GB0229356D0 - Vacuum pumping arrangement - Google Patents

Vacuum pumping arrangement

Info

Publication number
GB0229356D0
GB0229356D0 GBGB0229356.1A GB0229356A GB0229356D0 GB 0229356 D0 GB0229356 D0 GB 0229356D0 GB 0229356 A GB0229356 A GB 0229356A GB 0229356 D0 GB0229356 D0 GB 0229356D0
Authority
GB
United Kingdom
Prior art keywords
pumping mechanism
drive shaft
vacuum pumping
pumping arrangement
molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB0229356.1A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9949817&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=GB0229356(D0) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Priority to GBGB0229356.1A priority Critical patent/GB0229356D0/en
Publication of GB0229356D0 publication Critical patent/GB0229356D0/en
Priority to AU2003295101A priority patent/AU2003295101A1/en
Priority to EP03786101A priority patent/EP1576292B1/fr
Priority to PCT/GB2003/005375 priority patent/WO2004055376A2/fr
Priority to US10/536,779 priority patent/US20060140794A1/en
Priority to JP2004559873A priority patent/JP2006509952A/ja
Priority to DE60319585T priority patent/DE60319585T2/de
Priority to AT03786101T priority patent/ATE388328T1/de
Priority to TW092135769A priority patent/TW200417690A/zh
Ceased legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/05Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056Bearings
    • F04D29/058Bearings magnetic; electromagnetic
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08Centrifugal pumps
    • F04D17/16Centrifugal pumps for displacing without appreciable compression
    • F04D17/168Pumps specially adapted to produce a vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00Other rotary non-positive-displacement pumps
    • F04D23/008Regenerative pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Electrophonic Musical Instruments (AREA)
GBGB0229356.1A 2002-12-17 2002-12-17 Vacuum pumping arrangement Ceased GB0229356D0 (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
GBGB0229356.1A GB0229356D0 (en) 2002-12-17 2002-12-17 Vacuum pumping arrangement
AT03786101T ATE388328T1 (de) 2002-12-17 2003-12-09 Vakuumpumpe
DE60319585T DE60319585T2 (de) 2002-12-17 2003-12-09 Vakuumpumpe
PCT/GB2003/005375 WO2004055376A2 (fr) 2002-12-17 2003-12-09 Dispositif de pompage sous vide
EP03786101A EP1576292B1 (fr) 2002-12-17 2003-12-09 Dispositif de pompage sous vide
AU2003295101A AU2003295101A1 (en) 2002-12-17 2003-12-09 Vacuum pumping arrangement
US10/536,779 US20060140794A1 (en) 2002-12-17 2003-12-09 Vacuum pumping arrangement
JP2004559873A JP2006509952A (ja) 2002-12-17 2003-12-09 真空ポンプ排出装置
TW092135769A TW200417690A (en) 2002-12-17 2003-12-17 Vacuum pumping arrangement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0229356.1A GB0229356D0 (en) 2002-12-17 2002-12-17 Vacuum pumping arrangement

Publications (1)

Publication Number Publication Date
GB0229356D0 true GB0229356D0 (en) 2003-01-22

Family

ID=9949817

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB0229356.1A Ceased GB0229356D0 (en) 2002-12-17 2002-12-17 Vacuum pumping arrangement

Country Status (9)

Country Link
US (1) US20060140794A1 (fr)
EP (1) EP1576292B1 (fr)
JP (1) JP2006509952A (fr)
AT (1) ATE388328T1 (fr)
AU (1) AU2003295101A1 (fr)
DE (1) DE60319585T2 (fr)
GB (1) GB0229356D0 (fr)
TW (1) TW200417690A (fr)
WO (1) WO2004055376A2 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE102008035891A1 (de) * 2008-07-31 2010-02-04 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102009021620B4 (de) 2009-05-16 2021-07-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102009021642B4 (de) 2009-05-16 2021-07-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102009055888A1 (de) * 2009-11-26 2011-06-01 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102010019940B4 (de) 2010-05-08 2021-09-23 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
JP5763660B2 (ja) * 2010-09-28 2015-08-12 エドワーズ株式会社 排気ポンプ
DE102011112691A1 (de) * 2011-09-05 2013-03-07 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102012003680A1 (de) * 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE202015007985U1 (de) * 2015-11-19 2017-02-21 Leybold Gmbh Vorrichtung zum Speichern kinetischer Energie
US11519419B2 (en) * 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2349033C3 (de) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
JPH0646036B2 (ja) * 1982-11-19 1994-06-15 セイコー電子工業株式会社 軸流分子ポンプ
US4767265A (en) * 1983-10-07 1988-08-30 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
DE4427154A1 (de) * 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Reibungspumpe mit Magnetlagerung
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
FR2783883B1 (fr) * 1998-09-10 2000-11-10 Cit Alcatel Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux
DE19913593B4 (de) * 1999-03-24 2004-09-23 Ilmvac Gmbh Gesteuerter Pumpstand
DE19915983A1 (de) * 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gaslagerung
DE19929519A1 (de) * 1999-06-28 2001-01-04 Pfeiffer Vacuum Gmbh Verfahren zum Betrieb einer Mehrkammer-Vakuumanlage
DE10043783A1 (de) * 2000-09-06 2002-03-14 Leybold Vakuum Gmbh Verfahren und Vorrichtung zur Regelung des Vakuums in einer Kammer
EP1234982B1 (fr) * 2001-02-22 2003-12-03 VARIAN S.p.A. Pompe à vide
GB0114417D0 (en) * 2001-06-13 2001-08-08 Boc Group Plc Lubricating systems for regenerative vacuum pumps
FR2859250B1 (fr) * 2003-08-29 2005-11-11 Cit Alcatel Pompe a vide

Also Published As

Publication number Publication date
WO2004055376A2 (fr) 2004-07-01
AU2003295101A1 (en) 2004-07-09
DE60319585T2 (de) 2009-03-26
EP1576292B1 (fr) 2008-03-05
JP2006509952A (ja) 2006-03-23
EP1576292A2 (fr) 2005-09-21
TW200417690A (en) 2004-09-16
US20060140794A1 (en) 2006-06-29
ATE388328T1 (de) 2008-03-15
DE60319585D1 (de) 2008-04-17
WO2004055376A3 (fr) 2004-08-05

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)