GB0216184D0 - Detection method and apparatus - Google Patents

Detection method and apparatus

Info

Publication number
GB0216184D0
GB0216184D0 GB0216184A GB0216184A GB0216184D0 GB 0216184 D0 GB0216184 D0 GB 0216184D0 GB 0216184 A GB0216184 A GB 0216184A GB 0216184 A GB0216184 A GB 0216184A GB 0216184 D0 GB0216184 D0 GB 0216184D0
Authority
GB
United Kingdom
Prior art keywords
detection method
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0216184A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aoti Operating Co Inc
Original Assignee
Aoti Operating Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Aoti Operating Co Inc filed Critical Aoti Operating Co Inc
Priority to GB0216184A priority Critical patent/GB0216184D0/en
Publication of GB0216184D0 publication Critical patent/GB0216184D0/en
Priority to TW92119030A priority patent/TW200427977A/en
Priority to PCT/GB2003/003030 priority patent/WO2004008118A1/en
Priority to AU2003281074A priority patent/AU2003281074A1/en
Ceased legal-status Critical Current

Links

GB0216184A 2002-07-12 2002-07-12 Detection method and apparatus Ceased GB0216184D0 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB0216184A GB0216184D0 (en) 2002-07-12 2002-07-12 Detection method and apparatus
TW92119030A TW200427977A (en) 2002-07-12 2003-07-11 Detection method and apparatus
PCT/GB2003/003030 WO2004008118A1 (en) 2002-07-12 2003-07-14 Detection method and apparatus
AU2003281074A AU2003281074A1 (en) 2002-07-12 2003-07-14 Detection method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0216184A GB0216184D0 (en) 2002-07-12 2002-07-12 Detection method and apparatus

Publications (1)

Publication Number Publication Date
GB0216184D0 true GB0216184D0 (en) 2002-08-21

Family

ID=9940311

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0216184A Ceased GB0216184D0 (en) 2002-07-12 2002-07-12 Detection method and apparatus

Country Status (4)

Country Link
AU (1) AU2003281074A1 (en)
GB (1) GB0216184D0 (en)
TW (1) TW200427977A (en)
WO (1) WO2004008118A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2272101A4 (en) * 2008-03-31 2012-06-27 Bt Imaging Pty Ltd Wafer imaging and processing method and apparatus
JP7057122B2 (en) * 2017-12-22 2022-04-19 グローバルウェーハズ・ジャパン株式会社 Metal pollution evaluation method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4571685A (en) * 1982-06-23 1986-02-18 Nec Corporation Production system for manufacturing semiconductor devices
GB9618897D0 (en) * 1996-09-10 1996-10-23 Bio Rad Micromeasurements Ltd Micro defects in silicon wafers
GB9803842D0 (en) * 1998-02-25 1998-04-22 Shin Etsu Handotai Europ Ltd Semiconductor wafer inspection apparatus

Also Published As

Publication number Publication date
WO2004008118A1 (en) 2004-01-22
AU2003281074A1 (en) 2004-02-02
TW200427977A (en) 2004-12-16

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)