FR3117102B1 - Plateforme de nanostructures pour l’interfaçage cellulaire et procédé de fabrication correspondant - Google Patents

Plateforme de nanostructures pour l’interfaçage cellulaire et procédé de fabrication correspondant Download PDF

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Publication number
FR3117102B1
FR3117102B1 FR2012720A FR2012720A FR3117102B1 FR 3117102 B1 FR3117102 B1 FR 3117102B1 FR 2012720 A FR2012720 A FR 2012720A FR 2012720 A FR2012720 A FR 2012720A FR 3117102 B1 FR3117102 B1 FR 3117102B1
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FR
France
Prior art keywords
nanowires
platform
access lines
fabrication process
cellular interfacing
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Active
Application number
FR2012720A
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English (en)
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FR3117102A1 (fr
Inventor
Guilhem Larrieu
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Centre National de la Recherche Scientifique CNRS
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Centre National de la Recherche Scientifique CNRS
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Priority to FR2012720A priority Critical patent/FR3117102B1/fr
Priority to FR2111269A priority patent/FR3117101A1/fr
Priority to US18/254,881 priority patent/US20240011940A1/en
Priority to EP21835636.8A priority patent/EP4256327A2/fr
Priority to JP2023533959A priority patent/JP2024509341A/ja
Priority to PCT/EP2021/084283 priority patent/WO2022117880A2/fr
Publication of FR3117102A1 publication Critical patent/FR3117102A1/fr
Application granted granted Critical
Publication of FR3117102B1 publication Critical patent/FR3117102B1/fr
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G01N33/487—Physical analysis of biological material of liquid biological material
    • G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
    • G01N33/48728—Investigating individual cells, e.g. by patch clamp, voltage clamp
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A61B5/25—Bioelectric electrodes therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G01N33/4833—Physical analysis of biological material of solid biological material, e.g. tissue samples, cell cultures
    • G01N33/4836—Physical analysis of biological material of solid biological material, e.g. tissue samples, cell cultures using multielectrode arrays
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/12—Manufacturing methods specially adapted for producing sensors for in-vivo measurements
    • A61B2562/125—Manufacturing methods specially adapted for producing sensors for in-vivo measurements characterised by the manufacture of electrodes

Abstract

L’invention se rapporte à un procédé de fabrication d’une plateforme pour l’interfaçage cellulaire, la plateforme étant fabriquée sur un substrat massif prédéterminé, procédé de type descendant. Selon l’invention, un tel procédé comprend les étapes ordonnées suivantes : - création (E10) de nanofils verticaux sur le substrat massif ; - dépôt (E30) d’une couche de Si - création (E40) des lignes d’accès aux nanofils ; - siliciuration (E50) sélective des lignes d’accès et des nanofils ; - structuration (E60) métallique des lignes d’accès ; - dépôt (E60) d’une couche isolante pour la mesure liquide ; - retrait sélectif (E70) de la couche isolante sur les nanofils. Figure 1
FR2012720A 2020-12-04 2020-12-04 Plateforme de nanostructures pour l’interfaçage cellulaire et procédé de fabrication correspondant Active FR3117102B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR2012720A FR3117102B1 (fr) 2020-12-04 2020-12-04 Plateforme de nanostructures pour l’interfaçage cellulaire et procédé de fabrication correspondant
FR2111269A FR3117101A1 (fr) 2020-12-04 2021-10-22 Plateforme de nanostructures pour l’interfaçage cellulaire et procédé de fabrication correspondant
US18/254,881 US20240011940A1 (en) 2020-12-04 2021-12-03 Nanostructure platform for cellular interfacing and corresponding manufacturing method
EP21835636.8A EP4256327A2 (fr) 2020-12-04 2021-12-03 Plateforme de nanostructures pour l'interfaçage cellulaire et procédé de fabrication correspondant
JP2023533959A JP2024509341A (ja) 2020-12-04 2021-12-03 細胞相互作用のためのナノ構造プラットフォームおよび対応する製造方法
PCT/EP2021/084283 WO2022117880A2 (fr) 2020-12-04 2021-12-03 Plateforme de nanostructures pour l'interfaçage cellulaire et procédé de fabrication correspondant

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2012720A FR3117102B1 (fr) 2020-12-04 2020-12-04 Plateforme de nanostructures pour l’interfaçage cellulaire et procédé de fabrication correspondant
FR2012720 2020-12-04

Publications (2)

Publication Number Publication Date
FR3117102A1 FR3117102A1 (fr) 2022-06-10
FR3117102B1 true FR3117102B1 (fr) 2023-01-06

Family

ID=74758970

Family Applications (2)

Application Number Title Priority Date Filing Date
FR2012720A Active FR3117102B1 (fr) 2020-12-04 2020-12-04 Plateforme de nanostructures pour l’interfaçage cellulaire et procédé de fabrication correspondant
FR2111269A Pending FR3117101A1 (fr) 2020-12-04 2021-10-22 Plateforme de nanostructures pour l’interfaçage cellulaire et procédé de fabrication correspondant

Family Applications After (1)

Application Number Title Priority Date Filing Date
FR2111269A Pending FR3117101A1 (fr) 2020-12-04 2021-10-22 Plateforme de nanostructures pour l’interfaçage cellulaire et procédé de fabrication correspondant

Country Status (2)

Country Link
JP (1) JP2024509341A (fr)
FR (2) FR3117102B1 (fr)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070187840A1 (en) * 2005-11-21 2007-08-16 Dell Acqua-Bellavitis Ludovico Nanoscale probes for electrophysiological applications
US7905013B2 (en) 2007-06-04 2011-03-15 Sharp Laboratories Of America, Inc. Method for forming an iridium oxide (IrOx) nanowire neural sensor array
US20180169403A1 (en) 2015-01-09 2018-06-21 President And Fellows Of Harvard College Nanowire arrays for neurotechnology and other applications
US11363979B2 (en) 2016-01-19 2022-06-21 The Regents Of The University Of California Addressable vertical nanowire probe arrays and fabrication methods
FR3074489B1 (fr) 2017-12-05 2023-04-21 Centre Nat Rech Scient Plateforme de nanostructures pour l’interfacage cellulaire et procede de fabrication correspondant
US20210093246A1 (en) * 2018-05-10 2021-04-01 The Regents Of The University Of California Sharp, vertically aligned nanowire electrode arrays, high-yield fabrication and intracellular recording
GB2576502A (en) * 2018-08-17 2020-02-26 3Brain Ag Probe arrays

Also Published As

Publication number Publication date
JP2024509341A (ja) 2024-03-01
FR3117101A1 (fr) 2022-06-10
FR3117102A1 (fr) 2022-06-10

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