GB0523991D0 - Methods of manufacture of an optical element having an optical surface - Google Patents

Methods of manufacture of an optical element having an optical surface

Info

Publication number
GB0523991D0
GB0523991D0 GB0523991A GB0523991A GB0523991D0 GB 0523991 D0 GB0523991 D0 GB 0523991D0 GB 0523991 A GB0523991 A GB 0523991A GB 0523991 A GB0523991 A GB 0523991A GB 0523991 D0 GB0523991 D0 GB 0523991D0
Authority
GB
United Kingdom
Prior art keywords
manufacture
methods
optical
optical element
optical surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0523991A
Other versions
GB2421302A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Publication of GB0523991D0 publication Critical patent/GB0523991D0/en
Publication of GB2421302A publication Critical patent/GB2421302A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/025—Testing optical properties by measuring geometrical properties or aberrations by determining the shape of the object to be tested
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB0523991A 2004-12-14 2005-11-25 Methods of measuring and manufacturing an optical element having an optical surface Withdrawn GB2421302A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US63543504P 2004-12-14 2004-12-14

Publications (2)

Publication Number Publication Date
GB0523991D0 true GB0523991D0 (en) 2006-01-04
GB2421302A GB2421302A (en) 2006-06-21

Family

ID=35601178

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0523991A Withdrawn GB2421302A (en) 2004-12-14 2005-11-25 Methods of measuring and manufacturing an optical element having an optical surface

Country Status (1)

Country Link
GB (1) GB2421302A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011032572A1 (en) * 2009-09-18 2011-03-24 Carl Zeiss Smt Gmbh Method of measuring a shape of an optical surface and interferometric measuring device
GB2474893A (en) * 2009-10-30 2011-05-04 Taylor Hobson Ltd Surface measurement instrument and method
CN102288132B (en) * 2011-05-18 2013-04-17 中国科学院长春光学精密机械与物理研究所 Method for measuring vertex curvature radius deviation of aspheric surface by using laser tracking instrument
CN105466351B (en) * 2015-11-17 2018-02-09 北京理工大学 For detecting the refraction-reflection type part compensator and design method of convex aspheric surface face shape error

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU523274A1 (en) * 1974-07-05 1976-07-30 Московское высшее техническое училище имени Баумана Interferometer to control the quality of convex hyperbolic mirrors of a cassegrain telescope
SU953451A2 (en) * 1979-10-11 1982-08-23 Московское Ордена Ленина, Ордена Октябрьской Революции И Ордена Трудового Красного Знамени Высшее Техническое Училище Им. Н.Э.Баумана Interferrometer for checking spherical surfaces
SU1247809A1 (en) * 1984-12-27 1986-07-30 МВТУ им.Н.Э.Баумана Compensating lens for checking shape of concave aspherical surfaces
US4697927A (en) * 1985-11-29 1987-10-06 Kabushiki Kaisha Toshiba Method and apparatus for measuring a forming error of an object
GB2404014B (en) * 2003-07-18 2006-06-28 Taylor Hobson Ltd Surface profiling method and apparatus

Also Published As

Publication number Publication date
GB2421302A (en) 2006-06-21

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)