum ultraviolet ray.

Explanation of symbols

10 Soft X-ray generator 11 Vacuum container 12 Electron source (cathode)
13 Target (Anode)
14 Grid 15 Window 21 High-voltage power supply circuit 22 Control unit 31 Visible light source 41 Case Vg Electron generation voltage Va Acceleration voltage Wk Workpiece (charged object)

Claims (7)

An optical static eliminator that irradiates a gas such as air with soft X-rays to ionize the gas, and uses the ionized gas to neutralize the charged object,
A soft X-ray generator that is a vacuum tube for generating the soft X-ray, a high-voltage power supply circuit, and a control unit;
The soft X-ray generator is generated when an electron source that is a cathode, a target that is an anode, a grid disposed between the electron source and the target, and electrons emitted from the electron source collide with the target. A window for emitting soft X-rays to the outside,
The high-voltage power supply circuit generates an electron generation voltage applied between the electron source and the grid, and an acceleration voltage applied between the grid and the target,
The said control part variably controls the said electron generation voltage and the said acceleration voltage which the said high voltage power supply circuit generate | occur | produces, The optical static elimination apparatus characterized by the above-mentioned. The light neutralizing apparatus according to claim 1, wherein the window of the soft X-ray generator also serves as the target. The optical static elimination device according to claim 1 or 2, wherein amorphous carbon is used as a material of the window of the soft X-ray generator. 4. The photostatic discharge device according to claim 1, wherein carbon nanotubes are used as a material of the electron source of the soft X-ray generator. 5. One or a plurality of visible light sources for irradiating visible light for visualizing the soft X-ray irradiation region are disposed in the vicinity of the soft X-ray generator, and interlocked with on / off of the soft X-ray generator. The on-off of the visible light source or the emission color of the visible light source is controlled. 6. The light static eliminator according to claim 1, wherein the soft X-ray generator, the high-voltage power supply circuit, and the control unit are housed in a single case and configured integrally. . An optical static eliminator that irradiates a gas such as air with soft X-rays to ionize the gas and uses the ionized gas to neutralize the charged object,
A soft X-ray generator that is a vacuum tube for generating the soft X-ray, a high-voltage power supply circuit, one or a plurality of visible light sources, and a control unit;
The soft X-ray generator includes an electron source that is a cathode, a target that is an anode, and a window for radiating soft X-rays generated when electrons emitted from the electron source collide with the target. Have
The high-voltage power supply circuit generates a voltage applied between the electron source and the target;
The one or more visible light sources are arranged in the vicinity of the soft X-ray generator and emit visible light for visualizing an irradiation region of the soft X-rays,
The control unit variably controls a voltage generated by the high-voltage power supply circuit, and controls on / off of the visible light source or its emission color in conjunction with on / off of the soft X-ray generator. A characteristic light neutralizing device.

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