GB0216620D0 - Detection method and apparatus - Google Patents
Detection method and apparatusInfo
- Publication number
- GB0216620D0 GB0216620D0 GB0216620A GB0216620A GB0216620D0 GB 0216620 D0 GB0216620 D0 GB 0216620D0 GB 0216620 A GB0216620 A GB 0216620A GB 0216620 A GB0216620 A GB 0216620A GB 0216620 D0 GB0216620 D0 GB 0216620D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- detection method
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0216620A GB0216620D0 (en) | 2002-07-17 | 2002-07-17 | Detection method and apparatus |
AU2003255718A AU2003255718A1 (en) | 2002-07-17 | 2003-07-14 | Detection of metal contaminants on a surface of an as-cleaned semiconductor structure based on photoluminescence measurements |
PCT/GB2003/003071 WO2004008125A1 (en) | 2002-07-17 | 2003-07-14 | Detection of metal contaminants on a surface of an as-cleaned semiconductor structure based on photoluminescence measurements |
TW92119549A TW200408806A (en) | 2002-07-17 | 2003-07-17 | Detection method and apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0216620A GB0216620D0 (en) | 2002-07-17 | 2002-07-17 | Detection method and apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
GB0216620D0 true GB0216620D0 (en) | 2002-08-28 |
Family
ID=9940655
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0216620A Ceased GB0216620D0 (en) | 2002-07-17 | 2002-07-17 | Detection method and apparatus |
Country Status (4)
Country | Link |
---|---|
AU (1) | AU2003255718A1 (en) |
GB (1) | GB0216620D0 (en) |
TW (1) | TW200408806A (en) |
WO (1) | WO2004008125A1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006204292A (en) * | 2004-12-27 | 2006-08-10 | Asahi Kasei Corp | Agent for inhibiting differentiation of human embryonic stem cell |
WO2011015412A1 (en) * | 2009-08-04 | 2011-02-10 | Asml Netherlands B.V. | Object inspection systems and methods |
NL2007128A (en) * | 2010-08-16 | 2012-02-20 | Asml Netherlands Bv | Imprint lithography inspection method and apparatus. |
US9488922B2 (en) | 2010-12-06 | 2016-11-08 | Asml Netherlands B.V. | Methods and apparatus for inspection of articles, EUV lithography reticles, lithography apparatus and method of manufacturing devices |
CA2940894A1 (en) * | 2014-02-27 | 2015-09-03 | Walter Surface Technologies Inc. | Industrial cleanliness measurement methodology |
CN108613967B (en) * | 2018-08-09 | 2020-12-08 | 江苏师范大学 | Raman spectrum testing system |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5922606A (en) * | 1997-09-16 | 1999-07-13 | Nalco Chemical Company | Fluorometric method for increasing the efficiency of the rinsing and water recovery process in the manufacture of semiconductor chips |
AU2001292110A1 (en) * | 2000-10-06 | 2002-04-15 | Aoti Operating Company, Inc. | Method to detect surface metal contamination |
-
2002
- 2002-07-17 GB GB0216620A patent/GB0216620D0/en not_active Ceased
-
2003
- 2003-07-14 AU AU2003255718A patent/AU2003255718A1/en not_active Abandoned
- 2003-07-14 WO PCT/GB2003/003071 patent/WO2004008125A1/en not_active Application Discontinuation
- 2003-07-17 TW TW92119549A patent/TW200408806A/en unknown
Also Published As
Publication number | Publication date |
---|---|
TW200408806A (en) | 2004-06-01 |
AU2003255718A1 (en) | 2004-02-02 |
WO2004008125A1 (en) | 2004-01-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AT | Applications terminated before publication under section 16(1) |