GB0427160D0 - Method for closing perforated membranes - Google Patents

Method for closing perforated membranes

Info

Publication number
GB0427160D0
GB0427160D0 GBGB0427160.7A GB0427160A GB0427160D0 GB 0427160 D0 GB0427160 D0 GB 0427160D0 GB 0427160 A GB0427160 A GB 0427160A GB 0427160 D0 GB0427160 D0 GB 0427160D0
Authority
GB
United Kingdom
Prior art keywords
perforated membranes
closing
closing perforated
membranes
perforated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GBGB0427160.7A
Other versions
GB2415828A (en
GB2415828B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of GB0427160D0 publication Critical patent/GB0427160D0/en
Publication of GB2415828A publication Critical patent/GB2415828A/en
Application granted granted Critical
Publication of GB2415828B publication Critical patent/GB2415828B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00523—Etching material
    • B81C1/00547—Etching processes not provided for in groups B81C1/00531 - B81C1/00539
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/024—Special manufacturing steps or sacrificial layers or layer structures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0111—Bulk micromachining
    • B81C2201/0115—Porous silicon

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
GB0427160A 2004-03-30 2004-12-10 Method for closing perforated membranes Expired - Fee Related GB2415828B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102004015442A DE102004015442A1 (en) 2004-03-30 2004-03-30 Method of closing perforated membranes

Publications (3)

Publication Number Publication Date
GB0427160D0 true GB0427160D0 (en) 2005-01-12
GB2415828A GB2415828A (en) 2006-01-04
GB2415828B GB2415828B (en) 2006-06-28

Family

ID=34072186

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0427160A Expired - Fee Related GB2415828B (en) 2004-03-30 2004-12-10 Method for closing perforated membranes

Country Status (4)

Country Link
JP (1) JP2005279928A (en)
DE (1) DE102004015442A1 (en)
FR (1) FR2868412A1 (en)
GB (1) GB2415828B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017210459A1 (en) * 2017-06-22 2018-12-27 Robert Bosch Gmbh Micromechanical device with a first cavity and a second cavity

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0750789B2 (en) * 1986-07-18 1995-05-31 日産自動車株式会社 Method for manufacturing semiconductor pressure converter
DE19961578A1 (en) * 1999-12-21 2001-06-28 Bosch Gmbh Robert Sensor comprises a micromechanical structure based on silicon integrated in the sensor chamber of a base wafer and a cover made of a transparent deposition layer and a sealing layer
DE10053326A1 (en) * 2000-10-27 2002-05-08 Bosch Gmbh Robert Micro-mechanical component for sensing dew point contains membrane and porous material thermal insulating zone membrane support
FI112644B (en) * 2000-11-10 2003-12-31 Vaisala Oyj Surface micromechanical absolute pressure sensor and method of manufacture thereof
DE10064494A1 (en) * 2000-12-22 2002-07-04 Bosch Gmbh Robert Method for producing a semiconductor component and a semiconductor component produced by the method, the semiconductor component in particular having a movable mass
DE10065026A1 (en) * 2000-12-23 2002-07-04 Bosch Gmbh Robert Micromechanical component and corresponding manufacturing method
DE10117486A1 (en) * 2001-04-07 2002-10-17 Bosch Gmbh Robert Method for producing a semiconductor component and a semiconductor component produced using the method
GR1004106B (en) * 2002-01-24 2003-01-13 Εκεφε "Δημοκριτος" Ινστιτουτο Μικροηλεκτρονικης Low power silicon thermal sensors and microfluidic devices based on the use of porous silicon sealed air cavity technology or microchannel technology

Also Published As

Publication number Publication date
GB2415828A (en) 2006-01-04
FR2868412A1 (en) 2005-10-07
GB2415828B (en) 2006-06-28
JP2005279928A (en) 2005-10-13
DE102004015442A1 (en) 2005-10-20

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20121210