GB0714025D0 - Plasma reactor - Google Patents

Plasma reactor

Info

Publication number
GB0714025D0
GB0714025D0 GBGB0714025.4A GB0714025A GB0714025D0 GB 0714025 D0 GB0714025 D0 GB 0714025D0 GB 0714025 A GB0714025 A GB 0714025A GB 0714025 D0 GB0714025 D0 GB 0714025D0
Authority
GB
United Kingdom
Prior art keywords
plasma reactor
reactor
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB0714025.4A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GBGB0714025.4A priority Critical patent/GB0714025D0/en
Publication of GB0714025D0 publication Critical patent/GB0714025D0/en
Priority to CN201210392266.6A priority patent/CN103021779B/zh
Priority to CN200880025328.1A priority patent/CN101755322B/zh
Priority to KR1020107001116A priority patent/KR101490540B1/ko
Priority to PCT/GB2008/050569 priority patent/WO2009010792A2/en
Priority to DE112008001790T priority patent/DE112008001790T5/de
Priority to TW097127521A priority patent/TWI433718B/zh
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32834—Exhausting
    • H01J37/32844—Treating effluent gases
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/10—Treatment of gases
    • H05H2245/17—Exhaust gases
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Treating Waste Gases (AREA)
  • Plasma Technology (AREA)
GBGB0714025.4A 2007-07-19 2007-07-19 Plasma reactor Ceased GB0714025D0 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
GBGB0714025.4A GB0714025D0 (en) 2007-07-19 2007-07-19 Plasma reactor
CN201210392266.6A CN103021779B (zh) 2007-07-19 2008-07-14 等离子体反应器
CN200880025328.1A CN101755322B (zh) 2007-07-19 2008-07-14 等离子体反应器
KR1020107001116A KR101490540B1 (ko) 2007-07-19 2008-07-14 플라즈마 반응기
PCT/GB2008/050569 WO2009010792A2 (en) 2007-07-19 2008-07-14 Plasma reactor
DE112008001790T DE112008001790T5 (de) 2007-07-19 2008-07-14 Plasmareaktor
TW097127521A TWI433718B (zh) 2007-07-19 2008-07-18 電漿反應器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0714025.4A GB0714025D0 (en) 2007-07-19 2007-07-19 Plasma reactor

Publications (1)

Publication Number Publication Date
GB0714025D0 true GB0714025D0 (en) 2007-08-29

Family

ID=38476563

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB0714025.4A Ceased GB0714025D0 (en) 2007-07-19 2007-07-19 Plasma reactor

Country Status (6)

Country Link
KR (1) KR101490540B1 (ko)
CN (2) CN103021779B (ko)
DE (1) DE112008001790T5 (ko)
GB (1) GB0714025D0 (ko)
TW (1) TWI433718B (ko)
WO (1) WO2009010792A2 (ko)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102125818B (zh) * 2010-12-31 2013-12-11 武汉凯迪工程技术研究总院有限公司 用等离子体制取高温、富含活性粒子水蒸汽的方法及装置
GB2493752A (en) 2011-08-17 2013-02-20 Edwards Ltd Apparatus for treating a gas stream
US9240308B2 (en) * 2014-03-06 2016-01-19 Applied Materials, Inc. Hall effect enhanced capacitively coupled plasma source, an abatement system, and vacuum processing system
GB2534890A (en) * 2015-02-03 2016-08-10 Edwards Ltd Thermal plasma torch
GB2536905B (en) 2015-03-30 2020-01-08 Edwards Ltd Radiant burner
CN113371679A (zh) * 2021-05-27 2021-09-10 中国矿业大学 一种二氧化碳-甲烷等离子高温重整装置及高温重整方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW442842B (en) * 1996-12-31 2001-06-23 Atmi Ecosys Corp Effluent gas stream treatment system for oxidation treatment of semiconductor manufacturing effluent gases
US5846275A (en) * 1996-12-31 1998-12-08 Atmi Ecosys Corporation Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system
US6617538B1 (en) * 2000-03-31 2003-09-09 Imad Mahawili Rotating arc plasma jet and method of use for chemical synthesis and chemical by-products abatements
JP2005205330A (ja) 2004-01-23 2005-08-04 Kanken Techno Co Ltd パーフルオロコンパウンド排ガスのプラズマ分解処理方法および該方法を利用したプラズマ分解処理装置並びにこのプラズマ分解処理装置を搭載した排ガス処理システム
GB0416385D0 (en) * 2004-07-22 2004-08-25 Boc Group Plc Gas abatement
GB0502495D0 (en) * 2005-02-07 2005-03-16 Boc Group Plc Ejector pump

Also Published As

Publication number Publication date
WO2009010792A2 (en) 2009-01-22
CN103021779B (zh) 2016-08-10
WO2009010792A3 (en) 2009-03-12
KR20100037609A (ko) 2010-04-09
CN103021779A (zh) 2013-04-03
TWI433718B (zh) 2014-04-11
CN101755322A (zh) 2010-06-23
DE112008001790T5 (de) 2010-04-29
KR101490540B1 (ko) 2015-02-05
CN101755322B (zh) 2014-02-19
TW200914124A (en) 2009-04-01

Similar Documents

Publication Publication Date Title
IL249525A0 (en) Catalyst-hydrogen reagent
EP2069047A4 (en) PLASMA REACTOR
TWI346359B (en) Hybrid plasma reactor
EP2213618A4 (en) PLASMA REACTOR
GB0902784D0 (en) Plasma reactor
EP2413336A4 (en) Reactor
GB0718224D0 (en) E;ectricalsupply revies
HK1142844A1 (en) Showerhead
EP2495743A4 (en) Reactor
EP2428968A4 (en) Reactor
EP2450919A4 (en) Reactor
EP2131390A4 (en) PLASMA PROCESSOR
GB0700074D0 (en) process
EP2152631A4 (en) NICKEL LATERITE PROCEDURE
EP2257136A4 (en) PLASMA GENERATOR
GB201000729D0 (en) Plasma depositon apparatus
EP1989288A4 (en) MRD REACTORS
GB0714025D0 (en) Plasma reactor
GB0700878D0 (en) Process
ZA201100741B (en) Electrobiochemical reactor
EP2300150A4 (en) REACTOR
EP2256754A4 (en) REACTOR
PL382736A1 (pl) Reaktor plazmowy
GB0819359D0 (en) Plasma torch
EP2030209A4 (en) REACTOR SHIELD

Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)