FR846105A - Procédé pour métalliser des articles métalliques par pulvérisation cathodique - Google Patents

Procédé pour métalliser des articles métalliques par pulvérisation cathodique

Info

Publication number
FR846105A
FR846105A FR846105DA FR846105A FR 846105 A FR846105 A FR 846105A FR 846105D A FR846105D A FR 846105DA FR 846105 A FR846105 A FR 846105A
Authority
FR
France
Prior art keywords
metallizing
sputtering
metallic articles
articles
metallic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
French (fr)
Inventor
Bernhard Berghaus
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR846105A publication Critical patent/FR846105A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5893—Mixing of deposited material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Physical Vapour Deposition (AREA)
FR846105D 1937-11-30 1938-11-16 Procédé pour métalliser des articles métalliques par pulvérisation cathodique Expired FR846105A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEB180932D DE763719C (de) 1937-11-30 1937-11-30 Verfahren zum Metallisieren von metallischen Gegenstaenden mittels Kathodenzerstaeubung

Publications (1)

Publication Number Publication Date
FR846105A true FR846105A (fr) 1939-09-11

Family

ID=32079494

Family Applications (1)

Application Number Title Priority Date Filing Date
FR846105D Expired FR846105A (fr) 1937-11-30 1938-11-16 Procédé pour métalliser des articles métalliques par pulvérisation cathodique

Country Status (2)

Country Link
DE (1) DE763719C (de)
FR (1) FR846105A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1515312B1 (de) * 1965-06-14 1972-04-27 Siemens Ag Vorrichtung zur Herstellung dünner Schichten durch Kathodenzerstäubung

Also Published As

Publication number Publication date
DE763719C (de) 1954-10-18

Similar Documents

Publication Publication Date Title
FR842974A (fr) Procédé de préparation de négatifs ou doubles métalliques par métallisation
FR841903A (fr) Procédé et dispositif pour métalliser ou revêtir des articles par pulvérisation cathodique
FR835661A (fr) Procédé de pulvérisation cathodique
FR822069A (fr) Procédé pour métalliser ou revêtir des objets par pulvérisation cathodique
FR833734A (fr) Procédé pour préparer des éthers
FR846105A (fr) Procédé pour métalliser des articles métalliques par pulvérisation cathodique
FR841500A (fr) Procédé pour préparer des alkinols
FR846557A (fr) Procédé pour métalliser des articles métalliques par pulvérisation cathodique
FR847185A (fr) Procédé pour métalliser des articles par pulvérisation cathodique
FR885547A (fr) Procédé pour préparer des oxy-uréthanes
FR844146A (fr) Procédé pour préparer le butadiène
FR840300A (fr) Procédé pour préparer le butadiène
FR837700A (fr) Procédé de coulée continue
FR844226A (fr) Procédé pour préparer des beta-aralcoylamines
FR836412A (fr) Procédé de décoration des pièces en verre
FR835373A (fr) Procédé pour polymériser les diènes
FR823867A (fr) Procédé de doublage de métaux
FR875390A (fr) Procédé pour préparer des jus stabilisés
FR844893A (fr) Procédé pour préparer des dioléfines
FR837194A (fr) Procédé pour préparer le butadiène
FR847259A (fr) Procédé pour préparer le nitrate de glycide
FR837462A (fr) Procédé et dispositif pour métalliser ou revêtir des articles par pulvérisation cathodique
FR873732A (fr) Procédé pour préparer des jus végétaux exprimés chlorophyllifères clarifiés
FR879790A (fr) Procédé pour préparer des superpolyamides
FR838321A (fr) Procédé pour préparer des 2-alcoxy-nitrobenzo-nitriles