KR101454442B1 - Apparatus for removing fine dust and static electricity - Google Patents

Abstract

The present invention relates to an apparatus for removing fine dust and static electricity which ionizes the static electricity of an object and the fine dust around the object by emitting an X-ray and collects the same. For this, the apparatus includes: a flame which receives the object; a source which is installed in the frame and emits an X-ray to ionize the static electricity of the object and fine dust in the frame; and a charged plate which is installed at both sides of the frame and collects the static electricity and fine dust which are ionized by the X-ray emitted from the source. The X-ray emitted from the source is a soft X-ray using nanooxide formed by anodizing as an electron discharge source. The frame comprises an upper frame in a rectangle shape and a lower frame which support the upper frame and has controllable height. The object is mounted on the lower part of the frame. A first transfer unit which moves and fixes the object is formed on the lower part of the frame. The second transfer unit which is combined to the upper part of the source and vertically or horizontally moves and fixes the source is formed on the upper part of the frame. A hoist is formed in the combination part of the second transfer unit and the source to vertically move and fix the source. A duct which provides an air curtain is formed at the edge of the upper part of the frame.

Description

[0001] Apparatus for removing fine dust and static electricity [0002]

The present invention relates to a fine dust and static eliminator, and more particularly, to a fine dust and static eliminator capable of ionizing and collecting static electricity of a target object and fine dust therearound by irradiating an X-ray.

2. Description of the Related Art Generally, an electrostatic eliminator (ionizer) is an apparatus for removing a surface by removing static electricity from the surface of an electrified object, and generates positive and negative ions on a charged object, Or removing static electricity by ionizing the periphery of a target object in order to remove contaminant particles such as harmful substances and odorous substances having minute fine particles and fine particle size in the air. In particular, .

In the semiconductor chip manufacturing process, most of the work is performed in the clean room where high cleanliness is maintained due to its precision, and the clean room removes most harmful particles by using the filter. However, fine noxious particles are still generated by the process of the operator, the production apparatus and the production process, and contaminate the surface of the wafer or various semiconductor manufacturing equipment. In particular, charged objects electrically attract these microparticles, resulting in a production disorder due to defective products.

Such production disturbances are caused by mechanical phenomena and discharge phenomena. The failure due to the dynamic phenomenon is caused by the attraction force or the repulsive force of the static electricity, and it indicates the clogging of the dust, the tangling of the thread, the unevenness of the printing, the contamination of the product, and the failure due to the discharge phenomenon, , Electromagnetic waves, and light emission. The development of static eliminators has been actively pursued due to the increase in the influence of the static electricity in the semiconductor manufacturing process due to the production disorder.

[0003] A conventional electrostatic removing apparatus discloses an air ionization system that ionizes air by a corona discharge to increase the conductivity of air to alleviate the charge of static electricity. Such an electrostatic eliminator may cause white powder or white powder to be attached to the ionizer discharge electrode to prevent wear of the electrode or deterioration of the ionization function due to uneventful adjustment of the discharge electrode and change of the surrounding environment, The decay time is prolonged to cause ion unbalance and the like. Therefore, it is required to carry out periodic maintenance, and there is a problem that the degree of corrosion is worsened due to irregular corrosion and abrasion of a discharge electrode (emitter tip) due to use for a long time, and ionization function is deteriorated.

KR 10-0512129 B1 KR 10-0465346 B9

SUMMARY OF THE INVENTION The present invention has been conceived in order to solve the above-mentioned problems, and it is an object of the present invention to provide a method of ionizing fine dust and static electricity by using a soft x- And to provide a fine dust and static electricity removing device having a structure capable of collecting minute dust and static electricity.

According to an aspect of the present invention, there is provided an apparatus for removing fine dust and static electricity, comprising: a frame for accommodating a target object; a dust source disposed inside the frame for irradiating a fine dust and an X- And a charging plate disposed on both sides of the frame for collecting fine dust and static electricity ionized by the X-rays irradiated from the source, wherein the X-rays irradiated from the source emit nano- Wherein the frame comprises a rectangular upper frame and a lower frame which supports the upper frame and is adjustable in height, the object is seated in a lower portion of the frame, and the object is moved and fixed A first conveying means is provided, And a source is coupled to an upper portion of the source and is provided with second transfer means for moving and fixing the source vertically and horizontally and a joint portion between the second transfer means and the source is provided with a hoist, And a duct for providing an air curtain is provided at an upper edge of the frame.

The electron emission source may be a nanotube formed of anodic oxidation or a nano-oxide composed of a nanopore or a nano-grass.

Also, the electron emission source is a nano-oxide in which at least two of the nanotube, nanopore or nano-glass is mixed.

In addition, the anode substrate used for the anodic oxidation is a valve metal.

The valve metal may be made of any one of titanium (Ti) and aluminum (Al).

The electrolytic solution applied to the anodic oxidation may be a combination of at least one of ammonium fluoride (NH4F), fluorine (F), lactic acid, ethylene glycol, glycerol and distilled water Di And the like.

Meanwhile, a window formed of beryllium (Be) may be formed on the lower end of the source 300. Referring to FIG.

Wherein the window is formed with a coating film formed of any one of tungsten (W), molybdenum (Mo), and copper.

The source is characterized by being either cylindrical or plate-shaped.

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As described above, according to the present invention, the following effects can be expected.

First, it is possible to precisely control the energy of the x-ray photon and the flux (dose) of the photon relative to the amount of static electricity charged, or the amount of dust and contaminant particles to be removed, so that uniform x- There is an advantage that an appropriate amount of ions can be easily controlled.

In addition, it is possible to overcome the change of the discharge phenomenon caused by wear and corrosion of the discharge electrode in the existing corona discharge, to overcome the maintenance due to periodical replacement and cleaning of the worn discharge electrode, It is possible to drastically reduce the time and cost of the system.

In addition, there is an advantage that product defects such as LCD, PDP, AMOLED, and semiconductor can be prevented due to dust generated during maintenance of the discharge electrode in the corona discharge.

BRIEF DESCRIPTION OF DRAWINGS FIG. 1 is a view showing an apparatus for removing fine dust and static electricity according to the present invention; FIG.
2 is a cross-sectional view of the source 300 shown in FIG.
3 is a cross-sectional view of the source 300 shown in FIG. 1 in a plate form.
FIG. 4 is a view showing various types of nano-oxide electron emission sources of the fine dust and static eliminator according to the present invention and current-voltage characteristics thereof in the form of a nanotube.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

As shown in FIG. 1, which is a front view of a fine dust and static eliminator according to the present invention, the present invention comprises a frame 200, a source 300, and a charging plate 400.

The frame 200 accommodates the semiconductor chip and the object 100 pointing to an elecrically charged object. The frame 200 can efficiently remove fine dust and static electricity, thereby increasing the removal efficiency of fine dust and static electricity The upper frame and the lower frame that supports the upper frame and is adjustable in height. In addition, the lower frame has a structure including any one of conventional known telescopic or pneumatic cylinders, thereby making the height adjustable. In addition, a duct 230 for providing an air curtain is provided at an upper edge of the frame 200. The duct 230 is installed on the outer surface of the upper frame to form an air curtain downward, 200 can be improved in efficiency of removing fine dust and static electricity.

The source 300 is installed inside the frame 200 to generate x-rays for ionizing the fine dust inside the frame 200 and the static electricity of the object 100, The source 300 may be either cylindrical or plate-shaped, as shown in FIGS.

Here, the frame 200 may include a first conveying unit 210 and a second conveying unit 220 to further enhance the efficiency of removing fine dust and static electricity inside the frame 200.

The first conveying means 210 is provided at a lower portion of the frame 200 to allow the object 100 to be moved back and forth and fixed. When the source 300 is installed inside the frame 200, the object 100 is moved to the inside of the range of the X-rays irradiated from the source 300 by the first transfer unit 210, . The second transfer means 220 is provided on the upper portion of the frame 200 and is coupled with the upper portion of the source 300 to allow the source 300 to be moved up and down and left and right. This is because the source 300 can be moved up and down to make it accessible to the object 100 to adjust the intensity of the X-ray and to irradiate the X-rays evenly corresponding to the position of the object 100, So as to uniformly irradiate the inside of the frame 200 with air. More specifically, even if the object 100 has a large area and the X-ray is widely irradiated, the object 100 can be stopped and the source 300 can be moved left and right to scan the periphery of the object 100 scanning), it is possible to irradiate the X-rays evenly. Of course, it is well known that the same effect can be obtained by fixing the source 300 and moving the first moving means 210 at a constant speed. As shown in FIG. 3, when the length of the source 300 is made to correspond to the length of the second conveying unit 220, the X-ray is transmitted to the object 300, It is possible to see the effect that the light is uniformly irradiated over the entire area of the light emitting device 100, which is advantageous in utilization. The first conveying means 210 is composed of a conveyor belt which can be moved back and forth along a trajectory and the second conveying means 220 is driven by an electric roller conveyed along a guide rail, A hoist is provided at a coupling portion between the second transfer means 220 and the source 300 so that the source 300 can be vertically moved and fixed at a suitable height It is preferable that the source 300 can irradiate the object 100 with an optimal X-ray dose.

Next, the source 300 will be described in more detail as follows.

The source 300 may be an electron emission source of carbon nanotubes or nano-oxides. Preferably, the X-rays emitted from the source 300 are anodic oxidation Anodic oxidation is a soft X-ray that uses nano-oxide as an electron emission source.

In order to ionize fine dust and static electricity by using a soft X-ray source which uses a nano-oxide formed through anodic oxidation as an electron emission source based on a well-known quantum mechanical field emission principle The structure is described as follows. The source 300 includes a housing 310 for providing a vacuum space for allowing electrons emitted from a cathode to collide with an anode to emit an X-ray, and an electron source 300 for forming an electric field by an externally applied voltage, A window 320 for generating X-rays by transmitting electrons as an anode that accelerates electrons to reach to itself, and a cathode 320 corresponding to the window 320, And a circle 330 as a main constitution. Here, the window 320 is provided at the lower end of the source 300 and is formed of beryllium (Be). A coating film 321 made of tungsten (W), molybdenum or copper may be formed on the window 320.

The electron emission source 330 may be formed of any one of a nanotube, a nanopore or a nano-glass through anodic oxidation, or a nano-oxide mixed with at least two of the three types It is possible to make it in form. Specifically, a metal plate for use as a cold cathode electron emission source is used as an anode in an aqueous solution in which a predetermined amount of water and a solution containing fluorine (F) are mixed in an electrolyte, and platinum (Pt) or silver (Ag) (V) voltage is applied between the two electrodes using a carbon plate, nanotubes, nano-pores, nano-glasses, or a mixture of them are formed on the anode metal plate . As the anode substrate for anodic oxidation for forming the electron emission source 320, a valve metal to which anodization can be applied may be used. Among the valve metals, either titanium (Ti) or aluminum (Al) It is preferable that it is one.

The nanotube, nano-pores, nano-pores, or nano-oxide electron emission sources in the form of nano-pores or nano-pits or combinations thereof can be manufactured at a low cost by a simple anodic oxidation method. In addition, since nano- It is possible to provide a constant current even over time and to improve the durability and stability as an electron emission source because the influence of oxygen remaining in the housing of the housing is insignificant and the current of the electron emission source is not reduced due to oxidation. Here, the electrolytic solution applied to the anodic oxidation is a combination of at least one of ammonium fluoride (NH4F), fluorine (F), lactic acid, ethylene glycol, glycerol and distilled water Di And more specifically NH4F and F, Lactic Acid, and Lactic Acid such as NH4F / EG (Ethylene Glycol) / DI (distilled water) or F (fluorine) / G (glycerol) / DI (distilled water) It is needless to say that various recipe electrolytes can be used which can be formed by arbitrarily adjusting the amounts of EG, glycerol, DI (distilled water) and the like as main raw materials. For example, the shape and the current-voltage characteristics of a nano-oxide electron emitter fabricated by applying a constant voltage to an electrolyte prepared by applying NH4F (0.5 wt%) / EG (20 ml) / DI (10 vol%) As shown in FIG. 4, it can be seen that it is possible to sufficiently supply a current of 2,000 μA or less at a voltage of 5 kV or less, which is required for a nano-oxide electron emission source in order to ionize fine dust and static electricity, 300) will be able to generate soft X-rays that are low energy X-rays below 20 keV. Since the soft X-rays are absorbed rather than being transmitted through fine dust, they are strong in ionizing the material and can be easily shielded as compared with high energy, so that they can contribute to thinning of the frame 200. In the experiment of the present inventor It was possible to achieve complete shielding with a steel plate of less than 1 mm.

Next, the charging plate 400 is installed on both sides of the frame 200 so as to face each other and have polarities different from each other, and fine dust and static electricity ionized by the soft X-rays irradiated from the source 300 Collecting.

The process of removing fine dust and static electricity in the frame 200 by the source 300 and the charging plate 400 will be described below. When photons of the soft X-rays irradiated from the source 300 collide with air molecules inside the frame 200, inelastic scattering occurs and electrons of the air molecules are released out of the orbit to become positive ions. In air or combined with other air molecules to become anions. That is, ions of an opposite polarity to the charge of the object 100 move among the ions generated by local ionization of the surrounding air by the soft X-rays irradiated toward the object 100, The static electricity of the object 100 can be removed by being neutralized by being combined with the electric charge of the object 100. [

In addition, by irradiating and ionizing soft X-rays on the contaminant particles such as harmful substances and odor belonging to fine dust in the frame 200 and collecting the X-rays on the charging plate 400, fine dust inside the frame 200 Can be removed.

As described above, the present invention is based on the principle of quantum mechanical field emission, ionizing fine dust and static electricity using a soft X-ray, which uses nano-oxide formed through anodic oxidation as an electron emission source, and collecting ionized fine dust and static electricity And it is a matter of course that various modifications are possible to those having ordinary skill in the art.

100: object 200: frame
210: first conveying means 220: second conveying means
230: duct 300: source
310: housing 320: window
321: Coating film 330: electron emission source
400: charge plate

Claims (12)

A frame (200) for receiving the object (100);
A source 300 disposed inside the frame 200 and irradiated with X-rays for ionizing static electricity of the fine dust and the object 100 inside the frame 200; And
And a charging plate 400 installed at both sides of the frame 200 and collecting fine dust and static electricity ionized by X-rays irradiated from the source 300,
The X-ray irradiated from the source 300 is a soft X-ray having the nano-oxide formed through anodic oxidation as an electron emission source 330,
The frame 200 includes a rectangular upper frame and a lower frame that supports the upper frame and is adjustable in height,
A first conveying unit 210 is provided below the frame 200 to allow the object 100 to move and fix the object 100,
A second conveying unit 220 coupled to an upper portion of the source 300 and capable of moving and fixing the source 300 up and down and right and left is provided at an upper portion of the frame 200,
A hoist is provided at a coupling portion between the second transfer means 220 and the source 300 to allow the source 300 to move up and down,
And a duct (230) for providing an air curtain is provided at an upper edge of the frame (200). The method according to claim 1,
The electron emitter 330 may be formed of a metal,
Wherein the substrate is a nano-oxide made of any one of a nanotube, a nanopore, or a nano-grass formed through anodic oxidation. 3. The method of claim 2,
The electron emitter 330 may be formed of a metal,
Wherein the nanotube is a nano-oxide mixed with at least two of the nanotube, nanopore or nano-glass. The method according to claim 1,
Wherein the anode substrate applied to the anodic oxidation is a valve metal. 5. The method of claim 4,
Wherein the valve metal is made of one of titanium (Ti) and aluminum (Al). The method of claim 1, wherein
The electrolytic solution applied to the anodic oxidation is formed by a combination of at least one of ammonium fluoride (NH4F), fluorine (F), lactic acid, ethylene glycol, glycerol and distilled water Di And the static electricity removing device. The method according to claim 1,
Wherein the source (300) is provided with a window (320) formed of beryllium (Be) on the lower end thereof. 8. The method of claim 7,
Wherein the window (320) is formed with a coating film (321) made of any one of tungsten (W), molybdenum or copper. The method according to claim 1,
Wherein the source (300) comprises one of a cylindrical shape and a plate shape . delete delete delete

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