GB0216620D0 - Detection method and apparatus - Google Patents

Detection method and apparatus

Info

Publication number
GB0216620D0
GB0216620D0 GB0216620A GB0216620A GB0216620D0 GB 0216620 D0 GB0216620 D0 GB 0216620D0 GB 0216620 A GB0216620 A GB 0216620A GB 0216620 A GB0216620 A GB 0216620A GB 0216620 D0 GB0216620 D0 GB 0216620D0
Authority
GB
United Kingdom
Prior art keywords
detection method
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0216620A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aoti Operating Co Inc
Original Assignee
Aoti Operating Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aoti Operating Co Inc filed Critical Aoti Operating Co Inc
Priority to GB0216620A priority Critical patent/GB0216620D0/en
Publication of GB0216620D0 publication Critical patent/GB0216620D0/en
Priority to AU2003255718A priority patent/AU2003255718A1/en
Priority to PCT/GB2003/003071 priority patent/WO2004008125A1/en
Priority to TW92119549A priority patent/TW200408806A/en
Ceased legal-status Critical Current

Links

GB0216620A 2002-07-17 2002-07-17 Detection method and apparatus Ceased GB0216620D0 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB0216620A GB0216620D0 (en) 2002-07-17 2002-07-17 Detection method and apparatus
AU2003255718A AU2003255718A1 (en) 2002-07-17 2003-07-14 Detection of metal contaminants on a surface of an as-cleaned semiconductor structure based on photoluminescence measurements
PCT/GB2003/003071 WO2004008125A1 (en) 2002-07-17 2003-07-14 Detection of metal contaminants on a surface of an as-cleaned semiconductor structure based on photoluminescence measurements
TW92119549A TW200408806A (en) 2002-07-17 2003-07-17 Detection method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0216620A GB0216620D0 (en) 2002-07-17 2002-07-17 Detection method and apparatus

Publications (1)

Publication Number Publication Date
GB0216620D0 true GB0216620D0 (en) 2002-08-28

Family

ID=9940655

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0216620A Ceased GB0216620D0 (en) 2002-07-17 2002-07-17 Detection method and apparatus

Country Status (4)

Country Link
AU (1) AU2003255718A1 (en)
GB (1) GB0216620D0 (en)
TW (1) TW200408806A (en)
WO (1) WO2004008125A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006204292A (en) * 2004-12-27 2006-08-10 Asahi Kasei Corp Agent for inhibiting differentiation of human embryonic stem cell
WO2011015412A1 (en) * 2009-08-04 2011-02-10 Asml Netherlands B.V. Object inspection systems and methods
NL2007128A (en) * 2010-08-16 2012-02-20 Asml Netherlands Bv Imprint lithography inspection method and apparatus.
US9488922B2 (en) 2010-12-06 2016-11-08 Asml Netherlands B.V. Methods and apparatus for inspection of articles, EUV lithography reticles, lithography apparatus and method of manufacturing devices
CA2940894A1 (en) * 2014-02-27 2015-09-03 Walter Surface Technologies Inc. Industrial cleanliness measurement methodology
CN108613967B (en) * 2018-08-09 2020-12-08 江苏师范大学 Raman spectrum testing system

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5922606A (en) * 1997-09-16 1999-07-13 Nalco Chemical Company Fluorometric method for increasing the efficiency of the rinsing and water recovery process in the manufacture of semiconductor chips
AU2001292110A1 (en) * 2000-10-06 2002-04-15 Aoti Operating Company, Inc. Method to detect surface metal contamination

Also Published As

Publication number Publication date
TW200408806A (en) 2004-06-01
AU2003255718A1 (en) 2004-02-02
WO2004008125A1 (en) 2004-01-22

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)