FR835661A - Procédé de pulvérisation cathodique - Google Patents

Procédé de pulvérisation cathodique

Info

Publication number
FR835661A
FR835661A FR835661DA FR835661A FR 835661 A FR835661 A FR 835661A FR 835661D A FR835661D A FR 835661DA FR 835661 A FR835661 A FR 835661A
Authority
FR
France
Prior art keywords
sputtering process
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Inventor
Bernhard Berghaus
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR835661A publication Critical patent/FR835661A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3428—Cathode assembly for sputtering apparatus, e.g. Target using liquid targets
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrolytic Production Of Metals (AREA)
FR835661D 1937-03-25 1938-03-23 Procédé de pulvérisation cathodique Expired FR835661A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE835661X 1937-03-25

Publications (1)

Publication Number Publication Date
FR835661A true FR835661A (fr) 1938-12-28

Family

ID=6760969

Family Applications (1)

Application Number Title Priority Date Filing Date
FR835661D Expired FR835661A (fr) 1937-03-25 1938-03-23 Procédé de pulvérisation cathodique

Country Status (3)

Country Link
US (1) US2206020A (fr)
FR (1) FR835661A (fr)
GB (1) GB505135A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2088554A1 (fr) * 1970-05-13 1972-01-07 United Aircraft Corp

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2431887A (en) * 1940-01-16 1947-12-02 Penning Frans Michel Electric device and method for heating materials
GB770751A (en) * 1952-12-31 1957-03-27 Edwards And Company London Ltd Improvements in or relating to the vaporisation of aluminium
BE569245A (fr) * 1953-12-09
GB879256A (en) * 1956-10-12 1961-10-11 Edwards High Vacuum Ltd Improvements in or relating to vaporisation of metals
US3210263A (en) * 1962-01-11 1965-10-05 Nuclear Materials & Equipment Electric discharge apparatus for etching
US3305473A (en) * 1964-08-20 1967-02-21 Cons Vacuum Corp Triode sputtering apparatus for depositing uniform coatings
JPH07268622A (ja) * 1994-03-01 1995-10-17 Applied Sci & Technol Inc マイクロ波プラズマ付着源

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2088554A1 (fr) * 1970-05-13 1972-01-07 United Aircraft Corp

Also Published As

Publication number Publication date
US2206020A (en) 1940-07-02
GB505135A (en) 1939-05-05

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